8/31/2011	12:24:01 AM	Helium valve closed
8/31/2011	12:24:01 AM	BCl3 valve closed
8/31/2011	12:24:01 AM	PH3 valve closed
8/31/2011	12:24:01 AM	SiCl4 pre valve closed
8/31/2011	12:24:01 AM	SiCl4 post valve closed
8/31/2011	12:24:01 AM	Main Vac valve closed
8/31/2011	12:24:01 AM	Bypass valve closed
8/31/2011	12:24:01 AM	H2 valve opened
8/31/2011	12:24:01 AM	Bubbler valve opened
8/31/2011	12:24:01 AM	Helium MFC set to  0.000000
8/31/2011	12:24:01 AM	H2 MFC set to  500.000000
8/31/2011	12:24:01 AM	BCl3 MFC set to  0.000000
8/31/2011	12:24:01 AM	PHl3 MFC set to  0.000000
8/31/2011	12:24:01 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:24:01 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:24:01 AM	Tube furnace set to 750
8/31/2011	12:29:01 AM	H2 valve closed
8/31/2011	12:29:01 AM	BCl3 valve closed
8/31/2011	12:29:01 AM	PH3 valve closed
8/31/2011	12:29:01 AM	SiCl4 pre valve closed
8/31/2011	12:29:01 AM	SiCl4 post valve closed
8/31/2011	12:29:01 AM	Main Vac valve closed
8/31/2011	12:29:01 AM	Bypass valve closed
8/31/2011	12:29:01 AM	Helium valve opened
8/31/2011	12:29:01 AM	Bubbler valve opened
8/31/2011	12:29:01 AM	Helium MFC set to  500.000000
8/31/2011	12:29:01 AM	H2 MFC set to  0.000000
8/31/2011	12:29:01 AM	BCl3 MFC set to  0.000000
8/31/2011	12:29:01 AM	PHl3 MFC set to  0.000000
8/31/2011	12:29:01 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:29:01 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:29:01 AM	Tube furnace set to 0
8/31/2011	12:49:01 AM	Helium valve closed
8/31/2011	12:49:01 AM	H2 valve closed
8/31/2011	12:49:01 AM	BCl3 valve closed
8/31/2011	12:49:01 AM	PH3 valve closed
8/31/2011	12:49:01 AM	SiCl4 pre valve closed
8/31/2011	12:49:01 AM	SiCl4 post valve closed
8/31/2011	12:49:01 AM	Main Vac valve closed
8/31/2011	12:49:01 AM	Bypass valve closed
8/31/2011	12:49:01 AM	Bubbler valve closed
8/31/2011	12:49:01 AM	Helium MFC set to  0.000000
8/31/2011	12:49:01 AM	H2 MFC set to  0.000000
8/31/2011	12:49:01 AM	BCl3 MFC set to  0.000000
8/31/2011	12:49:01 AM	PHl3 MFC set to  0.000000
8/31/2011	12:49:01 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:49:01 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:49:01 AM	Tube furnace set to 0
8/31/2011	12:49:02 AM	Run finished at 12:49 AM
8/31/2011	12:53:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	12:53:25 AM	Recipe started at 12:53 AM
8/31/2011	12:53:25 AM	Helium valve closed
8/31/2011	12:53:25 AM	H2 valve closed
8/31/2011	12:53:25 AM	BCl3 valve closed
8/31/2011	12:53:25 AM	PH3 valve closed
8/31/2011	12:53:25 AM	SiCl4 pre valve closed
8/31/2011	12:53:25 AM	SiCl4 post valve closed
8/31/2011	12:53:25 AM	Main Vac valve closed
8/31/2011	12:53:25 AM	Bubbler valve closed
8/31/2011	12:53:25 AM	Bypass valve opened
8/31/2011	12:53:25 AM	Helium MFC set to  0.000000
8/31/2011	12:53:25 AM	H2 MFC set to  0.000000
8/31/2011	12:53:25 AM	BCl3 MFC set to  0.000000
8/31/2011	12:53:25 AM	PHl3 MFC set to  0.000000
8/31/2011	12:53:25 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:53:25 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:53:25 AM	Tube furnace set to 0
8/31/2011	12:54:27 AM	Helium valve closed
8/31/2011	12:54:27 AM	H2 valve closed
8/31/2011	12:54:27 AM	BCl3 valve closed
8/31/2011	12:54:27 AM	PH3 valve closed
8/31/2011	12:54:27 AM	SiCl4 pre valve closed
8/31/2011	12:54:27 AM	SiCl4 post valve closed
8/31/2011	12:54:27 AM	Main Vac valve closed
8/31/2011	12:54:27 AM	Bubbler valve closed
8/31/2011	12:54:27 AM	Bypass valve opened
8/31/2011	12:54:27 AM	Helium MFC set to  0.000000
8/31/2011	12:54:27 AM	H2 MFC set to  0.000000
8/31/2011	12:54:27 AM	BCl3 MFC set to  0.000000
8/31/2011	12:54:27 AM	PHl3 MFC set to  0.000000
8/31/2011	12:54:27 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:54:27 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:54:27 AM	Tube furnace set to 0
8/31/2011	12:55:27 AM	Helium valve closed
8/31/2011	12:55:27 AM	H2 valve closed
8/31/2011	12:55:27 AM	BCl3 valve closed
8/31/2011	12:55:27 AM	PH3 valve closed
8/31/2011	12:55:27 AM	SiCl4 pre valve closed
8/31/2011	12:55:27 AM	SiCl4 post valve closed
8/31/2011	12:55:27 AM	Bypass valve closed
8/31/2011	12:55:27 AM	Bubbler valve closed
8/31/2011	12:55:27 AM	Main Vac valve opened
8/31/2011	12:55:27 AM	Helium MFC set to  0.000000
8/31/2011	12:55:27 AM	H2 MFC set to  0.000000
8/31/2011	12:55:27 AM	BCl3 MFC set to  0.000000
8/31/2011	12:55:27 AM	PHl3 MFC set to  0.000000
8/31/2011	12:55:27 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:55:27 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:55:28 AM	Tube furnace set to 0
8/31/2011	12:55:29 AM	Run finished at 12:55 AM
8/31/2011	12:55:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	12:55:52 AM	Recipe started at 12:55 AM
8/31/2011	12:55:52 AM	Helium valve closed
8/31/2011	12:55:52 AM	H2 valve closed
8/31/2011	12:55:52 AM	BCl3 valve closed
8/31/2011	12:55:52 AM	PH3 valve closed
8/31/2011	12:55:52 AM	SiCl4 pre valve closed
8/31/2011	12:55:52 AM	SiCl4 post valve closed
8/31/2011	12:55:52 AM	Bypass valve closed
8/31/2011	12:55:52 AM	Bubbler valve closed
8/31/2011	12:55:52 AM	Main Vac valve opened
8/31/2011	12:55:52 AM	Helium MFC set to  0.000000
8/31/2011	12:55:52 AM	H2 MFC set to  0.000000
8/31/2011	12:55:52 AM	BCl3 MFC set to  0.000000
8/31/2011	12:55:52 AM	PHl3 MFC set to  0.000000
8/31/2011	12:55:52 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:55:52 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:55:53 AM	Tube furnace set to 150
8/31/2011	12:56:23 AM	H2 valve closed
8/31/2011	12:56:23 AM	BCl3 valve closed
8/31/2011	12:56:23 AM	PH3 valve closed
8/31/2011	12:56:23 AM	SiCl4 pre valve closed
8/31/2011	12:56:23 AM	SiCl4 post valve closed
8/31/2011	12:56:23 AM	Bypass valve closed
8/31/2011	12:56:23 AM	Bubbler valve closed
8/31/2011	12:56:23 AM	Helium valve opened
8/31/2011	12:56:23 AM	Main Vac valve opened
8/31/2011	12:56:23 AM	Helium MFC set to  20.000000
8/31/2011	12:56:23 AM	H2 MFC set to  0.000000
8/31/2011	12:56:23 AM	BCl3 MFC set to  0.000000
8/31/2011	12:56:23 AM	PHl3 MFC set to  0.000000
8/31/2011	12:56:23 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:56:23 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:56:23 AM	Tube furnace set to 150
8/31/2011	12:56:53 AM	Helium valve closed
8/31/2011	12:56:53 AM	H2 valve closed
8/31/2011	12:56:53 AM	BCl3 valve closed
8/31/2011	12:56:53 AM	PH3 valve closed
8/31/2011	12:56:53 AM	SiCl4 pre valve closed
8/31/2011	12:56:53 AM	SiCl4 post valve closed
8/31/2011	12:56:53 AM	Bypass valve closed
8/31/2011	12:56:53 AM	Bubbler valve closed
8/31/2011	12:56:53 AM	Main Vac valve opened
8/31/2011	12:56:53 AM	Helium MFC set to  0.000000
8/31/2011	12:56:53 AM	H2 MFC set to  0.000000
8/31/2011	12:56:53 AM	BCl3 MFC set to  0.000000
8/31/2011	12:56:53 AM	PHl3 MFC set to  0.000000
8/31/2011	12:56:53 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:56:53 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:56:53 AM	Tube furnace set to 150
8/31/2011	12:57:23 AM	H2 valve closed
8/31/2011	12:57:23 AM	BCl3 valve closed
8/31/2011	12:57:23 AM	PH3 valve closed
8/31/2011	12:57:23 AM	SiCl4 pre valve closed
8/31/2011	12:57:23 AM	SiCl4 post valve closed
8/31/2011	12:57:23 AM	Bypass valve closed
8/31/2011	12:57:23 AM	Bubbler valve closed
8/31/2011	12:57:23 AM	Helium valve opened
8/31/2011	12:57:23 AM	Main Vac valve opened
8/31/2011	12:57:23 AM	Helium MFC set to  20.000000
8/31/2011	12:57:23 AM	H2 MFC set to  0.000000
8/31/2011	12:57:23 AM	BCl3 MFC set to  0.000000
8/31/2011	12:57:23 AM	PHl3 MFC set to  0.000000
8/31/2011	12:57:23 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:57:23 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:57:23 AM	Tube furnace set to 150
8/31/2011	12:57:53 AM	Helium valve closed
8/31/2011	12:57:53 AM	H2 valve closed
8/31/2011	12:57:53 AM	BCl3 valve closed
8/31/2011	12:57:53 AM	PH3 valve closed
8/31/2011	12:57:53 AM	SiCl4 pre valve closed
8/31/2011	12:57:53 AM	SiCl4 post valve closed
8/31/2011	12:57:53 AM	Bypass valve closed
8/31/2011	12:57:53 AM	Bubbler valve closed
8/31/2011	12:57:53 AM	Main Vac valve opened
8/31/2011	12:57:53 AM	Helium MFC set to  0.000000
8/31/2011	12:57:53 AM	H2 MFC set to  0.000000
8/31/2011	12:57:53 AM	BCl3 MFC set to  0.000000
8/31/2011	12:57:53 AM	PHl3 MFC set to  0.000000
8/31/2011	12:57:53 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:57:53 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:57:53 AM	Tube furnace set to 150
8/31/2011	12:58:23 AM	H2 valve closed
8/31/2011	12:58:23 AM	BCl3 valve closed
8/31/2011	12:58:23 AM	PH3 valve closed
8/31/2011	12:58:23 AM	SiCl4 pre valve closed
8/31/2011	12:58:23 AM	SiCl4 post valve closed
8/31/2011	12:58:23 AM	Bypass valve closed
8/31/2011	12:58:23 AM	Bubbler valve closed
8/31/2011	12:58:23 AM	Helium valve opened
8/31/2011	12:58:23 AM	Main Vac valve opened
8/31/2011	12:58:23 AM	Helium MFC set to  20.000000
8/31/2011	12:58:23 AM	H2 MFC set to  0.000000
8/31/2011	12:58:23 AM	BCl3 MFC set to  0.000000
8/31/2011	12:58:23 AM	PHl3 MFC set to  0.000000
8/31/2011	12:58:23 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:58:23 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:58:24 AM	Tube furnace set to 150
8/31/2011	12:58:54 AM	Helium valve closed
8/31/2011	12:58:54 AM	H2 valve closed
8/31/2011	12:58:54 AM	BCl3 valve closed
8/31/2011	12:58:54 AM	PH3 valve closed
8/31/2011	12:58:54 AM	SiCl4 pre valve closed
8/31/2011	12:58:54 AM	SiCl4 post valve closed
8/31/2011	12:58:54 AM	Bypass valve closed
8/31/2011	12:58:54 AM	Bubbler valve closed
8/31/2011	12:58:54 AM	Main Vac valve opened
8/31/2011	12:58:54 AM	Helium MFC set to  0.000000
8/31/2011	12:58:54 AM	H2 MFC set to  0.000000
8/31/2011	12:58:54 AM	BCl3 MFC set to  0.000000
8/31/2011	12:58:54 AM	PHl3 MFC set to  0.000000
8/31/2011	12:58:54 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:58:54 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:58:54 AM	Tube furnace set to 150
8/31/2011	12:59:24 AM	H2 valve closed
8/31/2011	12:59:24 AM	BCl3 valve closed
8/31/2011	12:59:24 AM	PH3 valve closed
8/31/2011	12:59:24 AM	SiCl4 pre valve closed
8/31/2011	12:59:24 AM	SiCl4 post valve closed
8/31/2011	12:59:24 AM	Bypass valve closed
8/31/2011	12:59:24 AM	Bubbler valve closed
8/31/2011	12:59:24 AM	Helium valve opened
8/31/2011	12:59:24 AM	Main Vac valve opened
8/31/2011	12:59:24 AM	Helium MFC set to  20.000000
8/31/2011	12:59:24 AM	H2 MFC set to  0.000000
8/31/2011	12:59:24 AM	BCl3 MFC set to  0.000000
8/31/2011	12:59:24 AM	PHl3 MFC set to  0.000000
8/31/2011	12:59:24 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:59:24 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:59:24 AM	Tube furnace set to 150
8/31/2011	12:59:54 AM	Helium valve closed
8/31/2011	12:59:54 AM	H2 valve closed
8/31/2011	12:59:54 AM	BCl3 valve closed
8/31/2011	12:59:54 AM	PH3 valve closed
8/31/2011	12:59:54 AM	SiCl4 pre valve closed
8/31/2011	12:59:54 AM	SiCl4 post valve closed
8/31/2011	12:59:54 AM	Bypass valve closed
8/31/2011	12:59:54 AM	Bubbler valve closed
8/31/2011	12:59:54 AM	Main Vac valve opened
8/31/2011	12:59:54 AM	Helium MFC set to  0.000000
8/31/2011	12:59:54 AM	H2 MFC set to  0.000000
8/31/2011	12:59:54 AM	BCl3 MFC set to  0.000000
8/31/2011	12:59:54 AM	PHl3 MFC set to  0.000000
8/31/2011	12:59:54 AM	SiCl4 MFC set to  0.000000
8/31/2011	12:59:54 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:59:54 AM	Tube furnace set to 150
8/31/2011	1:00:24 AM	H2 valve closed
8/31/2011	1:00:24 AM	BCl3 valve closed
8/31/2011	1:00:24 AM	PH3 valve closed
8/31/2011	1:00:24 AM	SiCl4 pre valve closed
8/31/2011	1:00:24 AM	SiCl4 post valve closed
8/31/2011	1:00:24 AM	Bypass valve closed
8/31/2011	1:00:24 AM	Bubbler valve closed
8/31/2011	1:00:24 AM	Helium valve opened
8/31/2011	1:00:24 AM	Main Vac valve opened
8/31/2011	1:00:24 AM	Helium MFC set to  20.000000
8/31/2011	1:00:24 AM	H2 MFC set to  0.000000
8/31/2011	1:00:24 AM	BCl3 MFC set to  0.000000
8/31/2011	1:00:24 AM	PHl3 MFC set to  0.000000
8/31/2011	1:00:24 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:00:24 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:00:24 AM	Tube furnace set to 150
8/31/2011	1:00:54 AM	Helium valve closed
8/31/2011	1:00:54 AM	H2 valve closed
8/31/2011	1:00:54 AM	BCl3 valve closed
8/31/2011	1:00:54 AM	PH3 valve closed
8/31/2011	1:00:54 AM	SiCl4 pre valve closed
8/31/2011	1:00:54 AM	SiCl4 post valve closed
8/31/2011	1:00:54 AM	Bypass valve closed
8/31/2011	1:00:54 AM	Bubbler valve closed
8/31/2011	1:00:54 AM	Main Vac valve opened
8/31/2011	1:00:54 AM	Helium MFC set to  0.000000
8/31/2011	1:00:54 AM	H2 MFC set to  0.000000
8/31/2011	1:00:54 AM	BCl3 MFC set to  0.000000
8/31/2011	1:00:54 AM	PHl3 MFC set to  0.000000
8/31/2011	1:00:54 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:00:54 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:00:55 AM	Tube furnace set to 150
8/31/2011	1:01:25 AM	H2 valve closed
8/31/2011	1:01:25 AM	BCl3 valve closed
8/31/2011	1:01:25 AM	PH3 valve closed
8/31/2011	1:01:25 AM	SiCl4 pre valve closed
8/31/2011	1:01:25 AM	SiCl4 post valve closed
8/31/2011	1:01:25 AM	Bypass valve closed
8/31/2011	1:01:25 AM	Bubbler valve closed
8/31/2011	1:01:25 AM	Helium valve opened
8/31/2011	1:01:25 AM	Main Vac valve opened
8/31/2011	1:01:25 AM	Helium MFC set to  20.000000
8/31/2011	1:01:25 AM	H2 MFC set to  0.000000
8/31/2011	1:01:25 AM	BCl3 MFC set to  0.000000
8/31/2011	1:01:25 AM	PHl3 MFC set to  0.000000
8/31/2011	1:01:25 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:01:25 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:01:25 AM	Tube furnace set to 150
8/31/2011	1:01:55 AM	Helium valve closed
8/31/2011	1:01:55 AM	H2 valve closed
8/31/2011	1:01:55 AM	BCl3 valve closed
8/31/2011	1:01:55 AM	PH3 valve closed
8/31/2011	1:01:55 AM	SiCl4 pre valve closed
8/31/2011	1:01:55 AM	SiCl4 post valve closed
8/31/2011	1:01:55 AM	Bypass valve closed
8/31/2011	1:01:55 AM	Bubbler valve closed
8/31/2011	1:01:55 AM	Main Vac valve opened
8/31/2011	1:01:55 AM	Helium MFC set to  0.000000
8/31/2011	1:01:55 AM	H2 MFC set to  0.000000
8/31/2011	1:01:55 AM	BCl3 MFC set to  0.000000
8/31/2011	1:01:55 AM	PHl3 MFC set to  0.000000
8/31/2011	1:01:55 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:01:55 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:01:55 AM	Tube furnace set to 150
8/31/2011	1:02:25 AM	H2 valve closed
8/31/2011	1:02:25 AM	BCl3 valve closed
8/31/2011	1:02:25 AM	PH3 valve closed
8/31/2011	1:02:25 AM	SiCl4 pre valve closed
8/31/2011	1:02:25 AM	SiCl4 post valve closed
8/31/2011	1:02:25 AM	Bypass valve closed
8/31/2011	1:02:25 AM	Bubbler valve closed
8/31/2011	1:02:25 AM	Helium valve opened
8/31/2011	1:02:25 AM	Main Vac valve opened
8/31/2011	1:02:25 AM	Helium MFC set to  20.000000
8/31/2011	1:02:25 AM	H2 MFC set to  0.000000
8/31/2011	1:02:25 AM	BCl3 MFC set to  0.000000
8/31/2011	1:02:25 AM	PHl3 MFC set to  0.000000
8/31/2011	1:02:25 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:02:25 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:02:25 AM	Tube furnace set to 150
8/31/2011	1:02:55 AM	Helium valve closed
8/31/2011	1:02:55 AM	H2 valve closed
8/31/2011	1:02:55 AM	BCl3 valve closed
8/31/2011	1:02:55 AM	PH3 valve closed
8/31/2011	1:02:55 AM	SiCl4 pre valve closed
8/31/2011	1:02:55 AM	SiCl4 post valve closed
8/31/2011	1:02:55 AM	Bypass valve closed
8/31/2011	1:02:55 AM	Bubbler valve closed
8/31/2011	1:02:55 AM	Main Vac valve opened
8/31/2011	1:02:55 AM	Helium MFC set to  0.000000
8/31/2011	1:02:55 AM	H2 MFC set to  0.000000
8/31/2011	1:02:55 AM	BCl3 MFC set to  0.000000
8/31/2011	1:02:55 AM	PHl3 MFC set to  0.000000
8/31/2011	1:02:55 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:02:55 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:02:55 AM	Tube furnace set to 150
8/31/2011	1:03:25 AM	H2 valve closed
8/31/2011	1:03:25 AM	BCl3 valve closed
8/31/2011	1:03:25 AM	PH3 valve closed
8/31/2011	1:03:25 AM	SiCl4 pre valve closed
8/31/2011	1:03:26 AM	SiCl4 post valve closed
8/31/2011	1:03:26 AM	Bypass valve closed
8/31/2011	1:03:26 AM	Bubbler valve closed
8/31/2011	1:03:26 AM	Helium valve opened
8/31/2011	1:03:26 AM	Main Vac valve opened
8/31/2011	1:03:26 AM	Helium MFC set to  20.000000
8/31/2011	1:03:26 AM	H2 MFC set to  0.000000
8/31/2011	1:03:26 AM	BCl3 MFC set to  0.000000
8/31/2011	1:03:26 AM	PHl3 MFC set to  0.000000
8/31/2011	1:03:26 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:03:26 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:03:26 AM	Tube furnace set to 150
8/31/2011	1:03:56 AM	Helium valve closed
8/31/2011	1:03:56 AM	H2 valve closed
8/31/2011	1:03:56 AM	BCl3 valve closed
8/31/2011	1:03:56 AM	PH3 valve closed
8/31/2011	1:03:56 AM	SiCl4 pre valve closed
8/31/2011	1:03:56 AM	SiCl4 post valve closed
8/31/2011	1:03:56 AM	Bypass valve closed
8/31/2011	1:03:56 AM	Bubbler valve closed
8/31/2011	1:03:56 AM	Main Vac valve opened
8/31/2011	1:03:56 AM	Helium MFC set to  0.000000
8/31/2011	1:03:56 AM	H2 MFC set to  0.000000
8/31/2011	1:03:56 AM	BCl3 MFC set to  0.000000
8/31/2011	1:03:56 AM	PHl3 MFC set to  0.000000
8/31/2011	1:03:56 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:03:56 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:03:56 AM	Tube furnace set to 150
8/31/2011	1:04:26 AM	H2 valve closed
8/31/2011	1:04:26 AM	BCl3 valve closed
8/31/2011	1:04:26 AM	PH3 valve closed
8/31/2011	1:04:26 AM	SiCl4 pre valve closed
8/31/2011	1:04:26 AM	SiCl4 post valve closed
8/31/2011	1:04:26 AM	Bypass valve closed
8/31/2011	1:04:26 AM	Bubbler valve closed
8/31/2011	1:04:26 AM	Helium valve opened
8/31/2011	1:04:26 AM	Main Vac valve opened
8/31/2011	1:04:26 AM	Helium MFC set to  20.000000
8/31/2011	1:04:26 AM	H2 MFC set to  0.000000
8/31/2011	1:04:26 AM	BCl3 MFC set to  0.000000
8/31/2011	1:04:26 AM	PHl3 MFC set to  0.000000
8/31/2011	1:04:26 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:04:26 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:04:26 AM	Tube furnace set to 150
8/31/2011	1:04:56 AM	Helium valve closed
8/31/2011	1:04:56 AM	H2 valve closed
8/31/2011	1:04:56 AM	BCl3 valve closed
8/31/2011	1:04:56 AM	PH3 valve closed
8/31/2011	1:04:56 AM	SiCl4 pre valve closed
8/31/2011	1:04:56 AM	SiCl4 post valve closed
8/31/2011	1:04:56 AM	Bypass valve closed
8/31/2011	1:04:56 AM	Bubbler valve closed
8/31/2011	1:04:56 AM	Main Vac valve opened
8/31/2011	1:04:56 AM	Helium MFC set to  0.000000
8/31/2011	1:04:56 AM	H2 MFC set to  0.000000
8/31/2011	1:04:56 AM	BCl3 MFC set to  0.000000
8/31/2011	1:04:56 AM	PHl3 MFC set to  0.000000
8/31/2011	1:04:56 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:04:56 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:04:56 AM	Tube furnace set to 150
8/31/2011	1:05:26 AM	H2 valve closed
8/31/2011	1:05:26 AM	BCl3 valve closed
8/31/2011	1:05:26 AM	PH3 valve closed
8/31/2011	1:05:26 AM	SiCl4 pre valve closed
8/31/2011	1:05:26 AM	SiCl4 post valve closed
8/31/2011	1:05:26 AM	Bypass valve closed
8/31/2011	1:05:26 AM	Bubbler valve closed
8/31/2011	1:05:26 AM	Helium valve opened
8/31/2011	1:05:26 AM	Main Vac valve opened
8/31/2011	1:05:26 AM	Helium MFC set to  20.000000
8/31/2011	1:05:26 AM	H2 MFC set to  0.000000
8/31/2011	1:05:26 AM	BCl3 MFC set to  0.000000
8/31/2011	1:05:26 AM	PHl3 MFC set to  0.000000
8/31/2011	1:05:26 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:05:26 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:05:27 AM	Tube furnace set to 150
8/31/2011	1:05:57 AM	Helium valve closed
8/31/2011	1:05:57 AM	H2 valve closed
8/31/2011	1:05:57 AM	BCl3 valve closed
8/31/2011	1:05:57 AM	PH3 valve closed
8/31/2011	1:05:57 AM	SiCl4 pre valve closed
8/31/2011	1:05:57 AM	SiCl4 post valve closed
8/31/2011	1:05:57 AM	Bypass valve closed
8/31/2011	1:05:57 AM	Bubbler valve closed
8/31/2011	1:05:57 AM	Main Vac valve opened
8/31/2011	1:05:57 AM	Helium MFC set to  0.000000
8/31/2011	1:05:57 AM	H2 MFC set to  0.000000
8/31/2011	1:05:57 AM	BCl3 MFC set to  0.000000
8/31/2011	1:05:57 AM	PHl3 MFC set to  0.000000
8/31/2011	1:05:57 AM	SiCl4 MFC set to  0.000000
8/31/2011	1:05:57 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:05:57 AM	Tube furnace set to 150
8/31/2011	1:05:58 AM	Run finished at 1:05 AM
8/31/2011	10:37:26 AM	Recipe started at 10:37 AM
8/31/2011	10:37:26 AM	Helium valve closed
8/31/2011	10:37:26 AM	H2 valve closed
8/31/2011	10:37:26 AM	BCl3 valve closed
8/31/2011	10:37:26 AM	PH3 valve closed
8/31/2011	10:37:26 AM	SiCl4 pre valve closed
8/31/2011	10:37:26 AM	SiCl4 post valve closed
8/31/2011	10:37:26 AM	Main Vac valve closed
8/31/2011	10:37:26 AM	Bypass valve closed
8/31/2011	10:37:26 AM	Bubbler valve closed
8/31/2011	10:37:26 AM	Helium MFC set to  0.000000
8/31/2011	10:37:26 AM	H2 MFC set to  0.000000
8/31/2011	10:37:26 AM	BCl3 MFC set to  0.000000
8/31/2011	10:37:26 AM	PHl3 MFC set to  0.000000
8/31/2011	10:37:26 AM	SiCl4 MFC set to  0.000000
8/31/2011	10:37:26 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:37:26 AM	Tube furnace set to 0
8/31/2011	10:37:29 AM	Helium valve closed
8/31/2011	10:37:29 AM	BCl3 valve closed
8/31/2011	10:37:29 AM	PH3 valve closed
8/31/2011	10:37:29 AM	SiCl4 pre valve closed
8/31/2011	10:37:29 AM	SiCl4 post valve closed
8/31/2011	10:37:29 AM	Main Vac valve closed
8/31/2011	10:37:29 AM	Bypass valve closed
8/31/2011	10:37:29 AM	Bubbler valve closed
8/31/2011	10:37:29 AM	H2 valve opened
8/31/2011	10:37:29 AM	Helium MFC set to  0.000000
8/31/2011	10:37:29 AM	H2 MFC set to  500.000000
8/31/2011	10:37:29 AM	BCl3 MFC set to  0.000000
8/31/2011	10:37:29 AM	PHl3 MFC set to  0.000000
8/31/2011	10:37:29 AM	SiCl4 MFC set to  0.000000
8/31/2011	10:37:29 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:37:29 AM	Tube furnace set to 0
8/31/2011	10:38:32 AM	Helium valve closed
8/31/2011	10:38:32 AM	BCl3 valve closed
8/31/2011	10:38:32 AM	PH3 valve closed
8/31/2011	10:38:32 AM	SiCl4 pre valve closed
8/31/2011	10:38:32 AM	SiCl4 post valve closed
8/31/2011	10:38:32 AM	Main Vac valve closed
8/31/2011	10:38:32 AM	Bypass valve closed
8/31/2011	10:38:32 AM	H2 valve opened
8/31/2011	10:38:32 AM	Bubbler valve opened
8/31/2011	10:38:32 AM	Helium MFC set to  0.000000
8/31/2011	10:38:32 AM	H2 MFC set to  500.000000
8/31/2011	10:38:32 AM	BCl3 MFC set to  0.000000
8/31/2011	10:38:32 AM	PHl3 MFC set to  0.000000
8/31/2011	10:38:32 AM	SiCl4 MFC set to  0.000000
8/31/2011	10:38:32 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:38:32 AM	Tube furnace set to 0
8/31/2011	10:38:33 AM	Helium valve closed
8/31/2011	10:38:33 AM	BCl3 valve closed
8/31/2011	10:38:33 AM	PH3 valve closed
8/31/2011	10:38:33 AM	SiCl4 pre valve closed
8/31/2011	10:38:33 AM	SiCl4 post valve closed
8/31/2011	10:38:33 AM	Main Vac valve closed
8/31/2011	10:38:33 AM	Bypass valve closed
8/31/2011	10:38:33 AM	H2 valve opened
8/31/2011	10:38:33 AM	Bubbler valve opened
8/31/2011	10:38:33 AM	Helium MFC set to  0.000000
8/31/2011	10:38:33 AM	H2 MFC set to  500.000000
8/31/2011	10:38:33 AM	BCl3 MFC set to  0.000000
8/31/2011	10:38:33 AM	PHl3 MFC set to  0.000000
8/31/2011	10:38:33 AM	SiCl4 MFC set to  0.000000
8/31/2011	10:38:33 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:38:33 AM	Tube furnace set to 1000
8/31/2011	10:58:33 AM	Helium valve closed
8/31/2011	10:58:33 AM	PH3 valve closed
8/31/2011	10:58:33 AM	Main Vac valve closed
8/31/2011	10:58:33 AM	Bypass valve closed
8/31/2011	10:58:33 AM	H2 valve opened
8/31/2011	10:58:33 AM	BCl3 valve opened
8/31/2011	10:58:33 AM	SiCl4 pre valve opened
8/31/2011	10:58:33 AM	SiCl4 post valve opened
8/31/2011	10:58:33 AM	Bubbler valve opened
8/31/2011	10:58:33 AM	Helium MFC set to  0.000000
8/31/2011	10:58:33 AM	H2 MFC set to  500.000000
8/31/2011	10:58:33 AM	BCl3 MFC set to  2.000000
8/31/2011	10:58:33 AM	PHl3 MFC set to  0.000000
8/31/2011	10:58:33 AM	SiCl4 MFC set to  50.000000
8/31/2011	10:58:33 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:58:34 AM	Tube furnace set to 1000
8/31/2011	11:28:33 AM	Helium valve closed
8/31/2011	11:28:33 AM	BCl3 valve closed
8/31/2011	11:28:33 AM	PH3 valve closed
8/31/2011	11:28:33 AM	SiCl4 pre valve closed
8/31/2011	11:28:33 AM	SiCl4 post valve closed
8/31/2011	11:28:33 AM	Main Vac valve closed
8/31/2011	11:28:33 AM	Bypass valve closed
8/31/2011	11:28:33 AM	H2 valve opened
8/31/2011	11:28:33 AM	Bubbler valve opened
8/31/2011	11:28:34 AM	Helium MFC set to  0.000000
8/31/2011	11:28:34 AM	H2 MFC set to  500.000000
8/31/2011	11:28:34 AM	BCl3 MFC set to  0.000000
8/31/2011	11:28:34 AM	PHl3 MFC set to  0.000000
8/31/2011	11:28:34 AM	SiCl4 MFC set to  0.000000
8/31/2011	11:28:34 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:28:34 AM	Tube furnace set to 750
8/31/2011	11:33:34 AM	H2 valve closed
8/31/2011	11:33:34 AM	BCl3 valve closed
8/31/2011	11:33:34 AM	PH3 valve closed
8/31/2011	11:33:34 AM	SiCl4 pre valve closed
8/31/2011	11:33:34 AM	SiCl4 post valve closed
8/31/2011	11:33:34 AM	Main Vac valve closed
8/31/2011	11:33:34 AM	Bypass valve closed
8/31/2011	11:33:34 AM	Helium valve opened
8/31/2011	11:33:34 AM	Bubbler valve opened
8/31/2011	11:33:34 AM	Helium MFC set to  500.000000
8/31/2011	11:33:34 AM	H2 MFC set to  0.000000
8/31/2011	11:33:34 AM	BCl3 MFC set to  0.000000
8/31/2011	11:33:34 AM	PHl3 MFC set to  0.000000
8/31/2011	11:33:34 AM	SiCl4 MFC set to  0.000000
8/31/2011	11:33:34 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:33:34 AM	Tube furnace set to 0
8/31/2011	11:53:34 AM	Helium valve closed
8/31/2011	11:53:34 AM	H2 valve closed
8/31/2011	11:53:34 AM	BCl3 valve closed
8/31/2011	11:53:34 AM	PH3 valve closed
8/31/2011	11:53:34 AM	SiCl4 pre valve closed
8/31/2011	11:53:34 AM	SiCl4 post valve closed
8/31/2011	11:53:34 AM	Main Vac valve closed
8/31/2011	11:53:34 AM	Bypass valve closed
8/31/2011	11:53:34 AM	Bubbler valve closed
8/31/2011	11:53:34 AM	Helium MFC set to  0.000000
8/31/2011	11:53:34 AM	H2 MFC set to  0.000000
8/31/2011	11:53:34 AM	BCl3 MFC set to  0.000000
8/31/2011	11:53:34 AM	PHl3 MFC set to  0.000000
8/31/2011	11:53:34 AM	SiCl4 MFC set to  0.000000
8/31/2011	11:53:34 AM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:53:34 AM	Tube furnace set to 0
8/31/2011	11:53:35 AM	Run finished at 11:53 AM
8/31/2011	12:45:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/31/2011	12:45:21 PM	Recipe started at 12:45 PM
8/31/2011	12:45:21 PM	Helium valve closed
8/31/2011	12:45:21 PM	H2 valve closed
8/31/2011	12:45:21 PM	BCl3 valve closed
8/31/2011	12:45:21 PM	PH3 valve closed
8/31/2011	12:45:21 PM	SiCl4 pre valve closed
8/31/2011	12:45:21 PM	SiCl4 post valve closed
8/31/2011	12:45:21 PM	Main Vac valve closed
8/31/2011	12:45:21 PM	Bypass valve closed
8/31/2011	12:45:21 PM	Bubbler valve closed
8/31/2011	12:45:21 PM	Helium MFC set to  0.000000
8/31/2011	12:45:21 PM	H2 MFC set to  0.000000
8/31/2011	12:45:21 PM	BCl3 MFC set to  0.000000
8/31/2011	12:45:21 PM	PHl3 MFC set to  0.000000
8/31/2011	12:45:21 PM	SiCl4 MFC set to  0.000000
8/31/2011	12:45:21 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:45:21 PM	Tube furnace set to 0
8/31/2011	12:45:24 PM	H2 valve closed
8/31/2011	12:45:24 PM	BCl3 valve closed
8/31/2011	12:45:24 PM	PH3 valve closed
8/31/2011	12:45:24 PM	SiCl4 pre valve closed
8/31/2011	12:45:24 PM	SiCl4 post valve closed
8/31/2011	12:45:24 PM	Main Vac valve closed
8/31/2011	12:45:24 PM	Bypass valve closed
8/31/2011	12:45:24 PM	Bubbler valve closed
8/31/2011	12:45:24 PM	Helium valve opened
8/31/2011	12:45:24 PM	Helium MFC set to  500.000000
8/31/2011	12:45:24 PM	H2 MFC set to  0.000000
8/31/2011	12:45:24 PM	BCl3 MFC set to  0.000000
8/31/2011	12:45:24 PM	PHl3 MFC set to  0.000000
8/31/2011	12:45:25 PM	SiCl4 MFC set to  0.000000
8/31/2011	12:45:25 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:45:25 PM	Tube furnace set to 0
8/31/2011	12:45:27 PM	Helium valve closed
8/31/2011	12:45:27 PM	H2 valve closed
8/31/2011	12:45:27 PM	BCl3 valve closed
8/31/2011	12:45:27 PM	PH3 valve closed
8/31/2011	12:45:27 PM	SiCl4 pre valve closed
8/31/2011	12:45:27 PM	SiCl4 post valve closed
8/31/2011	12:45:27 PM	Main Vac valve closed
8/31/2011	12:45:27 PM	Bypass valve closed
8/31/2011	12:45:27 PM	Bubbler valve closed
8/31/2011	12:45:27 PM	Helium MFC set to  0.000000
8/31/2011	12:45:27 PM	H2 MFC set to  0.000000
8/31/2011	12:45:27 PM	BCl3 MFC set to  0.000000
8/31/2011	12:45:27 PM	PHl3 MFC set to  0.000000
8/31/2011	12:45:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	12:45:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	12:45:28 PM	Tube furnace set to 0
8/31/2011	12:45:29 PM	Run finished at 12:45 PM
8/31/2011	12:45:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/31/2011	1:02:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	1:02:31 PM	Recipe started at 1:02 PM
8/31/2011	1:02:31 PM	Helium valve closed
8/31/2011	1:02:31 PM	H2 valve closed
8/31/2011	1:02:31 PM	BCl3 valve closed
8/31/2011	1:02:31 PM	PH3 valve closed
8/31/2011	1:02:31 PM	SiCl4 pre valve closed
8/31/2011	1:02:31 PM	SiCl4 post valve closed
8/31/2011	1:02:31 PM	Main Vac valve closed
8/31/2011	1:02:31 PM	Bubbler valve closed
8/31/2011	1:02:31 PM	Bypass valve opened
8/31/2011	1:02:31 PM	Helium MFC set to  0.000000
8/31/2011	1:02:31 PM	H2 MFC set to  0.000000
8/31/2011	1:02:31 PM	BCl3 MFC set to  0.000000
8/31/2011	1:02:31 PM	PHl3 MFC set to  0.000000
8/31/2011	1:02:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:02:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:02:31 PM	Tube furnace set to 0
8/31/2011	1:03:36 PM	Helium valve closed
8/31/2011	1:03:36 PM	H2 valve closed
8/31/2011	1:03:36 PM	BCl3 valve closed
8/31/2011	1:03:36 PM	PH3 valve closed
8/31/2011	1:03:36 PM	SiCl4 pre valve closed
8/31/2011	1:03:36 PM	SiCl4 post valve closed
8/31/2011	1:03:36 PM	Main Vac valve closed
8/31/2011	1:03:36 PM	Bubbler valve closed
8/31/2011	1:03:36 PM	Bypass valve opened
8/31/2011	1:03:36 PM	Helium MFC set to  0.000000
8/31/2011	1:03:36 PM	H2 MFC set to  0.000000
8/31/2011	1:03:36 PM	BCl3 MFC set to  0.000000
8/31/2011	1:03:36 PM	PHl3 MFC set to  0.000000
8/31/2011	1:03:36 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:03:36 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:03:36 PM	Tube furnace set to 0
8/31/2011	1:04:23 PM	Helium valve closed
8/31/2011	1:04:23 PM	H2 valve closed
8/31/2011	1:04:23 PM	BCl3 valve closed
8/31/2011	1:04:23 PM	PH3 valve closed
8/31/2011	1:04:23 PM	SiCl4 pre valve closed
8/31/2011	1:04:23 PM	SiCl4 post valve closed
8/31/2011	1:04:23 PM	Bypass valve closed
8/31/2011	1:04:23 PM	Bubbler valve closed
8/31/2011	1:04:23 PM	Main Vac valve opened
8/31/2011	1:04:23 PM	Helium MFC set to  0.000000
8/31/2011	1:04:23 PM	H2 MFC set to  0.000000
8/31/2011	1:04:23 PM	BCl3 MFC set to  0.000000
8/31/2011	1:04:23 PM	PHl3 MFC set to  0.000000
8/31/2011	1:04:23 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:04:23 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:04:23 PM	Tube furnace set to 0
8/31/2011	1:04:24 PM	Run finished at 1:04 PM
8/31/2011	1:04:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	1:04:29 PM	Main Vac valve closed
8/31/2011	1:04:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/31/2011	1:04:31 PM	Recipe started at 1:04 PM
8/31/2011	1:04:31 PM	Helium valve closed
8/31/2011	1:04:31 PM	H2 valve closed
8/31/2011	1:04:31 PM	BCl3 valve closed
8/31/2011	1:04:31 PM	PH3 valve closed
8/31/2011	1:04:31 PM	SiCl4 pre valve closed
8/31/2011	1:04:31 PM	SiCl4 post valve closed
8/31/2011	1:04:31 PM	Main Vac valve closed
8/31/2011	1:04:31 PM	Bypass valve closed
8/31/2011	1:04:31 PM	Bubbler valve closed
8/31/2011	1:04:31 PM	Helium MFC set to  0.000000
8/31/2011	1:04:31 PM	H2 MFC set to  0.000000
8/31/2011	1:04:31 PM	BCl3 MFC set to  0.000000
8/31/2011	1:04:31 PM	PHl3 MFC set to  0.000000
8/31/2011	1:04:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:04:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:04:32 PM	Tube furnace set to 0
8/31/2011	1:04:35 PM	H2 valve closed
8/31/2011	1:04:35 PM	BCl3 valve closed
8/31/2011	1:04:35 PM	PH3 valve closed
8/31/2011	1:04:35 PM	SiCl4 pre valve closed
8/31/2011	1:04:35 PM	SiCl4 post valve closed
8/31/2011	1:04:35 PM	Main Vac valve closed
8/31/2011	1:04:35 PM	Bypass valve closed
8/31/2011	1:04:35 PM	Bubbler valve closed
8/31/2011	1:04:35 PM	Helium valve opened
8/31/2011	1:04:35 PM	Helium MFC set to  500.000000
8/31/2011	1:04:35 PM	H2 MFC set to  0.000000
8/31/2011	1:04:35 PM	BCl3 MFC set to  0.000000
8/31/2011	1:04:35 PM	PHl3 MFC set to  0.000000
8/31/2011	1:04:35 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:04:35 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:04:35 PM	Tube furnace set to 0
8/31/2011	1:05:40 PM	Helium valve closed
8/31/2011	1:05:40 PM	H2 valve closed
8/31/2011	1:05:40 PM	BCl3 valve closed
8/31/2011	1:05:40 PM	PH3 valve closed
8/31/2011	1:05:40 PM	SiCl4 pre valve closed
8/31/2011	1:05:40 PM	SiCl4 post valve closed
8/31/2011	1:05:40 PM	Main Vac valve closed
8/31/2011	1:05:40 PM	Bypass valve closed
8/31/2011	1:05:40 PM	Bubbler valve closed
8/31/2011	1:05:40 PM	Helium MFC set to  0.000000
8/31/2011	1:05:40 PM	H2 MFC set to  0.000000
8/31/2011	1:05:40 PM	BCl3 MFC set to  0.000000
8/31/2011	1:05:40 PM	PHl3 MFC set to  0.000000
8/31/2011	1:05:40 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:05:40 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:05:40 PM	Tube furnace set to 0
8/31/2011	1:05:41 PM	Run finished at 1:05 PM
8/31/2011	1:05:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/31/2011	1:08:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	1:08:57 PM	Recipe started at 1:08 PM
8/31/2011	1:08:57 PM	Helium valve closed
8/31/2011	1:08:57 PM	H2 valve closed
8/31/2011	1:08:57 PM	BCl3 valve closed
8/31/2011	1:08:57 PM	PH3 valve closed
8/31/2011	1:08:57 PM	SiCl4 pre valve closed
8/31/2011	1:08:57 PM	SiCl4 post valve closed
8/31/2011	1:08:57 PM	Main Vac valve closed
8/31/2011	1:08:57 PM	Bubbler valve closed
8/31/2011	1:08:57 PM	Bypass valve opened
8/31/2011	1:08:57 PM	Helium MFC set to  0.000000
8/31/2011	1:08:57 PM	H2 MFC set to  0.000000
8/31/2011	1:08:57 PM	BCl3 MFC set to  0.000000
8/31/2011	1:08:57 PM	PHl3 MFC set to  0.000000
8/31/2011	1:08:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:08:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:08:57 PM	Tube furnace set to 0
8/31/2011	1:10:04 PM	Helium valve closed
8/31/2011	1:10:04 PM	H2 valve closed
8/31/2011	1:10:04 PM	BCl3 valve closed
8/31/2011	1:10:04 PM	PH3 valve closed
8/31/2011	1:10:04 PM	SiCl4 pre valve closed
8/31/2011	1:10:04 PM	SiCl4 post valve closed
8/31/2011	1:10:04 PM	Main Vac valve closed
8/31/2011	1:10:04 PM	Bubbler valve closed
8/31/2011	1:10:04 PM	Bypass valve opened
8/31/2011	1:10:04 PM	Helium MFC set to  0.000000
8/31/2011	1:10:04 PM	H2 MFC set to  0.000000
8/31/2011	1:10:04 PM	BCl3 MFC set to  0.000000
8/31/2011	1:10:04 PM	PHl3 MFC set to  0.000000
8/31/2011	1:10:04 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:10:04 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:10:04 PM	Tube furnace set to 0
8/31/2011	1:11:04 PM	Helium valve closed
8/31/2011	1:11:04 PM	H2 valve closed
8/31/2011	1:11:04 PM	BCl3 valve closed
8/31/2011	1:11:04 PM	PH3 valve closed
8/31/2011	1:11:04 PM	SiCl4 pre valve closed
8/31/2011	1:11:04 PM	SiCl4 post valve closed
8/31/2011	1:11:04 PM	Bypass valve closed
8/31/2011	1:11:04 PM	Bubbler valve closed
8/31/2011	1:11:04 PM	Main Vac valve opened
8/31/2011	1:11:04 PM	Helium MFC set to  0.000000
8/31/2011	1:11:04 PM	H2 MFC set to  0.000000
8/31/2011	1:11:04 PM	BCl3 MFC set to  0.000000
8/31/2011	1:11:04 PM	PHl3 MFC set to  0.000000
8/31/2011	1:11:04 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:11:04 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:11:04 PM	Tube furnace set to 0
8/31/2011	1:11:05 PM	Run finished at 1:11 PM
8/31/2011	1:11:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	1:11:26 PM	Recipe started at 1:11 PM
8/31/2011	1:11:26 PM	Helium valve closed
8/31/2011	1:11:26 PM	H2 valve closed
8/31/2011	1:11:26 PM	BCl3 valve closed
8/31/2011	1:11:26 PM	PH3 valve closed
8/31/2011	1:11:26 PM	SiCl4 pre valve closed
8/31/2011	1:11:26 PM	SiCl4 post valve closed
8/31/2011	1:11:26 PM	Bypass valve closed
8/31/2011	1:11:26 PM	Bubbler valve closed
8/31/2011	1:11:26 PM	Main Vac valve opened
8/31/2011	1:11:26 PM	Helium MFC set to  0.000000
8/31/2011	1:11:26 PM	H2 MFC set to  0.000000
8/31/2011	1:11:26 PM	BCl3 MFC set to  0.000000
8/31/2011	1:11:26 PM	PHl3 MFC set to  0.000000
8/31/2011	1:11:26 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:11:26 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:11:26 PM	Tube furnace set to 150
8/31/2011	1:11:56 PM	H2 valve closed
8/31/2011	1:11:56 PM	BCl3 valve closed
8/31/2011	1:11:56 PM	PH3 valve closed
8/31/2011	1:11:56 PM	SiCl4 pre valve closed
8/31/2011	1:11:56 PM	SiCl4 post valve closed
8/31/2011	1:11:56 PM	Bypass valve closed
8/31/2011	1:11:56 PM	Bubbler valve closed
8/31/2011	1:11:56 PM	Helium valve opened
8/31/2011	1:11:56 PM	Main Vac valve opened
8/31/2011	1:11:56 PM	Helium MFC set to  20.000000
8/31/2011	1:11:56 PM	H2 MFC set to  0.000000
8/31/2011	1:11:56 PM	BCl3 MFC set to  0.000000
8/31/2011	1:11:56 PM	PHl3 MFC set to  0.000000
8/31/2011	1:11:56 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:11:56 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:11:57 PM	Tube furnace set to 150
8/31/2011	1:12:27 PM	Helium valve closed
8/31/2011	1:12:27 PM	H2 valve closed
8/31/2011	1:12:27 PM	BCl3 valve closed
8/31/2011	1:12:27 PM	PH3 valve closed
8/31/2011	1:12:27 PM	SiCl4 pre valve closed
8/31/2011	1:12:27 PM	SiCl4 post valve closed
8/31/2011	1:12:27 PM	Bypass valve closed
8/31/2011	1:12:27 PM	Bubbler valve closed
8/31/2011	1:12:27 PM	Main Vac valve opened
8/31/2011	1:12:27 PM	Helium MFC set to  0.000000
8/31/2011	1:12:27 PM	H2 MFC set to  0.000000
8/31/2011	1:12:27 PM	BCl3 MFC set to  0.000000
8/31/2011	1:12:27 PM	PHl3 MFC set to  0.000000
8/31/2011	1:12:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:12:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:12:27 PM	Tube furnace set to 150
8/31/2011	1:12:57 PM	H2 valve closed
8/31/2011	1:12:57 PM	BCl3 valve closed
8/31/2011	1:12:57 PM	PH3 valve closed
8/31/2011	1:12:57 PM	SiCl4 pre valve closed
8/31/2011	1:12:57 PM	SiCl4 post valve closed
8/31/2011	1:12:57 PM	Bypass valve closed
8/31/2011	1:12:57 PM	Bubbler valve closed
8/31/2011	1:12:57 PM	Helium valve opened
8/31/2011	1:12:57 PM	Main Vac valve opened
8/31/2011	1:12:57 PM	Helium MFC set to  20.000000
8/31/2011	1:12:57 PM	H2 MFC set to  0.000000
8/31/2011	1:12:57 PM	BCl3 MFC set to  0.000000
8/31/2011	1:12:57 PM	PHl3 MFC set to  0.000000
8/31/2011	1:12:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:12:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:12:57 PM	Tube furnace set to 150
8/31/2011	1:13:27 PM	Helium valve closed
8/31/2011	1:13:27 PM	H2 valve closed
8/31/2011	1:13:27 PM	BCl3 valve closed
8/31/2011	1:13:27 PM	PH3 valve closed
8/31/2011	1:13:27 PM	SiCl4 pre valve closed
8/31/2011	1:13:27 PM	SiCl4 post valve closed
8/31/2011	1:13:27 PM	Bypass valve closed
8/31/2011	1:13:27 PM	Bubbler valve closed
8/31/2011	1:13:27 PM	Main Vac valve opened
8/31/2011	1:13:27 PM	Helium MFC set to  0.000000
8/31/2011	1:13:27 PM	H2 MFC set to  0.000000
8/31/2011	1:13:27 PM	BCl3 MFC set to  0.000000
8/31/2011	1:13:27 PM	PHl3 MFC set to  0.000000
8/31/2011	1:13:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:13:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:13:27 PM	Tube furnace set to 150
8/31/2011	1:13:57 PM	H2 valve closed
8/31/2011	1:13:57 PM	BCl3 valve closed
8/31/2011	1:13:57 PM	PH3 valve closed
8/31/2011	1:13:57 PM	SiCl4 pre valve closed
8/31/2011	1:13:57 PM	SiCl4 post valve closed
8/31/2011	1:13:57 PM	Bypass valve closed
8/31/2011	1:13:57 PM	Bubbler valve closed
8/31/2011	1:13:57 PM	Helium valve opened
8/31/2011	1:13:57 PM	Main Vac valve opened
8/31/2011	1:13:57 PM	Helium MFC set to  20.000000
8/31/2011	1:13:57 PM	H2 MFC set to  0.000000
8/31/2011	1:13:57 PM	BCl3 MFC set to  0.000000
8/31/2011	1:13:57 PM	PHl3 MFC set to  0.000000
8/31/2011	1:13:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:13:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:13:57 PM	Tube furnace set to 150
8/31/2011	1:14:27 PM	Helium valve closed
8/31/2011	1:14:27 PM	H2 valve closed
8/31/2011	1:14:27 PM	BCl3 valve closed
8/31/2011	1:14:27 PM	PH3 valve closed
8/31/2011	1:14:27 PM	SiCl4 pre valve closed
8/31/2011	1:14:27 PM	SiCl4 post valve closed
8/31/2011	1:14:27 PM	Bypass valve closed
8/31/2011	1:14:27 PM	Bubbler valve closed
8/31/2011	1:14:27 PM	Main Vac valve opened
8/31/2011	1:14:27 PM	Helium MFC set to  0.000000
8/31/2011	1:14:27 PM	H2 MFC set to  0.000000
8/31/2011	1:14:27 PM	BCl3 MFC set to  0.000000
8/31/2011	1:14:27 PM	PHl3 MFC set to  0.000000
8/31/2011	1:14:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:14:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:14:28 PM	Tube furnace set to 150
8/31/2011	1:14:58 PM	H2 valve closed
8/31/2011	1:14:58 PM	BCl3 valve closed
8/31/2011	1:14:58 PM	PH3 valve closed
8/31/2011	1:14:58 PM	SiCl4 pre valve closed
8/31/2011	1:14:58 PM	SiCl4 post valve closed
8/31/2011	1:14:58 PM	Bypass valve closed
8/31/2011	1:14:58 PM	Bubbler valve closed
8/31/2011	1:14:58 PM	Helium valve opened
8/31/2011	1:14:58 PM	Main Vac valve opened
8/31/2011	1:14:58 PM	Helium MFC set to  20.000000
8/31/2011	1:14:58 PM	H2 MFC set to  0.000000
8/31/2011	1:14:58 PM	BCl3 MFC set to  0.000000
8/31/2011	1:14:58 PM	PHl3 MFC set to  0.000000
8/31/2011	1:14:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:14:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:14:58 PM	Tube furnace set to 150
8/31/2011	1:15:28 PM	Helium valve closed
8/31/2011	1:15:28 PM	H2 valve closed
8/31/2011	1:15:28 PM	BCl3 valve closed
8/31/2011	1:15:28 PM	PH3 valve closed
8/31/2011	1:15:28 PM	SiCl4 pre valve closed
8/31/2011	1:15:28 PM	SiCl4 post valve closed
8/31/2011	1:15:28 PM	Bypass valve closed
8/31/2011	1:15:28 PM	Bubbler valve closed
8/31/2011	1:15:28 PM	Main Vac valve opened
8/31/2011	1:15:28 PM	Helium MFC set to  0.000000
8/31/2011	1:15:28 PM	H2 MFC set to  0.000000
8/31/2011	1:15:28 PM	BCl3 MFC set to  0.000000
8/31/2011	1:15:28 PM	PHl3 MFC set to  0.000000
8/31/2011	1:15:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:15:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:15:28 PM	Tube furnace set to 150
8/31/2011	1:15:58 PM	H2 valve closed
8/31/2011	1:15:58 PM	BCl3 valve closed
8/31/2011	1:15:58 PM	PH3 valve closed
8/31/2011	1:15:58 PM	SiCl4 pre valve closed
8/31/2011	1:15:58 PM	SiCl4 post valve closed
8/31/2011	1:15:58 PM	Bypass valve closed
8/31/2011	1:15:58 PM	Bubbler valve closed
8/31/2011	1:15:58 PM	Helium valve opened
8/31/2011	1:15:58 PM	Main Vac valve opened
8/31/2011	1:15:58 PM	Helium MFC set to  20.000000
8/31/2011	1:15:58 PM	H2 MFC set to  0.000000
8/31/2011	1:15:58 PM	BCl3 MFC set to  0.000000
8/31/2011	1:15:58 PM	PHl3 MFC set to  0.000000
8/31/2011	1:15:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:15:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:15:58 PM	Tube furnace set to 150
8/31/2011	1:16:28 PM	Helium valve closed
8/31/2011	1:16:28 PM	H2 valve closed
8/31/2011	1:16:28 PM	BCl3 valve closed
8/31/2011	1:16:28 PM	PH3 valve closed
8/31/2011	1:16:28 PM	SiCl4 pre valve closed
8/31/2011	1:16:28 PM	SiCl4 post valve closed
8/31/2011	1:16:28 PM	Bypass valve closed
8/31/2011	1:16:28 PM	Bubbler valve closed
8/31/2011	1:16:28 PM	Main Vac valve opened
8/31/2011	1:16:28 PM	Helium MFC set to  0.000000
8/31/2011	1:16:28 PM	H2 MFC set to  0.000000
8/31/2011	1:16:28 PM	BCl3 MFC set to  0.000000
8/31/2011	1:16:28 PM	PHl3 MFC set to  0.000000
8/31/2011	1:16:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:16:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:16:28 PM	Tube furnace set to 150
8/31/2011	1:16:58 PM	H2 valve closed
8/31/2011	1:16:58 PM	BCl3 valve closed
8/31/2011	1:16:58 PM	PH3 valve closed
8/31/2011	1:16:58 PM	SiCl4 pre valve closed
8/31/2011	1:16:58 PM	SiCl4 post valve closed
8/31/2011	1:16:58 PM	Bypass valve closed
8/31/2011	1:16:58 PM	Bubbler valve closed
8/31/2011	1:16:58 PM	Helium valve opened
8/31/2011	1:16:58 PM	Main Vac valve opened
8/31/2011	1:16:58 PM	Helium MFC set to  20.000000
8/31/2011	1:16:58 PM	H2 MFC set to  0.000000
8/31/2011	1:16:58 PM	BCl3 MFC set to  0.000000
8/31/2011	1:16:58 PM	PHl3 MFC set to  0.000000
8/31/2011	1:16:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:16:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:16:59 PM	Tube furnace set to 150
8/31/2011	1:17:29 PM	Helium valve closed
8/31/2011	1:17:29 PM	H2 valve closed
8/31/2011	1:17:29 PM	BCl3 valve closed
8/31/2011	1:17:29 PM	PH3 valve closed
8/31/2011	1:17:29 PM	SiCl4 pre valve closed
8/31/2011	1:17:29 PM	SiCl4 post valve closed
8/31/2011	1:17:29 PM	Bypass valve closed
8/31/2011	1:17:29 PM	Bubbler valve closed
8/31/2011	1:17:29 PM	Main Vac valve opened
8/31/2011	1:17:29 PM	Helium MFC set to  0.000000
8/31/2011	1:17:29 PM	H2 MFC set to  0.000000
8/31/2011	1:17:29 PM	BCl3 MFC set to  0.000000
8/31/2011	1:17:29 PM	PHl3 MFC set to  0.000000
8/31/2011	1:17:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:17:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:17:29 PM	Tube furnace set to 150
8/31/2011	1:17:59 PM	H2 valve closed
8/31/2011	1:17:59 PM	BCl3 valve closed
8/31/2011	1:17:59 PM	PH3 valve closed
8/31/2011	1:17:59 PM	SiCl4 pre valve closed
8/31/2011	1:17:59 PM	SiCl4 post valve closed
8/31/2011	1:17:59 PM	Bypass valve closed
8/31/2011	1:17:59 PM	Bubbler valve closed
8/31/2011	1:17:59 PM	Helium valve opened
8/31/2011	1:17:59 PM	Main Vac valve opened
8/31/2011	1:17:59 PM	Helium MFC set to  20.000000
8/31/2011	1:17:59 PM	H2 MFC set to  0.000000
8/31/2011	1:17:59 PM	BCl3 MFC set to  0.000000
8/31/2011	1:17:59 PM	PHl3 MFC set to  0.000000
8/31/2011	1:17:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:17:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:17:59 PM	Tube furnace set to 150
8/31/2011	1:18:29 PM	Helium valve closed
8/31/2011	1:18:29 PM	H2 valve closed
8/31/2011	1:18:29 PM	BCl3 valve closed
8/31/2011	1:18:29 PM	PH3 valve closed
8/31/2011	1:18:29 PM	SiCl4 pre valve closed
8/31/2011	1:18:29 PM	SiCl4 post valve closed
8/31/2011	1:18:29 PM	Bypass valve closed
8/31/2011	1:18:29 PM	Bubbler valve closed
8/31/2011	1:18:29 PM	Main Vac valve opened
8/31/2011	1:18:29 PM	Helium MFC set to  0.000000
8/31/2011	1:18:29 PM	H2 MFC set to  0.000000
8/31/2011	1:18:29 PM	BCl3 MFC set to  0.000000
8/31/2011	1:18:29 PM	PHl3 MFC set to  0.000000
8/31/2011	1:18:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:18:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:18:29 PM	Tube furnace set to 150
8/31/2011	1:18:59 PM	H2 valve closed
8/31/2011	1:18:59 PM	BCl3 valve closed
8/31/2011	1:18:59 PM	PH3 valve closed
8/31/2011	1:18:59 PM	SiCl4 pre valve closed
8/31/2011	1:18:59 PM	SiCl4 post valve closed
8/31/2011	1:18:59 PM	Bypass valve closed
8/31/2011	1:18:59 PM	Bubbler valve closed
8/31/2011	1:18:59 PM	Helium valve opened
8/31/2011	1:18:59 PM	Main Vac valve opened
8/31/2011	1:18:59 PM	Helium MFC set to  20.000000
8/31/2011	1:18:59 PM	H2 MFC set to  0.000000
8/31/2011	1:18:59 PM	BCl3 MFC set to  0.000000
8/31/2011	1:18:59 PM	PHl3 MFC set to  0.000000
8/31/2011	1:18:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:18:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:18:59 PM	Tube furnace set to 150
8/31/2011	1:19:29 PM	Helium valve closed
8/31/2011	1:19:29 PM	H2 valve closed
8/31/2011	1:19:29 PM	BCl3 valve closed
8/31/2011	1:19:29 PM	PH3 valve closed
8/31/2011	1:19:29 PM	SiCl4 pre valve closed
8/31/2011	1:19:29 PM	SiCl4 post valve closed
8/31/2011	1:19:29 PM	Bypass valve closed
8/31/2011	1:19:29 PM	Bubbler valve closed
8/31/2011	1:19:29 PM	Main Vac valve opened
8/31/2011	1:19:29 PM	Helium MFC set to  0.000000
8/31/2011	1:19:29 PM	H2 MFC set to  0.000000
8/31/2011	1:19:29 PM	BCl3 MFC set to  0.000000
8/31/2011	1:19:29 PM	PHl3 MFC set to  0.000000
8/31/2011	1:19:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:19:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:19:30 PM	Tube furnace set to 150
8/31/2011	1:20:00 PM	H2 valve closed
8/31/2011	1:20:00 PM	BCl3 valve closed
8/31/2011	1:20:00 PM	PH3 valve closed
8/31/2011	1:20:00 PM	SiCl4 pre valve closed
8/31/2011	1:20:00 PM	SiCl4 post valve closed
8/31/2011	1:20:00 PM	Bypass valve closed
8/31/2011	1:20:00 PM	Bubbler valve closed
8/31/2011	1:20:00 PM	Helium valve opened
8/31/2011	1:20:00 PM	Main Vac valve opened
8/31/2011	1:20:00 PM	Helium MFC set to  20.000000
8/31/2011	1:20:00 PM	H2 MFC set to  0.000000
8/31/2011	1:20:00 PM	BCl3 MFC set to  0.000000
8/31/2011	1:20:00 PM	PHl3 MFC set to  0.000000
8/31/2011	1:20:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:20:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:20:00 PM	Tube furnace set to 150
8/31/2011	1:20:30 PM	Helium valve closed
8/31/2011	1:20:30 PM	H2 valve closed
8/31/2011	1:20:30 PM	BCl3 valve closed
8/31/2011	1:20:30 PM	PH3 valve closed
8/31/2011	1:20:30 PM	SiCl4 pre valve closed
8/31/2011	1:20:30 PM	SiCl4 post valve closed
8/31/2011	1:20:30 PM	Bypass valve closed
8/31/2011	1:20:30 PM	Bubbler valve closed
8/31/2011	1:20:30 PM	Main Vac valve opened
8/31/2011	1:20:30 PM	Helium MFC set to  0.000000
8/31/2011	1:20:30 PM	H2 MFC set to  0.000000
8/31/2011	1:20:30 PM	BCl3 MFC set to  0.000000
8/31/2011	1:20:30 PM	PHl3 MFC set to  0.000000
8/31/2011	1:20:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:20:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:20:30 PM	Tube furnace set to 150
8/31/2011	1:21:00 PM	H2 valve closed
8/31/2011	1:21:00 PM	BCl3 valve closed
8/31/2011	1:21:00 PM	PH3 valve closed
8/31/2011	1:21:00 PM	SiCl4 pre valve closed
8/31/2011	1:21:00 PM	SiCl4 post valve closed
8/31/2011	1:21:00 PM	Bypass valve closed
8/31/2011	1:21:00 PM	Bubbler valve closed
8/31/2011	1:21:00 PM	Helium valve opened
8/31/2011	1:21:00 PM	Main Vac valve opened
8/31/2011	1:21:00 PM	Helium MFC set to  20.000000
8/31/2011	1:21:00 PM	H2 MFC set to  0.000000
8/31/2011	1:21:00 PM	BCl3 MFC set to  0.000000
8/31/2011	1:21:00 PM	PHl3 MFC set to  0.000000
8/31/2011	1:21:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:21:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:21:00 PM	Tube furnace set to 150
8/31/2011	1:21:30 PM	Helium valve closed
8/31/2011	1:21:30 PM	H2 valve closed
8/31/2011	1:21:30 PM	BCl3 valve closed
8/31/2011	1:21:30 PM	PH3 valve closed
8/31/2011	1:21:30 PM	SiCl4 pre valve closed
8/31/2011	1:21:30 PM	SiCl4 post valve closed
8/31/2011	1:21:30 PM	Bypass valve closed
8/31/2011	1:21:30 PM	Bubbler valve closed
8/31/2011	1:21:30 PM	Main Vac valve opened
8/31/2011	1:21:30 PM	Helium MFC set to  0.000000
8/31/2011	1:21:30 PM	H2 MFC set to  0.000000
8/31/2011	1:21:30 PM	BCl3 MFC set to  0.000000
8/31/2011	1:21:30 PM	PHl3 MFC set to  0.000000
8/31/2011	1:21:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:21:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:21:30 PM	Tube furnace set to 150
8/31/2011	1:21:31 PM	Run finished at 1:21 PM
8/31/2011	1:39:35 PM	Recipe started at 1:39 PM
8/31/2011	1:39:35 PM	Helium valve closed
8/31/2011	1:39:35 PM	H2 valve closed
8/31/2011	1:39:35 PM	BCl3 valve closed
8/31/2011	1:39:35 PM	PH3 valve closed
8/31/2011	1:39:35 PM	SiCl4 pre valve closed
8/31/2011	1:39:35 PM	SiCl4 post valve closed
8/31/2011	1:39:35 PM	Main Vac valve closed
8/31/2011	1:39:35 PM	Bypass valve closed
8/31/2011	1:39:35 PM	Bubbler valve closed
8/31/2011	1:39:35 PM	Helium MFC set to  0.000000
8/31/2011	1:39:35 PM	H2 MFC set to  0.000000
8/31/2011	1:39:35 PM	BCl3 MFC set to  0.000000
8/31/2011	1:39:35 PM	PHl3 MFC set to  0.000000
8/31/2011	1:39:35 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:39:35 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:39:35 PM	Tube furnace set to 0
8/31/2011	1:39:38 PM	Helium valve closed
8/31/2011	1:39:38 PM	BCl3 valve closed
8/31/2011	1:39:38 PM	PH3 valve closed
8/31/2011	1:39:38 PM	SiCl4 pre valve closed
8/31/2011	1:39:38 PM	SiCl4 post valve closed
8/31/2011	1:39:38 PM	Main Vac valve closed
8/31/2011	1:39:38 PM	Bypass valve closed
8/31/2011	1:39:38 PM	Bubbler valve closed
8/31/2011	1:39:38 PM	H2 valve opened
8/31/2011	1:39:38 PM	Helium MFC set to  0.000000
8/31/2011	1:39:38 PM	H2 MFC set to  500.000000
8/31/2011	1:39:38 PM	BCl3 MFC set to  0.000000
8/31/2011	1:39:38 PM	PHl3 MFC set to  0.000000
8/31/2011	1:39:38 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:39:38 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:39:38 PM	Tube furnace set to 0
8/31/2011	1:40:42 PM	Helium valve closed
8/31/2011	1:40:42 PM	BCl3 valve closed
8/31/2011	1:40:42 PM	PH3 valve closed
8/31/2011	1:40:42 PM	SiCl4 pre valve closed
8/31/2011	1:40:42 PM	SiCl4 post valve closed
8/31/2011	1:40:42 PM	Main Vac valve closed
8/31/2011	1:40:42 PM	Bypass valve closed
8/31/2011	1:40:42 PM	H2 valve opened
8/31/2011	1:40:42 PM	Bubbler valve opened
8/31/2011	1:40:42 PM	Helium MFC set to  0.000000
8/31/2011	1:40:42 PM	H2 MFC set to  500.000000
8/31/2011	1:40:42 PM	BCl3 MFC set to  0.000000
8/31/2011	1:40:42 PM	PHl3 MFC set to  0.000000
8/31/2011	1:40:42 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:40:42 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:40:42 PM	Tube furnace set to 0
8/31/2011	1:40:43 PM	Helium valve closed
8/31/2011	1:40:43 PM	BCl3 valve closed
8/31/2011	1:40:43 PM	PH3 valve closed
8/31/2011	1:40:43 PM	SiCl4 pre valve closed
8/31/2011	1:40:43 PM	SiCl4 post valve closed
8/31/2011	1:40:43 PM	Main Vac valve closed
8/31/2011	1:40:43 PM	Bypass valve closed
8/31/2011	1:40:43 PM	H2 valve opened
8/31/2011	1:40:43 PM	Bubbler valve opened
8/31/2011	1:40:43 PM	Helium MFC set to  0.000000
8/31/2011	1:40:43 PM	H2 MFC set to  500.000000
8/31/2011	1:40:43 PM	BCl3 MFC set to  0.000000
8/31/2011	1:40:43 PM	PHl3 MFC set to  0.000000
8/31/2011	1:40:43 PM	SiCl4 MFC set to  0.000000
8/31/2011	1:40:43 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	1:40:43 PM	Tube furnace set to 1000
8/31/2011	2:00:43 PM	Helium valve closed
8/31/2011	2:00:43 PM	PH3 valve closed
8/31/2011	2:00:43 PM	Main Vac valve closed
8/31/2011	2:00:43 PM	Bypass valve closed
8/31/2011	2:00:43 PM	H2 valve opened
8/31/2011	2:00:43 PM	BCl3 valve opened
8/31/2011	2:00:43 PM	SiCl4 pre valve opened
8/31/2011	2:00:43 PM	SiCl4 post valve opened
8/31/2011	2:00:43 PM	Bubbler valve opened
8/31/2011	2:00:43 PM	Helium MFC set to  0.000000
8/31/2011	2:00:43 PM	H2 MFC set to  500.000000
8/31/2011	2:00:43 PM	BCl3 MFC set to  2.000000
8/31/2011	2:00:43 PM	PHl3 MFC set to  0.000000
8/31/2011	2:00:43 PM	SiCl4 MFC set to  50.000000
8/31/2011	2:00:43 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	2:00:43 PM	Tube furnace set to 1000
8/31/2011	2:30:43 PM	Helium valve closed
8/31/2011	2:30:43 PM	BCl3 valve closed
8/31/2011	2:30:43 PM	PH3 valve closed
8/31/2011	2:30:43 PM	SiCl4 pre valve closed
8/31/2011	2:30:43 PM	SiCl4 post valve closed
8/31/2011	2:30:43 PM	Main Vac valve closed
8/31/2011	2:30:43 PM	Bypass valve closed
8/31/2011	2:30:43 PM	H2 valve opened
8/31/2011	2:30:43 PM	Bubbler valve opened
8/31/2011	2:30:43 PM	Helium MFC set to  0.000000
8/31/2011	2:30:43 PM	H2 MFC set to  500.000000
8/31/2011	2:30:43 PM	BCl3 MFC set to  0.000000
8/31/2011	2:30:43 PM	PHl3 MFC set to  0.000000
8/31/2011	2:30:43 PM	SiCl4 MFC set to  0.000000
8/31/2011	2:30:43 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	2:30:44 PM	Tube furnace set to 750
8/31/2011	2:35:44 PM	H2 valve closed
8/31/2011	2:35:44 PM	BCl3 valve closed
8/31/2011	2:35:44 PM	PH3 valve closed
8/31/2011	2:35:44 PM	SiCl4 pre valve closed
8/31/2011	2:35:44 PM	SiCl4 post valve closed
8/31/2011	2:35:44 PM	Main Vac valve closed
8/31/2011	2:35:44 PM	Bypass valve closed
8/31/2011	2:35:44 PM	Helium valve opened
8/31/2011	2:35:44 PM	Bubbler valve opened
8/31/2011	2:35:44 PM	Helium MFC set to  500.000000
8/31/2011	2:35:44 PM	H2 MFC set to  0.000000
8/31/2011	2:35:44 PM	BCl3 MFC set to  0.000000
8/31/2011	2:35:44 PM	PHl3 MFC set to  0.000000
8/31/2011	2:35:44 PM	SiCl4 MFC set to  0.000000
8/31/2011	2:35:44 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	2:35:44 PM	Tube furnace set to 0
8/31/2011	2:55:44 PM	Helium valve closed
8/31/2011	2:55:44 PM	H2 valve closed
8/31/2011	2:55:44 PM	BCl3 valve closed
8/31/2011	2:55:44 PM	PH3 valve closed
8/31/2011	2:55:44 PM	SiCl4 pre valve closed
8/31/2011	2:55:44 PM	SiCl4 post valve closed
8/31/2011	2:55:44 PM	Main Vac valve closed
8/31/2011	2:55:44 PM	Bypass valve closed
8/31/2011	2:55:44 PM	Bubbler valve closed
8/31/2011	2:55:44 PM	Helium MFC set to  0.000000
8/31/2011	2:55:44 PM	H2 MFC set to  0.000000
8/31/2011	2:55:44 PM	BCl3 MFC set to  0.000000
8/31/2011	2:55:44 PM	PHl3 MFC set to  0.000000
8/31/2011	2:55:44 PM	SiCl4 MFC set to  0.000000
8/31/2011	2:55:44 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	2:55:44 PM	Tube furnace set to 0
8/31/2011	2:55:45 PM	Run finished at 2:55 PM
8/31/2011	3:40:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/31/2011	3:40:48 PM	Recipe started at 3:40 PM
8/31/2011	3:40:48 PM	Helium valve closed
8/31/2011	3:40:48 PM	H2 valve closed
8/31/2011	3:40:48 PM	BCl3 valve closed
8/31/2011	3:40:48 PM	PH3 valve closed
8/31/2011	3:40:48 PM	SiCl4 pre valve closed
8/31/2011	3:40:48 PM	SiCl4 post valve closed
8/31/2011	3:40:48 PM	Main Vac valve closed
8/31/2011	3:40:48 PM	Bypass valve closed
8/31/2011	3:40:48 PM	Bubbler valve closed
8/31/2011	3:40:48 PM	Helium MFC set to  0.000000
8/31/2011	3:40:48 PM	H2 MFC set to  0.000000
8/31/2011	3:40:48 PM	BCl3 MFC set to  0.000000
8/31/2011	3:40:48 PM	PHl3 MFC set to  0.000000
8/31/2011	3:40:48 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:40:49 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:40:49 PM	Tube furnace set to 0
8/31/2011	3:40:52 PM	H2 valve closed
8/31/2011	3:40:52 PM	BCl3 valve closed
8/31/2011	3:40:52 PM	PH3 valve closed
8/31/2011	3:40:52 PM	SiCl4 pre valve closed
8/31/2011	3:40:52 PM	SiCl4 post valve closed
8/31/2011	3:40:52 PM	Main Vac valve closed
8/31/2011	3:40:52 PM	Bypass valve closed
8/31/2011	3:40:52 PM	Bubbler valve closed
8/31/2011	3:40:52 PM	Helium valve opened
8/31/2011	3:40:52 PM	Helium MFC set to  500.000000
8/31/2011	3:40:52 PM	H2 MFC set to  0.000000
8/31/2011	3:40:52 PM	BCl3 MFC set to  0.000000
8/31/2011	3:40:52 PM	PHl3 MFC set to  0.000000
8/31/2011	3:40:52 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:40:52 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:40:52 PM	Tube furnace set to 0
8/31/2011	3:40:55 PM	Helium valve closed
8/31/2011	3:40:55 PM	H2 valve closed
8/31/2011	3:40:55 PM	BCl3 valve closed
8/31/2011	3:40:55 PM	PH3 valve closed
8/31/2011	3:40:55 PM	SiCl4 pre valve closed
8/31/2011	3:40:55 PM	SiCl4 post valve closed
8/31/2011	3:40:55 PM	Main Vac valve closed
8/31/2011	3:40:55 PM	Bypass valve closed
8/31/2011	3:40:55 PM	Bubbler valve closed
8/31/2011	3:40:55 PM	Helium MFC set to  0.000000
8/31/2011	3:40:55 PM	H2 MFC set to  0.000000
8/31/2011	3:40:55 PM	BCl3 MFC set to  0.000000
8/31/2011	3:40:55 PM	PHl3 MFC set to  0.000000
8/31/2011	3:40:55 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:40:55 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:40:55 PM	Tube furnace set to 0
8/31/2011	3:40:56 PM	Run finished at 3:40 PM
8/31/2011	3:40:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/31/2011	3:48:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	3:48:35 PM	Recipe started at 3:48 PM
8/31/2011	3:48:35 PM	Helium valve closed
8/31/2011	3:48:35 PM	H2 valve closed
8/31/2011	3:48:35 PM	BCl3 valve closed
8/31/2011	3:48:35 PM	PH3 valve closed
8/31/2011	3:48:35 PM	SiCl4 pre valve closed
8/31/2011	3:48:35 PM	SiCl4 post valve closed
8/31/2011	3:48:35 PM	Main Vac valve closed
8/31/2011	3:48:35 PM	Bubbler valve closed
8/31/2011	3:48:35 PM	Bypass valve opened
8/31/2011	3:48:35 PM	Helium MFC set to  0.000000
8/31/2011	3:48:35 PM	H2 MFC set to  0.000000
8/31/2011	3:48:35 PM	BCl3 MFC set to  0.000000
8/31/2011	3:48:35 PM	PHl3 MFC set to  0.000000
8/31/2011	3:48:35 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:48:35 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:48:35 PM	Tube furnace set to 0
8/31/2011	3:49:44 PM	Helium valve closed
8/31/2011	3:49:44 PM	H2 valve closed
8/31/2011	3:49:44 PM	BCl3 valve closed
8/31/2011	3:49:44 PM	PH3 valve closed
8/31/2011	3:49:44 PM	SiCl4 pre valve closed
8/31/2011	3:49:44 PM	SiCl4 post valve closed
8/31/2011	3:49:44 PM	Main Vac valve closed
8/31/2011	3:49:44 PM	Bubbler valve closed
8/31/2011	3:49:44 PM	Bypass valve opened
8/31/2011	3:49:44 PM	Helium MFC set to  0.000000
8/31/2011	3:49:44 PM	H2 MFC set to  0.000000
8/31/2011	3:49:44 PM	BCl3 MFC set to  0.000000
8/31/2011	3:49:44 PM	PHl3 MFC set to  0.000000
8/31/2011	3:49:44 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:49:44 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:49:45 PM	Tube furnace set to 0
8/31/2011	3:50:45 PM	Helium valve closed
8/31/2011	3:50:45 PM	H2 valve closed
8/31/2011	3:50:45 PM	BCl3 valve closed
8/31/2011	3:50:45 PM	PH3 valve closed
8/31/2011	3:50:45 PM	SiCl4 pre valve closed
8/31/2011	3:50:45 PM	SiCl4 post valve closed
8/31/2011	3:50:45 PM	Bypass valve closed
8/31/2011	3:50:45 PM	Bubbler valve closed
8/31/2011	3:50:45 PM	Main Vac valve opened
8/31/2011	3:50:45 PM	Helium MFC set to  0.000000
8/31/2011	3:50:45 PM	H2 MFC set to  0.000000
8/31/2011	3:50:45 PM	BCl3 MFC set to  0.000000
8/31/2011	3:50:45 PM	PHl3 MFC set to  0.000000
8/31/2011	3:50:45 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:50:45 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:50:45 PM	Tube furnace set to 0
8/31/2011	3:50:46 PM	Run finished at 3:50 PM
8/31/2011	3:50:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	3:51:20 PM	Recipe started at 3:51 PM
8/31/2011	3:51:20 PM	Helium valve closed
8/31/2011	3:51:20 PM	H2 valve closed
8/31/2011	3:51:20 PM	BCl3 valve closed
8/31/2011	3:51:20 PM	PH3 valve closed
8/31/2011	3:51:20 PM	SiCl4 pre valve closed
8/31/2011	3:51:20 PM	SiCl4 post valve closed
8/31/2011	3:51:20 PM	Bypass valve closed
8/31/2011	3:51:20 PM	Bubbler valve closed
8/31/2011	3:51:20 PM	Main Vac valve opened
8/31/2011	3:51:20 PM	Helium MFC set to  0.000000
8/31/2011	3:51:20 PM	H2 MFC set to  0.000000
8/31/2011	3:51:20 PM	BCl3 MFC set to  0.000000
8/31/2011	3:51:20 PM	PHl3 MFC set to  0.000000
8/31/2011	3:51:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:51:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:51:20 PM	Tube furnace set to 150
8/31/2011	3:51:50 PM	H2 valve closed
8/31/2011	3:51:50 PM	BCl3 valve closed
8/31/2011	3:51:50 PM	PH3 valve closed
8/31/2011	3:51:50 PM	SiCl4 pre valve closed
8/31/2011	3:51:50 PM	SiCl4 post valve closed
8/31/2011	3:51:50 PM	Bypass valve closed
8/31/2011	3:51:50 PM	Bubbler valve closed
8/31/2011	3:51:50 PM	Helium valve opened
8/31/2011	3:51:50 PM	Main Vac valve opened
8/31/2011	3:51:50 PM	Helium MFC set to  20.000000
8/31/2011	3:51:50 PM	H2 MFC set to  0.000000
8/31/2011	3:51:50 PM	BCl3 MFC set to  0.000000
8/31/2011	3:51:50 PM	PHl3 MFC set to  0.000000
8/31/2011	3:51:50 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:51:50 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:51:50 PM	Tube furnace set to 150
8/31/2011	3:52:20 PM	Helium valve closed
8/31/2011	3:52:20 PM	H2 valve closed
8/31/2011	3:52:20 PM	BCl3 valve closed
8/31/2011	3:52:20 PM	PH3 valve closed
8/31/2011	3:52:20 PM	SiCl4 pre valve closed
8/31/2011	3:52:20 PM	SiCl4 post valve closed
8/31/2011	3:52:20 PM	Bypass valve closed
8/31/2011	3:52:20 PM	Bubbler valve closed
8/31/2011	3:52:20 PM	Main Vac valve opened
8/31/2011	3:52:20 PM	Helium MFC set to  0.000000
8/31/2011	3:52:20 PM	H2 MFC set to  0.000000
8/31/2011	3:52:20 PM	BCl3 MFC set to  0.000000
8/31/2011	3:52:20 PM	PHl3 MFC set to  0.000000
8/31/2011	3:52:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:52:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:52:20 PM	Tube furnace set to 150
8/31/2011	3:52:50 PM	H2 valve closed
8/31/2011	3:52:50 PM	BCl3 valve closed
8/31/2011	3:52:50 PM	PH3 valve closed
8/31/2011	3:52:50 PM	SiCl4 pre valve closed
8/31/2011	3:52:50 PM	SiCl4 post valve closed
8/31/2011	3:52:50 PM	Bypass valve closed
8/31/2011	3:52:50 PM	Bubbler valve closed
8/31/2011	3:52:50 PM	Helium valve opened
8/31/2011	3:52:50 PM	Main Vac valve opened
8/31/2011	3:52:50 PM	Helium MFC set to  20.000000
8/31/2011	3:52:50 PM	H2 MFC set to  0.000000
8/31/2011	3:52:50 PM	BCl3 MFC set to  0.000000
8/31/2011	3:52:50 PM	PHl3 MFC set to  0.000000
8/31/2011	3:52:50 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:52:50 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:52:50 PM	Tube furnace set to 150
8/31/2011	3:53:20 PM	Helium valve closed
8/31/2011	3:53:20 PM	H2 valve closed
8/31/2011	3:53:20 PM	BCl3 valve closed
8/31/2011	3:53:20 PM	PH3 valve closed
8/31/2011	3:53:20 PM	SiCl4 pre valve closed
8/31/2011	3:53:20 PM	SiCl4 post valve closed
8/31/2011	3:53:20 PM	Bypass valve closed
8/31/2011	3:53:20 PM	Bubbler valve closed
8/31/2011	3:53:20 PM	Main Vac valve opened
8/31/2011	3:53:20 PM	Helium MFC set to  0.000000
8/31/2011	3:53:20 PM	H2 MFC set to  0.000000
8/31/2011	3:53:20 PM	BCl3 MFC set to  0.000000
8/31/2011	3:53:20 PM	PHl3 MFC set to  0.000000
8/31/2011	3:53:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:53:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:53:21 PM	Tube furnace set to 150
8/31/2011	3:53:51 PM	H2 valve closed
8/31/2011	3:53:51 PM	BCl3 valve closed
8/31/2011	3:53:51 PM	PH3 valve closed
8/31/2011	3:53:51 PM	SiCl4 pre valve closed
8/31/2011	3:53:51 PM	SiCl4 post valve closed
8/31/2011	3:53:51 PM	Bypass valve closed
8/31/2011	3:53:51 PM	Bubbler valve closed
8/31/2011	3:53:51 PM	Helium valve opened
8/31/2011	3:53:51 PM	Main Vac valve opened
8/31/2011	3:53:51 PM	Helium MFC set to  20.000000
8/31/2011	3:53:51 PM	H2 MFC set to  0.000000
8/31/2011	3:53:51 PM	BCl3 MFC set to  0.000000
8/31/2011	3:53:51 PM	PHl3 MFC set to  0.000000
8/31/2011	3:53:51 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:53:51 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:53:51 PM	Tube furnace set to 150
8/31/2011	3:54:08 PM	Run aborted at 3:54 PM
8/31/2011	3:54:08 PM	Helium valve closed
8/31/2011	3:54:08 PM	H2 valve closed
8/31/2011	3:54:08 PM	BCl3 valve closed
8/31/2011	3:54:08 PM	PH3 valve closed
8/31/2011	3:54:08 PM	SiCl4 pre valve closed
8/31/2011	3:54:08 PM	SiCl4 post valve closed
8/31/2011	3:54:08 PM	Bypass valve closed
8/31/2011	3:54:08 PM	Main Vac valve closed
8/31/2011	3:54:08 PM	Bubbler valve closed
8/31/2011	3:54:08 PM	Helium MFC set to  0.000000
8/31/2011	3:54:08 PM	H2 MFC set to  0.000000
8/31/2011	3:54:08 PM	BCl3 MFC set to  0.000000
8/31/2011	3:54:08 PM	PHl3 MFC set to  0.000000
8/31/2011	3:54:08 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:54:08 PM	Tube furnace set to 0
8/31/2011	3:54:09 PM	Main Vac valve opened
8/31/2011	3:54:19 PM	Recipe started at 3:54 PM
8/31/2011	3:54:19 PM	Helium valve closed
8/31/2011	3:54:19 PM	H2 valve closed
8/31/2011	3:54:19 PM	BCl3 valve closed
8/31/2011	3:54:19 PM	PH3 valve closed
8/31/2011	3:54:19 PM	SiCl4 pre valve closed
8/31/2011	3:54:19 PM	SiCl4 post valve closed
8/31/2011	3:54:19 PM	Bypass valve closed
8/31/2011	3:54:19 PM	Bubbler valve closed
8/31/2011	3:54:19 PM	Main Vac valve opened
8/31/2011	3:54:19 PM	Helium MFC set to  0.000000
8/31/2011	3:54:19 PM	H2 MFC set to  0.000000
8/31/2011	3:54:19 PM	BCl3 MFC set to  0.000000
8/31/2011	3:54:19 PM	PHl3 MFC set to  0.000000
8/31/2011	3:54:19 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:54:19 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:54:19 PM	Tube furnace set to 150
8/31/2011	3:54:49 PM	H2 valve closed
8/31/2011	3:54:49 PM	BCl3 valve closed
8/31/2011	3:54:49 PM	PH3 valve closed
8/31/2011	3:54:49 PM	SiCl4 pre valve closed
8/31/2011	3:54:49 PM	SiCl4 post valve closed
8/31/2011	3:54:49 PM	Bypass valve closed
8/31/2011	3:54:49 PM	Bubbler valve closed
8/31/2011	3:54:49 PM	Helium valve opened
8/31/2011	3:54:49 PM	Main Vac valve opened
8/31/2011	3:54:49 PM	Helium MFC set to  20.000000
8/31/2011	3:54:49 PM	H2 MFC set to  0.000000
8/31/2011	3:54:49 PM	BCl3 MFC set to  0.000000
8/31/2011	3:54:49 PM	PHl3 MFC set to  0.000000
8/31/2011	3:54:49 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:54:49 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:54:49 PM	Tube furnace set to 150
8/31/2011	3:55:19 PM	Helium valve closed
8/31/2011	3:55:19 PM	H2 valve closed
8/31/2011	3:55:19 PM	BCl3 valve closed
8/31/2011	3:55:19 PM	PH3 valve closed
8/31/2011	3:55:19 PM	SiCl4 pre valve closed
8/31/2011	3:55:19 PM	SiCl4 post valve closed
8/31/2011	3:55:19 PM	Bypass valve closed
8/31/2011	3:55:19 PM	Bubbler valve closed
8/31/2011	3:55:19 PM	Main Vac valve opened
8/31/2011	3:55:19 PM	Helium MFC set to  0.000000
8/31/2011	3:55:19 PM	H2 MFC set to  0.000000
8/31/2011	3:55:19 PM	BCl3 MFC set to  0.000000
8/31/2011	3:55:19 PM	PHl3 MFC set to  0.000000
8/31/2011	3:55:19 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:55:19 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:55:19 PM	Tube furnace set to 150
8/31/2011	3:55:49 PM	H2 valve closed
8/31/2011	3:55:49 PM	BCl3 valve closed
8/31/2011	3:55:49 PM	PH3 valve closed
8/31/2011	3:55:49 PM	SiCl4 pre valve closed
8/31/2011	3:55:49 PM	SiCl4 post valve closed
8/31/2011	3:55:49 PM	Bypass valve closed
8/31/2011	3:55:49 PM	Bubbler valve closed
8/31/2011	3:55:49 PM	Helium valve opened
8/31/2011	3:55:49 PM	Main Vac valve opened
8/31/2011	3:55:49 PM	Helium MFC set to  20.000000
8/31/2011	3:55:49 PM	H2 MFC set to  0.000000
8/31/2011	3:55:49 PM	BCl3 MFC set to  0.000000
8/31/2011	3:55:49 PM	PHl3 MFC set to  0.000000
8/31/2011	3:55:49 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:55:49 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:55:50 PM	Tube furnace set to 150
8/31/2011	3:56:20 PM	Helium valve closed
8/31/2011	3:56:20 PM	H2 valve closed
8/31/2011	3:56:20 PM	BCl3 valve closed
8/31/2011	3:56:20 PM	PH3 valve closed
8/31/2011	3:56:20 PM	SiCl4 pre valve closed
8/31/2011	3:56:20 PM	SiCl4 post valve closed
8/31/2011	3:56:20 PM	Bypass valve closed
8/31/2011	3:56:20 PM	Bubbler valve closed
8/31/2011	3:56:20 PM	Main Vac valve opened
8/31/2011	3:56:20 PM	Helium MFC set to  0.000000
8/31/2011	3:56:20 PM	H2 MFC set to  0.000000
8/31/2011	3:56:20 PM	BCl3 MFC set to  0.000000
8/31/2011	3:56:20 PM	PHl3 MFC set to  0.000000
8/31/2011	3:56:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:56:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:56:20 PM	Tube furnace set to 150
8/31/2011	3:56:50 PM	H2 valve closed
8/31/2011	3:56:50 PM	BCl3 valve closed
8/31/2011	3:56:50 PM	PH3 valve closed
8/31/2011	3:56:50 PM	SiCl4 pre valve closed
8/31/2011	3:56:50 PM	SiCl4 post valve closed
8/31/2011	3:56:50 PM	Bypass valve closed
8/31/2011	3:56:50 PM	Bubbler valve closed
8/31/2011	3:56:50 PM	Helium valve opened
8/31/2011	3:56:50 PM	Main Vac valve opened
8/31/2011	3:56:50 PM	Helium MFC set to  20.000000
8/31/2011	3:56:50 PM	H2 MFC set to  0.000000
8/31/2011	3:56:50 PM	BCl3 MFC set to  0.000000
8/31/2011	3:56:50 PM	PHl3 MFC set to  0.000000
8/31/2011	3:56:50 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:56:50 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:56:50 PM	Tube furnace set to 150
8/31/2011	3:57:20 PM	Helium valve closed
8/31/2011	3:57:20 PM	H2 valve closed
8/31/2011	3:57:20 PM	BCl3 valve closed
8/31/2011	3:57:20 PM	PH3 valve closed
8/31/2011	3:57:20 PM	SiCl4 pre valve closed
8/31/2011	3:57:20 PM	SiCl4 post valve closed
8/31/2011	3:57:20 PM	Bypass valve closed
8/31/2011	3:57:20 PM	Bubbler valve closed
8/31/2011	3:57:20 PM	Main Vac valve opened
8/31/2011	3:57:20 PM	Helium MFC set to  0.000000
8/31/2011	3:57:20 PM	H2 MFC set to  0.000000
8/31/2011	3:57:20 PM	BCl3 MFC set to  0.000000
8/31/2011	3:57:20 PM	PHl3 MFC set to  0.000000
8/31/2011	3:57:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:57:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:57:20 PM	Tube furnace set to 150
8/31/2011	3:57:50 PM	H2 valve closed
8/31/2011	3:57:50 PM	BCl3 valve closed
8/31/2011	3:57:50 PM	PH3 valve closed
8/31/2011	3:57:50 PM	SiCl4 pre valve closed
8/31/2011	3:57:50 PM	SiCl4 post valve closed
8/31/2011	3:57:50 PM	Bypass valve closed
8/31/2011	3:57:50 PM	Bubbler valve closed
8/31/2011	3:57:50 PM	Helium valve opened
8/31/2011	3:57:50 PM	Main Vac valve opened
8/31/2011	3:57:50 PM	Helium MFC set to  20.000000
8/31/2011	3:57:50 PM	H2 MFC set to  0.000000
8/31/2011	3:57:50 PM	BCl3 MFC set to  0.000000
8/31/2011	3:57:50 PM	PHl3 MFC set to  0.000000
8/31/2011	3:57:50 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:57:50 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:57:50 PM	Tube furnace set to 150
8/31/2011	3:58:20 PM	Helium valve closed
8/31/2011	3:58:20 PM	H2 valve closed
8/31/2011	3:58:20 PM	BCl3 valve closed
8/31/2011	3:58:20 PM	PH3 valve closed
8/31/2011	3:58:20 PM	SiCl4 pre valve closed
8/31/2011	3:58:20 PM	SiCl4 post valve closed
8/31/2011	3:58:20 PM	Bypass valve closed
8/31/2011	3:58:20 PM	Bubbler valve closed
8/31/2011	3:58:20 PM	Main Vac valve opened
8/31/2011	3:58:20 PM	Helium MFC set to  0.000000
8/31/2011	3:58:20 PM	H2 MFC set to  0.000000
8/31/2011	3:58:20 PM	BCl3 MFC set to  0.000000
8/31/2011	3:58:20 PM	PHl3 MFC set to  0.000000
8/31/2011	3:58:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:58:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:58:21 PM	Tube furnace set to 150
8/31/2011	3:58:51 PM	H2 valve closed
8/31/2011	3:58:51 PM	BCl3 valve closed
8/31/2011	3:58:51 PM	PH3 valve closed
8/31/2011	3:58:51 PM	SiCl4 pre valve closed
8/31/2011	3:58:51 PM	SiCl4 post valve closed
8/31/2011	3:58:51 PM	Bypass valve closed
8/31/2011	3:58:51 PM	Bubbler valve closed
8/31/2011	3:58:51 PM	Helium valve opened
8/31/2011	3:58:51 PM	Main Vac valve opened
8/31/2011	3:58:51 PM	Helium MFC set to  20.000000
8/31/2011	3:58:51 PM	H2 MFC set to  0.000000
8/31/2011	3:58:51 PM	BCl3 MFC set to  0.000000
8/31/2011	3:58:51 PM	PHl3 MFC set to  0.000000
8/31/2011	3:58:51 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:58:51 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:58:51 PM	Tube furnace set to 150
8/31/2011	3:59:21 PM	Helium valve closed
8/31/2011	3:59:21 PM	H2 valve closed
8/31/2011	3:59:21 PM	BCl3 valve closed
8/31/2011	3:59:21 PM	PH3 valve closed
8/31/2011	3:59:21 PM	SiCl4 pre valve closed
8/31/2011	3:59:21 PM	SiCl4 post valve closed
8/31/2011	3:59:21 PM	Bypass valve closed
8/31/2011	3:59:21 PM	Bubbler valve closed
8/31/2011	3:59:21 PM	Main Vac valve opened
8/31/2011	3:59:21 PM	Helium MFC set to  0.000000
8/31/2011	3:59:21 PM	H2 MFC set to  0.000000
8/31/2011	3:59:21 PM	BCl3 MFC set to  0.000000
8/31/2011	3:59:21 PM	PHl3 MFC set to  0.000000
8/31/2011	3:59:21 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:59:21 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:59:21 PM	Tube furnace set to 150
8/31/2011	3:59:51 PM	H2 valve closed
8/31/2011	3:59:51 PM	BCl3 valve closed
8/31/2011	3:59:51 PM	PH3 valve closed
8/31/2011	3:59:51 PM	SiCl4 pre valve closed
8/31/2011	3:59:51 PM	SiCl4 post valve closed
8/31/2011	3:59:51 PM	Bypass valve closed
8/31/2011	3:59:51 PM	Bubbler valve closed
8/31/2011	3:59:51 PM	Helium valve opened
8/31/2011	3:59:51 PM	Main Vac valve opened
8/31/2011	3:59:51 PM	Helium MFC set to  20.000000
8/31/2011	3:59:51 PM	H2 MFC set to  0.000000
8/31/2011	3:59:51 PM	BCl3 MFC set to  0.000000
8/31/2011	3:59:51 PM	PHl3 MFC set to  0.000000
8/31/2011	3:59:51 PM	SiCl4 MFC set to  0.000000
8/31/2011	3:59:51 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	3:59:51 PM	Tube furnace set to 150
8/31/2011	4:00:03 PM	Run aborted at 4:00 PM
8/31/2011	4:00:03 PM	Helium valve closed
8/31/2011	4:00:03 PM	H2 valve closed
8/31/2011	4:00:03 PM	BCl3 valve closed
8/31/2011	4:00:03 PM	PH3 valve closed
8/31/2011	4:00:03 PM	SiCl4 pre valve closed
8/31/2011	4:00:03 PM	SiCl4 post valve closed
8/31/2011	4:00:03 PM	Bypass valve closed
8/31/2011	4:00:03 PM	Main Vac valve closed
8/31/2011	4:00:03 PM	Bubbler valve closed
8/31/2011	4:00:03 PM	Helium MFC set to  0.000000
8/31/2011	4:00:03 PM	H2 MFC set to  0.000000
8/31/2011	4:00:03 PM	BCl3 MFC set to  0.000000
8/31/2011	4:00:03 PM	PHl3 MFC set to  0.000000
8/31/2011	4:00:03 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:00:03 PM	Tube furnace set to 0
8/31/2011	4:00:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	4:00:05 PM	Recipe started at 4:00 PM
8/31/2011	4:00:05 PM	Helium valve closed
8/31/2011	4:00:05 PM	H2 valve closed
8/31/2011	4:00:05 PM	BCl3 valve closed
8/31/2011	4:00:05 PM	PH3 valve closed
8/31/2011	4:00:05 PM	SiCl4 pre valve closed
8/31/2011	4:00:05 PM	SiCl4 post valve closed
8/31/2011	4:00:05 PM	Main Vac valve closed
8/31/2011	4:00:05 PM	Bubbler valve closed
8/31/2011	4:00:05 PM	Bypass valve opened
8/31/2011	4:00:05 PM	Helium MFC set to  0.000000
8/31/2011	4:00:05 PM	H2 MFC set to  0.000000
8/31/2011	4:00:05 PM	BCl3 MFC set to  0.000000
8/31/2011	4:00:05 PM	PHl3 MFC set to  0.000000
8/31/2011	4:00:05 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:00:05 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:00:05 PM	Tube furnace set to 0
8/31/2011	4:00:06 PM	Helium valve closed
8/31/2011	4:00:06 PM	H2 valve closed
8/31/2011	4:00:06 PM	BCl3 valve closed
8/31/2011	4:00:06 PM	PH3 valve closed
8/31/2011	4:00:06 PM	SiCl4 pre valve closed
8/31/2011	4:00:06 PM	SiCl4 post valve closed
8/31/2011	4:00:06 PM	Main Vac valve closed
8/31/2011	4:00:06 PM	Bubbler valve closed
8/31/2011	4:00:06 PM	Bypass valve opened
8/31/2011	4:00:06 PM	Helium MFC set to  0.000000
8/31/2011	4:00:06 PM	H2 MFC set to  0.000000
8/31/2011	4:00:06 PM	BCl3 MFC set to  0.000000
8/31/2011	4:00:06 PM	PHl3 MFC set to  0.000000
8/31/2011	4:00:06 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:00:06 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:00:06 PM	Tube furnace set to 0
8/31/2011	4:00:11 PM	Run aborted at 4:00 PM
8/31/2011	4:00:11 PM	Helium valve closed
8/31/2011	4:00:11 PM	H2 valve closed
8/31/2011	4:00:11 PM	BCl3 valve closed
8/31/2011	4:00:11 PM	PH3 valve closed
8/31/2011	4:00:11 PM	SiCl4 pre valve closed
8/31/2011	4:00:11 PM	SiCl4 post valve closed
8/31/2011	4:00:11 PM	Bypass valve closed
8/31/2011	4:00:11 PM	Main Vac valve closed
8/31/2011	4:00:11 PM	Bubbler valve closed
8/31/2011	4:00:11 PM	Helium MFC set to  0.000000
8/31/2011	4:00:11 PM	H2 MFC set to  0.000000
8/31/2011	4:00:11 PM	BCl3 MFC set to  0.000000
8/31/2011	4:00:11 PM	PHl3 MFC set to  0.000000
8/31/2011	4:00:11 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:00:12 PM	Tube furnace set to 0
8/31/2011	4:00:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	4:00:13 PM	Main Vac valve opened
8/31/2011	4:00:27 PM	Recipe started at 4:00 PM
8/31/2011	4:00:27 PM	Helium valve closed
8/31/2011	4:00:27 PM	H2 valve closed
8/31/2011	4:00:27 PM	BCl3 valve closed
8/31/2011	4:00:27 PM	PH3 valve closed
8/31/2011	4:00:27 PM	SiCl4 pre valve closed
8/31/2011	4:00:27 PM	SiCl4 post valve closed
8/31/2011	4:00:27 PM	Bypass valve closed
8/31/2011	4:00:27 PM	Bubbler valve closed
8/31/2011	4:00:27 PM	Main Vac valve opened
8/31/2011	4:00:27 PM	Helium MFC set to  0.000000
8/31/2011	4:00:27 PM	H2 MFC set to  0.000000
8/31/2011	4:00:27 PM	BCl3 MFC set to  0.000000
8/31/2011	4:00:27 PM	PHl3 MFC set to  0.000000
8/31/2011	4:00:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:00:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:00:27 PM	Tube furnace set to 150
8/31/2011	4:00:57 PM	H2 valve closed
8/31/2011	4:00:57 PM	BCl3 valve closed
8/31/2011	4:00:57 PM	PH3 valve closed
8/31/2011	4:00:57 PM	SiCl4 pre valve closed
8/31/2011	4:00:57 PM	SiCl4 post valve closed
8/31/2011	4:00:57 PM	Bypass valve closed
8/31/2011	4:00:57 PM	Bubbler valve closed
8/31/2011	4:00:57 PM	Helium valve opened
8/31/2011	4:00:57 PM	Main Vac valve opened
8/31/2011	4:00:57 PM	Helium MFC set to  20.000000
8/31/2011	4:00:57 PM	H2 MFC set to  0.000000
8/31/2011	4:00:57 PM	BCl3 MFC set to  0.000000
8/31/2011	4:00:57 PM	PHl3 MFC set to  0.000000
8/31/2011	4:00:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:00:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:00:57 PM	Tube furnace set to 150
8/31/2011	4:01:27 PM	Helium valve closed
8/31/2011	4:01:27 PM	H2 valve closed
8/31/2011	4:01:27 PM	BCl3 valve closed
8/31/2011	4:01:27 PM	PH3 valve closed
8/31/2011	4:01:27 PM	SiCl4 pre valve closed
8/31/2011	4:01:27 PM	SiCl4 post valve closed
8/31/2011	4:01:27 PM	Bypass valve closed
8/31/2011	4:01:27 PM	Bubbler valve closed
8/31/2011	4:01:27 PM	Main Vac valve opened
8/31/2011	4:01:27 PM	Helium MFC set to  0.000000
8/31/2011	4:01:27 PM	H2 MFC set to  0.000000
8/31/2011	4:01:27 PM	BCl3 MFC set to  0.000000
8/31/2011	4:01:27 PM	PHl3 MFC set to  0.000000
8/31/2011	4:01:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:01:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:01:27 PM	Tube furnace set to 150
8/31/2011	4:01:57 PM	H2 valve closed
8/31/2011	4:01:57 PM	BCl3 valve closed
8/31/2011	4:01:57 PM	PH3 valve closed
8/31/2011	4:01:57 PM	SiCl4 pre valve closed
8/31/2011	4:01:57 PM	SiCl4 post valve closed
8/31/2011	4:01:57 PM	Bypass valve closed
8/31/2011	4:01:57 PM	Bubbler valve closed
8/31/2011	4:01:57 PM	Helium valve opened
8/31/2011	4:01:57 PM	Main Vac valve opened
8/31/2011	4:01:57 PM	Helium MFC set to  20.000000
8/31/2011	4:01:57 PM	H2 MFC set to  0.000000
8/31/2011	4:01:57 PM	BCl3 MFC set to  0.000000
8/31/2011	4:01:57 PM	PHl3 MFC set to  0.000000
8/31/2011	4:01:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:01:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:01:58 PM	Tube furnace set to 150
8/31/2011	4:02:28 PM	Helium valve closed
8/31/2011	4:02:28 PM	H2 valve closed
8/31/2011	4:02:28 PM	BCl3 valve closed
8/31/2011	4:02:28 PM	PH3 valve closed
8/31/2011	4:02:28 PM	SiCl4 pre valve closed
8/31/2011	4:02:28 PM	SiCl4 post valve closed
8/31/2011	4:02:28 PM	Bypass valve closed
8/31/2011	4:02:28 PM	Bubbler valve closed
8/31/2011	4:02:28 PM	Main Vac valve opened
8/31/2011	4:02:28 PM	Helium MFC set to  0.000000
8/31/2011	4:02:28 PM	H2 MFC set to  0.000000
8/31/2011	4:02:28 PM	BCl3 MFC set to  0.000000
8/31/2011	4:02:28 PM	PHl3 MFC set to  0.000000
8/31/2011	4:02:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:02:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:02:28 PM	Tube furnace set to 150
8/31/2011	4:02:58 PM	H2 valve closed
8/31/2011	4:02:58 PM	BCl3 valve closed
8/31/2011	4:02:58 PM	PH3 valve closed
8/31/2011	4:02:58 PM	SiCl4 pre valve closed
8/31/2011	4:02:58 PM	SiCl4 post valve closed
8/31/2011	4:02:58 PM	Bypass valve closed
8/31/2011	4:02:58 PM	Bubbler valve closed
8/31/2011	4:02:58 PM	Helium valve opened
8/31/2011	4:02:58 PM	Main Vac valve opened
8/31/2011	4:02:58 PM	Helium MFC set to  20.000000
8/31/2011	4:02:58 PM	H2 MFC set to  0.000000
8/31/2011	4:02:58 PM	BCl3 MFC set to  0.000000
8/31/2011	4:02:58 PM	PHl3 MFC set to  0.000000
8/31/2011	4:02:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:02:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:02:58 PM	Tube furnace set to 150
8/31/2011	4:03:28 PM	Helium valve closed
8/31/2011	4:03:28 PM	H2 valve closed
8/31/2011	4:03:28 PM	BCl3 valve closed
8/31/2011	4:03:28 PM	PH3 valve closed
8/31/2011	4:03:28 PM	SiCl4 pre valve closed
8/31/2011	4:03:28 PM	SiCl4 post valve closed
8/31/2011	4:03:28 PM	Bypass valve closed
8/31/2011	4:03:28 PM	Bubbler valve closed
8/31/2011	4:03:28 PM	Main Vac valve opened
8/31/2011	4:03:28 PM	Helium MFC set to  0.000000
8/31/2011	4:03:28 PM	H2 MFC set to  0.000000
8/31/2011	4:03:28 PM	BCl3 MFC set to  0.000000
8/31/2011	4:03:28 PM	PHl3 MFC set to  0.000000
8/31/2011	4:03:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:03:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:03:28 PM	Tube furnace set to 150
8/31/2011	4:03:58 PM	H2 valve closed
8/31/2011	4:03:58 PM	BCl3 valve closed
8/31/2011	4:03:58 PM	PH3 valve closed
8/31/2011	4:03:58 PM	SiCl4 pre valve closed
8/31/2011	4:03:58 PM	SiCl4 post valve closed
8/31/2011	4:03:58 PM	Bypass valve closed
8/31/2011	4:03:58 PM	Bubbler valve closed
8/31/2011	4:03:58 PM	Helium valve opened
8/31/2011	4:03:58 PM	Main Vac valve opened
8/31/2011	4:03:58 PM	Helium MFC set to  20.000000
8/31/2011	4:03:58 PM	H2 MFC set to  0.000000
8/31/2011	4:03:58 PM	BCl3 MFC set to  0.000000
8/31/2011	4:03:58 PM	PHl3 MFC set to  0.000000
8/31/2011	4:03:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:03:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:03:58 PM	Tube furnace set to 150
8/31/2011	4:04:28 PM	Helium valve closed
8/31/2011	4:04:28 PM	H2 valve closed
8/31/2011	4:04:28 PM	BCl3 valve closed
8/31/2011	4:04:28 PM	PH3 valve closed
8/31/2011	4:04:28 PM	SiCl4 pre valve closed
8/31/2011	4:04:28 PM	SiCl4 post valve closed
8/31/2011	4:04:28 PM	Bypass valve closed
8/31/2011	4:04:28 PM	Bubbler valve closed
8/31/2011	4:04:28 PM	Main Vac valve opened
8/31/2011	4:04:28 PM	Helium MFC set to  0.000000
8/31/2011	4:04:28 PM	H2 MFC set to  0.000000
8/31/2011	4:04:28 PM	BCl3 MFC set to  0.000000
8/31/2011	4:04:28 PM	PHl3 MFC set to  0.000000
8/31/2011	4:04:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:04:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:04:29 PM	Tube furnace set to 150
8/31/2011	4:04:59 PM	H2 valve closed
8/31/2011	4:04:59 PM	BCl3 valve closed
8/31/2011	4:04:59 PM	PH3 valve closed
8/31/2011	4:04:59 PM	SiCl4 pre valve closed
8/31/2011	4:04:59 PM	SiCl4 post valve closed
8/31/2011	4:04:59 PM	Bypass valve closed
8/31/2011	4:04:59 PM	Bubbler valve closed
8/31/2011	4:04:59 PM	Helium valve opened
8/31/2011	4:04:59 PM	Main Vac valve opened
8/31/2011	4:04:59 PM	Helium MFC set to  20.000000
8/31/2011	4:04:59 PM	H2 MFC set to  0.000000
8/31/2011	4:04:59 PM	BCl3 MFC set to  0.000000
8/31/2011	4:04:59 PM	PHl3 MFC set to  0.000000
8/31/2011	4:04:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:04:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:04:59 PM	Tube furnace set to 150
8/31/2011	4:05:29 PM	Helium valve closed
8/31/2011	4:05:29 PM	H2 valve closed
8/31/2011	4:05:29 PM	BCl3 valve closed
8/31/2011	4:05:29 PM	PH3 valve closed
8/31/2011	4:05:29 PM	SiCl4 pre valve closed
8/31/2011	4:05:29 PM	SiCl4 post valve closed
8/31/2011	4:05:29 PM	Bypass valve closed
8/31/2011	4:05:29 PM	Bubbler valve closed
8/31/2011	4:05:29 PM	Main Vac valve opened
8/31/2011	4:05:29 PM	Helium MFC set to  0.000000
8/31/2011	4:05:29 PM	H2 MFC set to  0.000000
8/31/2011	4:05:29 PM	BCl3 MFC set to  0.000000
8/31/2011	4:05:29 PM	PHl3 MFC set to  0.000000
8/31/2011	4:05:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:05:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:05:29 PM	Tube furnace set to 150
8/31/2011	4:05:59 PM	H2 valve closed
8/31/2011	4:05:59 PM	BCl3 valve closed
8/31/2011	4:05:59 PM	PH3 valve closed
8/31/2011	4:05:59 PM	SiCl4 pre valve closed
8/31/2011	4:05:59 PM	SiCl4 post valve closed
8/31/2011	4:05:59 PM	Bypass valve closed
8/31/2011	4:05:59 PM	Bubbler valve closed
8/31/2011	4:05:59 PM	Helium valve opened
8/31/2011	4:05:59 PM	Main Vac valve opened
8/31/2011	4:05:59 PM	Helium MFC set to  20.000000
8/31/2011	4:05:59 PM	H2 MFC set to  0.000000
8/31/2011	4:05:59 PM	BCl3 MFC set to  0.000000
8/31/2011	4:05:59 PM	PHl3 MFC set to  0.000000
8/31/2011	4:05:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:05:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:05:59 PM	Tube furnace set to 150
8/31/2011	4:06:29 PM	Helium valve closed
8/31/2011	4:06:29 PM	H2 valve closed
8/31/2011	4:06:29 PM	BCl3 valve closed
8/31/2011	4:06:29 PM	PH3 valve closed
8/31/2011	4:06:29 PM	SiCl4 pre valve closed
8/31/2011	4:06:29 PM	SiCl4 post valve closed
8/31/2011	4:06:29 PM	Bypass valve closed
8/31/2011	4:06:29 PM	Bubbler valve closed
8/31/2011	4:06:29 PM	Main Vac valve opened
8/31/2011	4:06:29 PM	Helium MFC set to  0.000000
8/31/2011	4:06:29 PM	H2 MFC set to  0.000000
8/31/2011	4:06:29 PM	BCl3 MFC set to  0.000000
8/31/2011	4:06:29 PM	PHl3 MFC set to  0.000000
8/31/2011	4:06:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:06:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:06:29 PM	Tube furnace set to 150
8/31/2011	4:07:00 PM	H2 valve closed
8/31/2011	4:07:00 PM	BCl3 valve closed
8/31/2011	4:07:00 PM	PH3 valve closed
8/31/2011	4:07:00 PM	SiCl4 pre valve closed
8/31/2011	4:07:00 PM	SiCl4 post valve closed
8/31/2011	4:07:00 PM	Bypass valve closed
8/31/2011	4:07:00 PM	Bubbler valve closed
8/31/2011	4:07:00 PM	Helium valve opened
8/31/2011	4:07:00 PM	Main Vac valve opened
8/31/2011	4:07:00 PM	Helium MFC set to  20.000000
8/31/2011	4:07:00 PM	H2 MFC set to  0.000000
8/31/2011	4:07:00 PM	BCl3 MFC set to  0.000000
8/31/2011	4:07:00 PM	PHl3 MFC set to  0.000000
8/31/2011	4:07:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:07:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:07:00 PM	Tube furnace set to 150
8/31/2011	4:07:30 PM	Helium valve closed
8/31/2011	4:07:30 PM	H2 valve closed
8/31/2011	4:07:30 PM	BCl3 valve closed
8/31/2011	4:07:30 PM	PH3 valve closed
8/31/2011	4:07:30 PM	SiCl4 pre valve closed
8/31/2011	4:07:30 PM	SiCl4 post valve closed
8/31/2011	4:07:30 PM	Bypass valve closed
8/31/2011	4:07:30 PM	Bubbler valve closed
8/31/2011	4:07:30 PM	Main Vac valve opened
8/31/2011	4:07:30 PM	Helium MFC set to  0.000000
8/31/2011	4:07:30 PM	H2 MFC set to  0.000000
8/31/2011	4:07:30 PM	BCl3 MFC set to  0.000000
8/31/2011	4:07:30 PM	PHl3 MFC set to  0.000000
8/31/2011	4:07:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:07:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:07:30 PM	Tube furnace set to 150
8/31/2011	4:08:00 PM	H2 valve closed
8/31/2011	4:08:00 PM	BCl3 valve closed
8/31/2011	4:08:00 PM	PH3 valve closed
8/31/2011	4:08:00 PM	SiCl4 pre valve closed
8/31/2011	4:08:00 PM	SiCl4 post valve closed
8/31/2011	4:08:00 PM	Bypass valve closed
8/31/2011	4:08:00 PM	Bubbler valve closed
8/31/2011	4:08:00 PM	Helium valve opened
8/31/2011	4:08:00 PM	Main Vac valve opened
8/31/2011	4:08:00 PM	Helium MFC set to  20.000000
8/31/2011	4:08:00 PM	H2 MFC set to  0.000000
8/31/2011	4:08:00 PM	BCl3 MFC set to  0.000000
8/31/2011	4:08:00 PM	PHl3 MFC set to  0.000000
8/31/2011	4:08:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:08:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:08:00 PM	Tube furnace set to 150
8/31/2011	4:08:30 PM	Helium valve closed
8/31/2011	4:08:30 PM	H2 valve closed
8/31/2011	4:08:30 PM	BCl3 valve closed
8/31/2011	4:08:30 PM	PH3 valve closed
8/31/2011	4:08:30 PM	SiCl4 pre valve closed
8/31/2011	4:08:30 PM	SiCl4 post valve closed
8/31/2011	4:08:30 PM	Bypass valve closed
8/31/2011	4:08:30 PM	Bubbler valve closed
8/31/2011	4:08:30 PM	Main Vac valve opened
8/31/2011	4:08:30 PM	Helium MFC set to  0.000000
8/31/2011	4:08:30 PM	H2 MFC set to  0.000000
8/31/2011	4:08:30 PM	BCl3 MFC set to  0.000000
8/31/2011	4:08:30 PM	PHl3 MFC set to  0.000000
8/31/2011	4:08:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:08:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:08:30 PM	Tube furnace set to 150
8/31/2011	4:09:00 PM	H2 valve closed
8/31/2011	4:09:00 PM	BCl3 valve closed
8/31/2011	4:09:00 PM	PH3 valve closed
8/31/2011	4:09:00 PM	SiCl4 pre valve closed
8/31/2011	4:09:00 PM	SiCl4 post valve closed
8/31/2011	4:09:00 PM	Bypass valve closed
8/31/2011	4:09:00 PM	Bubbler valve closed
8/31/2011	4:09:00 PM	Helium valve opened
8/31/2011	4:09:00 PM	Main Vac valve opened
8/31/2011	4:09:00 PM	Helium MFC set to  20.000000
8/31/2011	4:09:00 PM	H2 MFC set to  0.000000
8/31/2011	4:09:00 PM	BCl3 MFC set to  0.000000
8/31/2011	4:09:00 PM	PHl3 MFC set to  0.000000
8/31/2011	4:09:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:09:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:09:01 PM	Tube furnace set to 150
8/31/2011	4:09:31 PM	Helium valve closed
8/31/2011	4:09:31 PM	H2 valve closed
8/31/2011	4:09:31 PM	BCl3 valve closed
8/31/2011	4:09:31 PM	PH3 valve closed
8/31/2011	4:09:31 PM	SiCl4 pre valve closed
8/31/2011	4:09:31 PM	SiCl4 post valve closed
8/31/2011	4:09:31 PM	Bypass valve closed
8/31/2011	4:09:31 PM	Bubbler valve closed
8/31/2011	4:09:31 PM	Main Vac valve opened
8/31/2011	4:09:31 PM	Helium MFC set to  0.000000
8/31/2011	4:09:31 PM	H2 MFC set to  0.000000
8/31/2011	4:09:31 PM	BCl3 MFC set to  0.000000
8/31/2011	4:09:31 PM	PHl3 MFC set to  0.000000
8/31/2011	4:09:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:09:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:09:31 PM	Tube furnace set to 150
8/31/2011	4:09:34 PM	Run aborted at 4:09 PM
8/31/2011	4:09:34 PM	Helium valve closed
8/31/2011	4:09:34 PM	H2 valve closed
8/31/2011	4:09:34 PM	BCl3 valve closed
8/31/2011	4:09:34 PM	PH3 valve closed
8/31/2011	4:09:34 PM	SiCl4 pre valve closed
8/31/2011	4:09:34 PM	SiCl4 post valve closed
8/31/2011	4:09:34 PM	Bypass valve closed
8/31/2011	4:09:34 PM	Main Vac valve closed
8/31/2011	4:09:34 PM	Bubbler valve closed
8/31/2011	4:09:34 PM	Helium MFC set to  0.000000
8/31/2011	4:09:34 PM	H2 MFC set to  0.000000
8/31/2011	4:09:34 PM	BCl3 MFC set to  0.000000
8/31/2011	4:09:34 PM	PHl3 MFC set to  0.000000
8/31/2011	4:09:34 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:09:34 PM	Tube furnace set to 0
8/31/2011	4:09:35 PM	Main Vac valve opened
8/31/2011	4:10:06 PM	Recipe started at 4:10 PM
8/31/2011	4:10:06 PM	Helium valve closed
8/31/2011	4:10:06 PM	H2 valve closed
8/31/2011	4:10:06 PM	BCl3 valve closed
8/31/2011	4:10:06 PM	PH3 valve closed
8/31/2011	4:10:06 PM	SiCl4 pre valve closed
8/31/2011	4:10:06 PM	SiCl4 post valve closed
8/31/2011	4:10:06 PM	Main Vac valve closed
8/31/2011	4:10:06 PM	Bypass valve closed
8/31/2011	4:10:06 PM	Bubbler valve closed
8/31/2011	4:10:06 PM	Helium MFC set to  0.000000
8/31/2011	4:10:06 PM	H2 MFC set to  0.000000
8/31/2011	4:10:06 PM	BCl3 MFC set to  0.000000
8/31/2011	4:10:06 PM	PHl3 MFC set to  0.000000
8/31/2011	4:10:06 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:10:06 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:10:06 PM	Tube furnace set to 0
8/31/2011	4:10:09 PM	Helium valve closed
8/31/2011	4:10:09 PM	BCl3 valve closed
8/31/2011	4:10:09 PM	PH3 valve closed
8/31/2011	4:10:09 PM	SiCl4 pre valve closed
8/31/2011	4:10:09 PM	SiCl4 post valve closed
8/31/2011	4:10:09 PM	Main Vac valve closed
8/31/2011	4:10:09 PM	Bypass valve closed
8/31/2011	4:10:09 PM	Bubbler valve closed
8/31/2011	4:10:09 PM	H2 valve opened
8/31/2011	4:10:09 PM	Helium MFC set to  0.000000
8/31/2011	4:10:09 PM	H2 MFC set to  500.000000
8/31/2011	4:10:09 PM	BCl3 MFC set to  0.000000
8/31/2011	4:10:09 PM	PHl3 MFC set to  0.000000
8/31/2011	4:10:09 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:10:09 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:10:09 PM	Tube furnace set to 0
8/31/2011	4:11:11 PM	Helium valve closed
8/31/2011	4:11:11 PM	BCl3 valve closed
8/31/2011	4:11:11 PM	PH3 valve closed
8/31/2011	4:11:11 PM	SiCl4 pre valve closed
8/31/2011	4:11:11 PM	SiCl4 post valve closed
8/31/2011	4:11:11 PM	Main Vac valve closed
8/31/2011	4:11:11 PM	Bypass valve closed
8/31/2011	4:11:11 PM	H2 valve opened
8/31/2011	4:11:11 PM	Bubbler valve opened
8/31/2011	4:11:11 PM	Helium MFC set to  0.000000
8/31/2011	4:11:11 PM	H2 MFC set to  500.000000
8/31/2011	4:11:11 PM	BCl3 MFC set to  0.000000
8/31/2011	4:11:11 PM	PHl3 MFC set to  0.000000
8/31/2011	4:11:11 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:11:11 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:11:12 PM	Tube furnace set to 0
8/31/2011	4:11:13 PM	Helium valve closed
8/31/2011	4:11:13 PM	BCl3 valve closed
8/31/2011	4:11:13 PM	PH3 valve closed
8/31/2011	4:11:13 PM	SiCl4 pre valve closed
8/31/2011	4:11:13 PM	SiCl4 post valve closed
8/31/2011	4:11:13 PM	Main Vac valve closed
8/31/2011	4:11:13 PM	Bypass valve closed
8/31/2011	4:11:13 PM	H2 valve opened
8/31/2011	4:11:13 PM	Bubbler valve opened
8/31/2011	4:11:13 PM	Helium MFC set to  0.000000
8/31/2011	4:11:13 PM	H2 MFC set to  500.000000
8/31/2011	4:11:13 PM	BCl3 MFC set to  0.000000
8/31/2011	4:11:13 PM	PHl3 MFC set to  0.000000
8/31/2011	4:11:13 PM	SiCl4 MFC set to  0.000000
8/31/2011	4:11:13 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:11:13 PM	Tube furnace set to 1000
8/31/2011	4:31:13 PM	Helium valve closed
8/31/2011	4:31:13 PM	PH3 valve closed
8/31/2011	4:31:13 PM	Main Vac valve closed
8/31/2011	4:31:13 PM	Bypass valve closed
8/31/2011	4:31:13 PM	H2 valve opened
8/31/2011	4:31:13 PM	BCl3 valve opened
8/31/2011	4:31:13 PM	SiCl4 pre valve opened
8/31/2011	4:31:13 PM	SiCl4 post valve opened
8/31/2011	4:31:13 PM	Bubbler valve opened
8/31/2011	4:31:13 PM	Helium MFC set to  0.000000
8/31/2011	4:31:13 PM	H2 MFC set to  500.000000
8/31/2011	4:31:13 PM	BCl3 MFC set to  2.000000
8/31/2011	4:31:13 PM	PHl3 MFC set to  0.000000
8/31/2011	4:31:13 PM	SiCl4 MFC set to  50.000000
8/31/2011	4:31:13 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	4:31:13 PM	Tube furnace set to 1000
8/31/2011	5:01:13 PM	Helium valve closed
8/31/2011	5:01:13 PM	BCl3 valve closed
8/31/2011	5:01:13 PM	PH3 valve closed
8/31/2011	5:01:13 PM	SiCl4 pre valve closed
8/31/2011	5:01:13 PM	SiCl4 post valve closed
8/31/2011	5:01:13 PM	Main Vac valve closed
8/31/2011	5:01:13 PM	Bypass valve closed
8/31/2011	5:01:13 PM	H2 valve opened
8/31/2011	5:01:13 PM	Bubbler valve opened
8/31/2011	5:01:13 PM	Helium MFC set to  0.000000
8/31/2011	5:01:13 PM	H2 MFC set to  500.000000
8/31/2011	5:01:13 PM	BCl3 MFC set to  0.000000
8/31/2011	5:01:13 PM	PHl3 MFC set to  0.000000
8/31/2011	5:01:13 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:01:13 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:01:13 PM	Tube furnace set to 750
8/31/2011	5:06:13 PM	H2 valve closed
8/31/2011	5:06:13 PM	BCl3 valve closed
8/31/2011	5:06:13 PM	PH3 valve closed
8/31/2011	5:06:13 PM	SiCl4 pre valve closed
8/31/2011	5:06:13 PM	SiCl4 post valve closed
8/31/2011	5:06:13 PM	Main Vac valve closed
8/31/2011	5:06:13 PM	Bypass valve closed
8/31/2011	5:06:13 PM	Helium valve opened
8/31/2011	5:06:13 PM	Bubbler valve opened
8/31/2011	5:06:13 PM	Helium MFC set to  500.000000
8/31/2011	5:06:13 PM	H2 MFC set to  0.000000
8/31/2011	5:06:13 PM	BCl3 MFC set to  0.000000
8/31/2011	5:06:13 PM	PHl3 MFC set to  0.000000
8/31/2011	5:06:13 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:06:13 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:06:13 PM	Tube furnace set to 0
8/31/2011	5:26:13 PM	Helium valve closed
8/31/2011	5:26:13 PM	H2 valve closed
8/31/2011	5:26:13 PM	BCl3 valve closed
8/31/2011	5:26:13 PM	PH3 valve closed
8/31/2011	5:26:13 PM	SiCl4 pre valve closed
8/31/2011	5:26:13 PM	SiCl4 post valve closed
8/31/2011	5:26:13 PM	Main Vac valve closed
8/31/2011	5:26:13 PM	Bypass valve closed
8/31/2011	5:26:13 PM	Bubbler valve closed
8/31/2011	5:26:13 PM	Helium MFC set to  0.000000
8/31/2011	5:26:13 PM	H2 MFC set to  0.000000
8/31/2011	5:26:13 PM	BCl3 MFC set to  0.000000
8/31/2011	5:26:13 PM	PHl3 MFC set to  0.000000
8/31/2011	5:26:13 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:26:13 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:26:13 PM	Tube furnace set to 0
8/31/2011	5:26:14 PM	Run finished at 5:26 PM
8/31/2011	5:38:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	5:38:44 PM	Recipe started at 5:38 PM
8/31/2011	5:38:44 PM	Helium valve closed
8/31/2011	5:38:44 PM	H2 valve closed
8/31/2011	5:38:44 PM	BCl3 valve closed
8/31/2011	5:38:44 PM	PH3 valve closed
8/31/2011	5:38:44 PM	SiCl4 pre valve closed
8/31/2011	5:38:44 PM	SiCl4 post valve closed
8/31/2011	5:38:44 PM	Main Vac valve closed
8/31/2011	5:38:44 PM	Bubbler valve closed
8/31/2011	5:38:44 PM	Bypass valve opened
8/31/2011	5:38:44 PM	Helium MFC set to  0.000000
8/31/2011	5:38:44 PM	H2 MFC set to  0.000000
8/31/2011	5:38:44 PM	BCl3 MFC set to  0.000000
8/31/2011	5:38:44 PM	PHl3 MFC set to  0.000000
8/31/2011	5:38:44 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:38:44 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:38:44 PM	Tube furnace set to 0
8/31/2011	5:39:48 PM	Helium valve closed
8/31/2011	5:39:48 PM	H2 valve closed
8/31/2011	5:39:48 PM	BCl3 valve closed
8/31/2011	5:39:48 PM	PH3 valve closed
8/31/2011	5:39:48 PM	SiCl4 pre valve closed
8/31/2011	5:39:48 PM	SiCl4 post valve closed
8/31/2011	5:39:48 PM	Main Vac valve closed
8/31/2011	5:39:48 PM	Bubbler valve closed
8/31/2011	5:39:48 PM	Bypass valve opened
8/31/2011	5:39:48 PM	Helium MFC set to  0.000000
8/31/2011	5:39:48 PM	H2 MFC set to  0.000000
8/31/2011	5:39:48 PM	BCl3 MFC set to  0.000000
8/31/2011	5:39:48 PM	PHl3 MFC set to  0.000000
8/31/2011	5:39:48 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:39:48 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:39:49 PM	Tube furnace set to 0
8/31/2011	5:40:27 PM	Helium valve closed
8/31/2011	5:40:27 PM	H2 valve closed
8/31/2011	5:40:27 PM	BCl3 valve closed
8/31/2011	5:40:27 PM	PH3 valve closed
8/31/2011	5:40:27 PM	SiCl4 pre valve closed
8/31/2011	5:40:27 PM	SiCl4 post valve closed
8/31/2011	5:40:27 PM	Bypass valve closed
8/31/2011	5:40:27 PM	Bubbler valve closed
8/31/2011	5:40:27 PM	Main Vac valve opened
8/31/2011	5:40:27 PM	Helium MFC set to  0.000000
8/31/2011	5:40:27 PM	H2 MFC set to  0.000000
8/31/2011	5:40:27 PM	BCl3 MFC set to  0.000000
8/31/2011	5:40:27 PM	PHl3 MFC set to  0.000000
8/31/2011	5:40:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:40:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:40:27 PM	Tube furnace set to 0
8/31/2011	5:40:28 PM	Run finished at 5:40 PM
8/31/2011	5:40:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	5:40:57 PM	Recipe started at 5:40 PM
8/31/2011	5:40:57 PM	Helium valve closed
8/31/2011	5:40:57 PM	H2 valve closed
8/31/2011	5:40:57 PM	BCl3 valve closed
8/31/2011	5:40:57 PM	PH3 valve closed
8/31/2011	5:40:57 PM	SiCl4 pre valve closed
8/31/2011	5:40:57 PM	SiCl4 post valve closed
8/31/2011	5:40:57 PM	Bypass valve closed
8/31/2011	5:40:57 PM	Bubbler valve closed
8/31/2011	5:40:57 PM	Main Vac valve opened
8/31/2011	5:40:57 PM	Helium MFC set to  0.000000
8/31/2011	5:40:57 PM	H2 MFC set to  0.000000
8/31/2011	5:40:57 PM	BCl3 MFC set to  0.000000
8/31/2011	5:40:57 PM	PHl3 MFC set to  0.000000
8/31/2011	5:40:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:40:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:40:57 PM	Tube furnace set to 150
8/31/2011	5:41:27 PM	H2 valve closed
8/31/2011	5:41:27 PM	BCl3 valve closed
8/31/2011	5:41:27 PM	PH3 valve closed
8/31/2011	5:41:27 PM	SiCl4 pre valve closed
8/31/2011	5:41:27 PM	SiCl4 post valve closed
8/31/2011	5:41:27 PM	Bypass valve closed
8/31/2011	5:41:27 PM	Bubbler valve closed
8/31/2011	5:41:27 PM	Helium valve opened
8/31/2011	5:41:27 PM	Main Vac valve opened
8/31/2011	5:41:27 PM	Helium MFC set to  20.000000
8/31/2011	5:41:27 PM	H2 MFC set to  0.000000
8/31/2011	5:41:27 PM	BCl3 MFC set to  0.000000
8/31/2011	5:41:27 PM	PHl3 MFC set to  0.000000
8/31/2011	5:41:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:41:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:41:27 PM	Tube furnace set to 150
8/31/2011	5:41:57 PM	Helium valve closed
8/31/2011	5:41:57 PM	H2 valve closed
8/31/2011	5:41:57 PM	BCl3 valve closed
8/31/2011	5:41:57 PM	PH3 valve closed
8/31/2011	5:41:57 PM	SiCl4 pre valve closed
8/31/2011	5:41:57 PM	SiCl4 post valve closed
8/31/2011	5:41:57 PM	Bypass valve closed
8/31/2011	5:41:57 PM	Bubbler valve closed
8/31/2011	5:41:57 PM	Main Vac valve opened
8/31/2011	5:41:57 PM	Helium MFC set to  0.000000
8/31/2011	5:41:57 PM	H2 MFC set to  0.000000
8/31/2011	5:41:57 PM	BCl3 MFC set to  0.000000
8/31/2011	5:41:57 PM	PHl3 MFC set to  0.000000
8/31/2011	5:41:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:41:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:41:57 PM	Tube furnace set to 150
8/31/2011	5:42:27 PM	H2 valve closed
8/31/2011	5:42:27 PM	BCl3 valve closed
8/31/2011	5:42:27 PM	PH3 valve closed
8/31/2011	5:42:27 PM	SiCl4 pre valve closed
8/31/2011	5:42:27 PM	SiCl4 post valve closed
8/31/2011	5:42:27 PM	Bypass valve closed
8/31/2011	5:42:27 PM	Bubbler valve closed
8/31/2011	5:42:27 PM	Helium valve opened
8/31/2011	5:42:27 PM	Main Vac valve opened
8/31/2011	5:42:27 PM	Helium MFC set to  20.000000
8/31/2011	5:42:27 PM	H2 MFC set to  0.000000
8/31/2011	5:42:27 PM	BCl3 MFC set to  0.000000
8/31/2011	5:42:27 PM	PHl3 MFC set to  0.000000
8/31/2011	5:42:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:42:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:42:27 PM	Tube furnace set to 150
8/31/2011	5:42:57 PM	Helium valve closed
8/31/2011	5:42:57 PM	H2 valve closed
8/31/2011	5:42:57 PM	BCl3 valve closed
8/31/2011	5:42:57 PM	PH3 valve closed
8/31/2011	5:42:57 PM	SiCl4 pre valve closed
8/31/2011	5:42:57 PM	SiCl4 post valve closed
8/31/2011	5:42:57 PM	Bypass valve closed
8/31/2011	5:42:57 PM	Bubbler valve closed
8/31/2011	5:42:57 PM	Main Vac valve opened
8/31/2011	5:42:57 PM	Helium MFC set to  0.000000
8/31/2011	5:42:57 PM	H2 MFC set to  0.000000
8/31/2011	5:42:57 PM	BCl3 MFC set to  0.000000
8/31/2011	5:42:57 PM	PHl3 MFC set to  0.000000
8/31/2011	5:42:57 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:42:57 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:42:58 PM	Tube furnace set to 150
8/31/2011	5:43:28 PM	H2 valve closed
8/31/2011	5:43:28 PM	BCl3 valve closed
8/31/2011	5:43:28 PM	PH3 valve closed
8/31/2011	5:43:28 PM	SiCl4 pre valve closed
8/31/2011	5:43:28 PM	SiCl4 post valve closed
8/31/2011	5:43:28 PM	Bypass valve closed
8/31/2011	5:43:28 PM	Bubbler valve closed
8/31/2011	5:43:28 PM	Helium valve opened
8/31/2011	5:43:28 PM	Main Vac valve opened
8/31/2011	5:43:28 PM	Helium MFC set to  20.000000
8/31/2011	5:43:28 PM	H2 MFC set to  0.000000
8/31/2011	5:43:28 PM	BCl3 MFC set to  0.000000
8/31/2011	5:43:28 PM	PHl3 MFC set to  0.000000
8/31/2011	5:43:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:43:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:43:28 PM	Tube furnace set to 150
8/31/2011	5:43:58 PM	Helium valve closed
8/31/2011	5:43:58 PM	H2 valve closed
8/31/2011	5:43:58 PM	BCl3 valve closed
8/31/2011	5:43:58 PM	PH3 valve closed
8/31/2011	5:43:58 PM	SiCl4 pre valve closed
8/31/2011	5:43:58 PM	SiCl4 post valve closed
8/31/2011	5:43:58 PM	Bypass valve closed
8/31/2011	5:43:58 PM	Bubbler valve closed
8/31/2011	5:43:58 PM	Main Vac valve opened
8/31/2011	5:43:58 PM	Helium MFC set to  0.000000
8/31/2011	5:43:58 PM	H2 MFC set to  0.000000
8/31/2011	5:43:58 PM	BCl3 MFC set to  0.000000
8/31/2011	5:43:58 PM	PHl3 MFC set to  0.000000
8/31/2011	5:43:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:43:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:43:58 PM	Tube furnace set to 150
8/31/2011	5:44:28 PM	H2 valve closed
8/31/2011	5:44:28 PM	BCl3 valve closed
8/31/2011	5:44:28 PM	PH3 valve closed
8/31/2011	5:44:28 PM	SiCl4 pre valve closed
8/31/2011	5:44:28 PM	SiCl4 post valve closed
8/31/2011	5:44:28 PM	Bypass valve closed
8/31/2011	5:44:28 PM	Bubbler valve closed
8/31/2011	5:44:28 PM	Helium valve opened
8/31/2011	5:44:28 PM	Main Vac valve opened
8/31/2011	5:44:28 PM	Helium MFC set to  20.000000
8/31/2011	5:44:28 PM	H2 MFC set to  0.000000
8/31/2011	5:44:28 PM	BCl3 MFC set to  0.000000
8/31/2011	5:44:28 PM	PHl3 MFC set to  0.000000
8/31/2011	5:44:28 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:44:28 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:44:28 PM	Tube furnace set to 150
8/31/2011	5:44:58 PM	Helium valve closed
8/31/2011	5:44:58 PM	H2 valve closed
8/31/2011	5:44:58 PM	BCl3 valve closed
8/31/2011	5:44:58 PM	PH3 valve closed
8/31/2011	5:44:58 PM	SiCl4 pre valve closed
8/31/2011	5:44:58 PM	SiCl4 post valve closed
8/31/2011	5:44:58 PM	Bypass valve closed
8/31/2011	5:44:58 PM	Bubbler valve closed
8/31/2011	5:44:58 PM	Main Vac valve opened
8/31/2011	5:44:58 PM	Helium MFC set to  0.000000
8/31/2011	5:44:58 PM	H2 MFC set to  0.000000
8/31/2011	5:44:58 PM	BCl3 MFC set to  0.000000
8/31/2011	5:44:58 PM	PHl3 MFC set to  0.000000
8/31/2011	5:44:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:44:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:44:58 PM	Tube furnace set to 150
8/31/2011	5:45:29 PM	H2 valve closed
8/31/2011	5:45:29 PM	BCl3 valve closed
8/31/2011	5:45:29 PM	PH3 valve closed
8/31/2011	5:45:29 PM	SiCl4 pre valve closed
8/31/2011	5:45:29 PM	SiCl4 post valve closed
8/31/2011	5:45:29 PM	Bypass valve closed
8/31/2011	5:45:29 PM	Bubbler valve closed
8/31/2011	5:45:29 PM	Helium valve opened
8/31/2011	5:45:29 PM	Main Vac valve opened
8/31/2011	5:45:29 PM	Helium MFC set to  20.000000
8/31/2011	5:45:29 PM	H2 MFC set to  0.000000
8/31/2011	5:45:29 PM	BCl3 MFC set to  0.000000
8/31/2011	5:45:29 PM	PHl3 MFC set to  0.000000
8/31/2011	5:45:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:45:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:45:29 PM	Tube furnace set to 150
8/31/2011	5:45:59 PM	Helium valve closed
8/31/2011	5:45:59 PM	H2 valve closed
8/31/2011	5:45:59 PM	BCl3 valve closed
8/31/2011	5:45:59 PM	PH3 valve closed
8/31/2011	5:45:59 PM	SiCl4 pre valve closed
8/31/2011	5:45:59 PM	SiCl4 post valve closed
8/31/2011	5:45:59 PM	Bypass valve closed
8/31/2011	5:45:59 PM	Bubbler valve closed
8/31/2011	5:45:59 PM	Main Vac valve opened
8/31/2011	5:45:59 PM	Helium MFC set to  0.000000
8/31/2011	5:45:59 PM	H2 MFC set to  0.000000
8/31/2011	5:45:59 PM	BCl3 MFC set to  0.000000
8/31/2011	5:45:59 PM	PHl3 MFC set to  0.000000
8/31/2011	5:45:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:45:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:45:59 PM	Tube furnace set to 150
8/31/2011	5:46:29 PM	H2 valve closed
8/31/2011	5:46:29 PM	BCl3 valve closed
8/31/2011	5:46:29 PM	PH3 valve closed
8/31/2011	5:46:29 PM	SiCl4 pre valve closed
8/31/2011	5:46:29 PM	SiCl4 post valve closed
8/31/2011	5:46:29 PM	Bypass valve closed
8/31/2011	5:46:29 PM	Bubbler valve closed
8/31/2011	5:46:29 PM	Helium valve opened
8/31/2011	5:46:29 PM	Main Vac valve opened
8/31/2011	5:46:29 PM	Helium MFC set to  20.000000
8/31/2011	5:46:29 PM	H2 MFC set to  0.000000
8/31/2011	5:46:29 PM	BCl3 MFC set to  0.000000
8/31/2011	5:46:29 PM	PHl3 MFC set to  0.000000
8/31/2011	5:46:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:46:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:46:29 PM	Tube furnace set to 150
8/31/2011	5:46:59 PM	Helium valve closed
8/31/2011	5:46:59 PM	H2 valve closed
8/31/2011	5:46:59 PM	BCl3 valve closed
8/31/2011	5:46:59 PM	PH3 valve closed
8/31/2011	5:46:59 PM	SiCl4 pre valve closed
8/31/2011	5:46:59 PM	SiCl4 post valve closed
8/31/2011	5:46:59 PM	Bypass valve closed
8/31/2011	5:46:59 PM	Bubbler valve closed
8/31/2011	5:46:59 PM	Main Vac valve opened
8/31/2011	5:46:59 PM	Helium MFC set to  0.000000
8/31/2011	5:46:59 PM	H2 MFC set to  0.000000
8/31/2011	5:46:59 PM	BCl3 MFC set to  0.000000
8/31/2011	5:46:59 PM	PHl3 MFC set to  0.000000
8/31/2011	5:46:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:46:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:46:59 PM	Tube furnace set to 150
8/31/2011	5:47:19 PM	Run aborted at 5:47 PM
8/31/2011	5:47:19 PM	Helium valve closed
8/31/2011	5:47:19 PM	H2 valve closed
8/31/2011	5:47:19 PM	BCl3 valve closed
8/31/2011	5:47:19 PM	PH3 valve closed
8/31/2011	5:47:19 PM	SiCl4 pre valve closed
8/31/2011	5:47:19 PM	SiCl4 post valve closed
8/31/2011	5:47:19 PM	Bypass valve closed
8/31/2011	5:47:19 PM	Main Vac valve closed
8/31/2011	5:47:19 PM	Bubbler valve closed
8/31/2011	5:47:19 PM	Helium MFC set to  0.000000
8/31/2011	5:47:19 PM	H2 MFC set to  0.000000
8/31/2011	5:47:19 PM	BCl3 MFC set to  0.000000
8/31/2011	5:47:19 PM	PHl3 MFC set to  0.000000
8/31/2011	5:47:19 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:47:20 PM	Tube furnace set to 0
8/31/2011	5:47:20 PM	Main Vac valve opened
8/31/2011	5:47:29 PM	Recipe started at 5:47 PM
8/31/2011	5:47:29 PM	Helium valve closed
8/31/2011	5:47:29 PM	H2 valve closed
8/31/2011	5:47:29 PM	BCl3 valve closed
8/31/2011	5:47:29 PM	PH3 valve closed
8/31/2011	5:47:29 PM	SiCl4 pre valve closed
8/31/2011	5:47:29 PM	SiCl4 post valve closed
8/31/2011	5:47:29 PM	Bypass valve closed
8/31/2011	5:47:29 PM	Bubbler valve closed
8/31/2011	5:47:29 PM	Main Vac valve opened
8/31/2011	5:47:29 PM	Helium MFC set to  0.000000
8/31/2011	5:47:29 PM	H2 MFC set to  0.000000
8/31/2011	5:47:29 PM	BCl3 MFC set to  0.000000
8/31/2011	5:47:29 PM	PHl3 MFC set to  0.000000
8/31/2011	5:47:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:47:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:47:29 PM	Tube furnace set to 150
8/31/2011	5:47:59 PM	H2 valve closed
8/31/2011	5:47:59 PM	BCl3 valve closed
8/31/2011	5:47:59 PM	PH3 valve closed
8/31/2011	5:47:59 PM	SiCl4 pre valve closed
8/31/2011	5:47:59 PM	SiCl4 post valve closed
8/31/2011	5:47:59 PM	Bypass valve closed
8/31/2011	5:47:59 PM	Bubbler valve closed
8/31/2011	5:47:59 PM	Helium valve opened
8/31/2011	5:47:59 PM	Main Vac valve opened
8/31/2011	5:47:59 PM	Helium MFC set to  20.000000
8/31/2011	5:47:59 PM	H2 MFC set to  0.000000
8/31/2011	5:47:59 PM	BCl3 MFC set to  0.000000
8/31/2011	5:47:59 PM	PHl3 MFC set to  0.000000
8/31/2011	5:47:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:47:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:47:59 PM	Tube furnace set to 150
8/31/2011	5:48:29 PM	Helium valve closed
8/31/2011	5:48:29 PM	H2 valve closed
8/31/2011	5:48:29 PM	BCl3 valve closed
8/31/2011	5:48:29 PM	PH3 valve closed
8/31/2011	5:48:29 PM	SiCl4 pre valve closed
8/31/2011	5:48:29 PM	SiCl4 post valve closed
8/31/2011	5:48:29 PM	Bypass valve closed
8/31/2011	5:48:29 PM	Bubbler valve closed
8/31/2011	5:48:29 PM	Main Vac valve opened
8/31/2011	5:48:29 PM	Helium MFC set to  0.000000
8/31/2011	5:48:29 PM	H2 MFC set to  0.000000
8/31/2011	5:48:29 PM	BCl3 MFC set to  0.000000
8/31/2011	5:48:29 PM	PHl3 MFC set to  0.000000
8/31/2011	5:48:29 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:48:29 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:48:29 PM	Tube furnace set to 150
8/31/2011	5:48:59 PM	H2 valve closed
8/31/2011	5:48:59 PM	BCl3 valve closed
8/31/2011	5:48:59 PM	PH3 valve closed
8/31/2011	5:48:59 PM	SiCl4 pre valve closed
8/31/2011	5:48:59 PM	SiCl4 post valve closed
8/31/2011	5:48:59 PM	Bypass valve closed
8/31/2011	5:48:59 PM	Bubbler valve closed
8/31/2011	5:48:59 PM	Helium valve opened
8/31/2011	5:48:59 PM	Main Vac valve opened
8/31/2011	5:48:59 PM	Helium MFC set to  20.000000
8/31/2011	5:48:59 PM	H2 MFC set to  0.000000
8/31/2011	5:48:59 PM	BCl3 MFC set to  0.000000
8/31/2011	5:48:59 PM	PHl3 MFC set to  0.000000
8/31/2011	5:48:59 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:48:59 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:49:00 PM	Tube furnace set to 150
8/31/2011	5:49:30 PM	Helium valve closed
8/31/2011	5:49:30 PM	H2 valve closed
8/31/2011	5:49:30 PM	BCl3 valve closed
8/31/2011	5:49:30 PM	PH3 valve closed
8/31/2011	5:49:30 PM	SiCl4 pre valve closed
8/31/2011	5:49:30 PM	SiCl4 post valve closed
8/31/2011	5:49:30 PM	Bypass valve closed
8/31/2011	5:49:30 PM	Bubbler valve closed
8/31/2011	5:49:30 PM	Main Vac valve opened
8/31/2011	5:49:30 PM	Helium MFC set to  0.000000
8/31/2011	5:49:30 PM	H2 MFC set to  0.000000
8/31/2011	5:49:30 PM	BCl3 MFC set to  0.000000
8/31/2011	5:49:30 PM	PHl3 MFC set to  0.000000
8/31/2011	5:49:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:49:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:49:30 PM	Tube furnace set to 150
8/31/2011	5:50:00 PM	H2 valve closed
8/31/2011	5:50:00 PM	BCl3 valve closed
8/31/2011	5:50:00 PM	PH3 valve closed
8/31/2011	5:50:00 PM	SiCl4 pre valve closed
8/31/2011	5:50:00 PM	SiCl4 post valve closed
8/31/2011	5:50:00 PM	Bypass valve closed
8/31/2011	5:50:00 PM	Bubbler valve closed
8/31/2011	5:50:00 PM	Helium valve opened
8/31/2011	5:50:00 PM	Main Vac valve opened
8/31/2011	5:50:00 PM	Helium MFC set to  20.000000
8/31/2011	5:50:00 PM	H2 MFC set to  0.000000
8/31/2011	5:50:00 PM	BCl3 MFC set to  0.000000
8/31/2011	5:50:00 PM	PHl3 MFC set to  0.000000
8/31/2011	5:50:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:50:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:50:00 PM	Tube furnace set to 150
8/31/2011	5:50:30 PM	Helium valve closed
8/31/2011	5:50:30 PM	H2 valve closed
8/31/2011	5:50:30 PM	BCl3 valve closed
8/31/2011	5:50:30 PM	PH3 valve closed
8/31/2011	5:50:30 PM	SiCl4 pre valve closed
8/31/2011	5:50:30 PM	SiCl4 post valve closed
8/31/2011	5:50:30 PM	Bypass valve closed
8/31/2011	5:50:30 PM	Bubbler valve closed
8/31/2011	5:50:30 PM	Main Vac valve opened
8/31/2011	5:50:30 PM	Helium MFC set to  0.000000
8/31/2011	5:50:30 PM	H2 MFC set to  0.000000
8/31/2011	5:50:30 PM	BCl3 MFC set to  0.000000
8/31/2011	5:50:30 PM	PHl3 MFC set to  0.000000
8/31/2011	5:50:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:50:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:50:30 PM	Tube furnace set to 150
8/31/2011	5:51:00 PM	H2 valve closed
8/31/2011	5:51:00 PM	BCl3 valve closed
8/31/2011	5:51:00 PM	PH3 valve closed
8/31/2011	5:51:00 PM	SiCl4 pre valve closed
8/31/2011	5:51:00 PM	SiCl4 post valve closed
8/31/2011	5:51:00 PM	Bypass valve closed
8/31/2011	5:51:00 PM	Bubbler valve closed
8/31/2011	5:51:00 PM	Helium valve opened
8/31/2011	5:51:00 PM	Main Vac valve opened
8/31/2011	5:51:00 PM	Helium MFC set to  20.000000
8/31/2011	5:51:00 PM	H2 MFC set to  0.000000
8/31/2011	5:51:00 PM	BCl3 MFC set to  0.000000
8/31/2011	5:51:00 PM	PHl3 MFC set to  0.000000
8/31/2011	5:51:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:51:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:51:00 PM	Tube furnace set to 150
8/31/2011	5:51:30 PM	Helium valve closed
8/31/2011	5:51:30 PM	H2 valve closed
8/31/2011	5:51:30 PM	BCl3 valve closed
8/31/2011	5:51:30 PM	PH3 valve closed
8/31/2011	5:51:30 PM	SiCl4 pre valve closed
8/31/2011	5:51:30 PM	SiCl4 post valve closed
8/31/2011	5:51:30 PM	Bypass valve closed
8/31/2011	5:51:30 PM	Bubbler valve closed
8/31/2011	5:51:30 PM	Main Vac valve opened
8/31/2011	5:51:30 PM	Helium MFC set to  0.000000
8/31/2011	5:51:30 PM	H2 MFC set to  0.000000
8/31/2011	5:51:30 PM	BCl3 MFC set to  0.000000
8/31/2011	5:51:30 PM	PHl3 MFC set to  0.000000
8/31/2011	5:51:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:51:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:51:31 PM	Tube furnace set to 150
8/31/2011	5:52:01 PM	H2 valve closed
8/31/2011	5:52:01 PM	BCl3 valve closed
8/31/2011	5:52:01 PM	PH3 valve closed
8/31/2011	5:52:01 PM	SiCl4 pre valve closed
8/31/2011	5:52:01 PM	SiCl4 post valve closed
8/31/2011	5:52:01 PM	Bypass valve closed
8/31/2011	5:52:01 PM	Bubbler valve closed
8/31/2011	5:52:01 PM	Helium valve opened
8/31/2011	5:52:01 PM	Main Vac valve opened
8/31/2011	5:52:01 PM	Helium MFC set to  20.000000
8/31/2011	5:52:01 PM	H2 MFC set to  0.000000
8/31/2011	5:52:01 PM	BCl3 MFC set to  0.000000
8/31/2011	5:52:01 PM	PHl3 MFC set to  0.000000
8/31/2011	5:52:01 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:52:01 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:52:01 PM	Tube furnace set to 150
8/31/2011	5:52:31 PM	Helium valve closed
8/31/2011	5:52:31 PM	H2 valve closed
8/31/2011	5:52:31 PM	BCl3 valve closed
8/31/2011	5:52:31 PM	PH3 valve closed
8/31/2011	5:52:31 PM	SiCl4 pre valve closed
8/31/2011	5:52:31 PM	SiCl4 post valve closed
8/31/2011	5:52:31 PM	Bypass valve closed
8/31/2011	5:52:31 PM	Bubbler valve closed
8/31/2011	5:52:31 PM	Main Vac valve opened
8/31/2011	5:52:31 PM	Helium MFC set to  0.000000
8/31/2011	5:52:31 PM	H2 MFC set to  0.000000
8/31/2011	5:52:31 PM	BCl3 MFC set to  0.000000
8/31/2011	5:52:31 PM	PHl3 MFC set to  0.000000
8/31/2011	5:52:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:52:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:52:31 PM	Tube furnace set to 150
8/31/2011	5:53:01 PM	H2 valve closed
8/31/2011	5:53:01 PM	BCl3 valve closed
8/31/2011	5:53:01 PM	PH3 valve closed
8/31/2011	5:53:01 PM	SiCl4 pre valve closed
8/31/2011	5:53:01 PM	SiCl4 post valve closed
8/31/2011	5:53:01 PM	Bypass valve closed
8/31/2011	5:53:01 PM	Bubbler valve closed
8/31/2011	5:53:01 PM	Helium valve opened
8/31/2011	5:53:01 PM	Main Vac valve opened
8/31/2011	5:53:01 PM	Helium MFC set to  20.000000
8/31/2011	5:53:01 PM	H2 MFC set to  0.000000
8/31/2011	5:53:01 PM	BCl3 MFC set to  0.000000
8/31/2011	5:53:01 PM	PHl3 MFC set to  0.000000
8/31/2011	5:53:01 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:53:01 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:53:01 PM	Tube furnace set to 150
8/31/2011	5:53:31 PM	Helium valve closed
8/31/2011	5:53:31 PM	H2 valve closed
8/31/2011	5:53:31 PM	BCl3 valve closed
8/31/2011	5:53:31 PM	PH3 valve closed
8/31/2011	5:53:31 PM	SiCl4 pre valve closed
8/31/2011	5:53:31 PM	SiCl4 post valve closed
8/31/2011	5:53:31 PM	Bypass valve closed
8/31/2011	5:53:31 PM	Bubbler valve closed
8/31/2011	5:53:31 PM	Main Vac valve opened
8/31/2011	5:53:31 PM	Helium MFC set to  0.000000
8/31/2011	5:53:31 PM	H2 MFC set to  0.000000
8/31/2011	5:53:31 PM	BCl3 MFC set to  0.000000
8/31/2011	5:53:31 PM	PHl3 MFC set to  0.000000
8/31/2011	5:53:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:53:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:53:31 PM	Tube furnace set to 150
8/31/2011	5:54:01 PM	H2 valve closed
8/31/2011	5:54:01 PM	BCl3 valve closed
8/31/2011	5:54:01 PM	PH3 valve closed
8/31/2011	5:54:01 PM	SiCl4 pre valve closed
8/31/2011	5:54:01 PM	SiCl4 post valve closed
8/31/2011	5:54:01 PM	Bypass valve closed
8/31/2011	5:54:01 PM	Bubbler valve closed
8/31/2011	5:54:01 PM	Helium valve opened
8/31/2011	5:54:01 PM	Main Vac valve opened
8/31/2011	5:54:01 PM	Helium MFC set to  20.000000
8/31/2011	5:54:01 PM	H2 MFC set to  0.000000
8/31/2011	5:54:01 PM	BCl3 MFC set to  0.000000
8/31/2011	5:54:01 PM	PHl3 MFC set to  0.000000
8/31/2011	5:54:01 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:54:01 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:54:02 PM	Tube furnace set to 150
8/31/2011	5:54:32 PM	Helium valve closed
8/31/2011	5:54:32 PM	H2 valve closed
8/31/2011	5:54:32 PM	BCl3 valve closed
8/31/2011	5:54:32 PM	PH3 valve closed
8/31/2011	5:54:32 PM	SiCl4 pre valve closed
8/31/2011	5:54:32 PM	SiCl4 post valve closed
8/31/2011	5:54:32 PM	Bypass valve closed
8/31/2011	5:54:32 PM	Bubbler valve closed
8/31/2011	5:54:32 PM	Main Vac valve opened
8/31/2011	5:54:32 PM	Helium MFC set to  0.000000
8/31/2011	5:54:32 PM	H2 MFC set to  0.000000
8/31/2011	5:54:32 PM	BCl3 MFC set to  0.000000
8/31/2011	5:54:32 PM	PHl3 MFC set to  0.000000
8/31/2011	5:54:32 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:54:32 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:54:32 PM	Tube furnace set to 150
8/31/2011	5:55:02 PM	H2 valve closed
8/31/2011	5:55:02 PM	BCl3 valve closed
8/31/2011	5:55:02 PM	PH3 valve closed
8/31/2011	5:55:02 PM	SiCl4 pre valve closed
8/31/2011	5:55:02 PM	SiCl4 post valve closed
8/31/2011	5:55:02 PM	Bypass valve closed
8/31/2011	5:55:02 PM	Bubbler valve closed
8/31/2011	5:55:02 PM	Helium valve opened
8/31/2011	5:55:02 PM	Main Vac valve opened
8/31/2011	5:55:02 PM	Helium MFC set to  20.000000
8/31/2011	5:55:02 PM	H2 MFC set to  0.000000
8/31/2011	5:55:02 PM	BCl3 MFC set to  0.000000
8/31/2011	5:55:02 PM	PHl3 MFC set to  0.000000
8/31/2011	5:55:02 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:55:02 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:55:02 PM	Tube furnace set to 150
8/31/2011	5:55:32 PM	Helium valve closed
8/31/2011	5:55:32 PM	H2 valve closed
8/31/2011	5:55:32 PM	BCl3 valve closed
8/31/2011	5:55:32 PM	PH3 valve closed
8/31/2011	5:55:32 PM	SiCl4 pre valve closed
8/31/2011	5:55:32 PM	SiCl4 post valve closed
8/31/2011	5:55:32 PM	Bypass valve closed
8/31/2011	5:55:32 PM	Bubbler valve closed
8/31/2011	5:55:32 PM	Main Vac valve opened
8/31/2011	5:55:32 PM	Helium MFC set to  0.000000
8/31/2011	5:55:32 PM	H2 MFC set to  0.000000
8/31/2011	5:55:32 PM	BCl3 MFC set to  0.000000
8/31/2011	5:55:32 PM	PHl3 MFC set to  0.000000
8/31/2011	5:55:32 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:55:32 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:55:32 PM	Tube furnace set to 150
8/31/2011	5:55:55 PM	Run aborted at 5:55 PM
8/31/2011	5:55:55 PM	Helium valve closed
8/31/2011	5:55:55 PM	H2 valve closed
8/31/2011	5:55:55 PM	BCl3 valve closed
8/31/2011	5:55:55 PM	PH3 valve closed
8/31/2011	5:55:55 PM	SiCl4 pre valve closed
8/31/2011	5:55:55 PM	SiCl4 post valve closed
8/31/2011	5:55:55 PM	Bypass valve closed
8/31/2011	5:55:55 PM	Main Vac valve closed
8/31/2011	5:55:55 PM	Bubbler valve closed
8/31/2011	5:55:55 PM	Helium MFC set to  0.000000
8/31/2011	5:55:55 PM	H2 MFC set to  0.000000
8/31/2011	5:55:55 PM	BCl3 MFC set to  0.000000
8/31/2011	5:55:55 PM	PHl3 MFC set to  0.000000
8/31/2011	5:55:55 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:55:55 PM	Tube furnace set to 0
8/31/2011	5:55:56 PM	Main Vac valve opened
8/31/2011	5:56:20 PM	Recipe started at 5:56 PM
8/31/2011	5:56:20 PM	Helium valve closed
8/31/2011	5:56:20 PM	H2 valve closed
8/31/2011	5:56:20 PM	BCl3 valve closed
8/31/2011	5:56:20 PM	PH3 valve closed
8/31/2011	5:56:20 PM	SiCl4 pre valve closed
8/31/2011	5:56:20 PM	SiCl4 post valve closed
8/31/2011	5:56:20 PM	Main Vac valve closed
8/31/2011	5:56:20 PM	Bypass valve closed
8/31/2011	5:56:20 PM	Bubbler valve closed
8/31/2011	5:56:20 PM	Helium MFC set to  0.000000
8/31/2011	5:56:20 PM	H2 MFC set to  0.000000
8/31/2011	5:56:20 PM	BCl3 MFC set to  0.000000
8/31/2011	5:56:20 PM	PHl3 MFC set to  0.000000
8/31/2011	5:56:20 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:56:20 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:56:21 PM	Tube furnace set to 0
8/31/2011	5:56:24 PM	Helium valve closed
8/31/2011	5:56:24 PM	BCl3 valve closed
8/31/2011	5:56:24 PM	PH3 valve closed
8/31/2011	5:56:24 PM	SiCl4 pre valve closed
8/31/2011	5:56:24 PM	SiCl4 post valve closed
8/31/2011	5:56:24 PM	Main Vac valve closed
8/31/2011	5:56:24 PM	Bypass valve closed
8/31/2011	5:56:24 PM	Bubbler valve closed
8/31/2011	5:56:24 PM	H2 valve opened
8/31/2011	5:56:24 PM	Helium MFC set to  0.000000
8/31/2011	5:56:24 PM	H2 MFC set to  500.000000
8/31/2011	5:56:24 PM	BCl3 MFC set to  0.000000
8/31/2011	5:56:24 PM	PHl3 MFC set to  0.000000
8/31/2011	5:56:24 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:56:24 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:56:24 PM	Tube furnace set to 0
8/31/2011	5:57:26 PM	Helium valve closed
8/31/2011	5:57:26 PM	BCl3 valve closed
8/31/2011	5:57:26 PM	PH3 valve closed
8/31/2011	5:57:26 PM	SiCl4 pre valve closed
8/31/2011	5:57:26 PM	SiCl4 post valve closed
8/31/2011	5:57:26 PM	Main Vac valve closed
8/31/2011	5:57:26 PM	Bypass valve closed
8/31/2011	5:57:26 PM	H2 valve opened
8/31/2011	5:57:26 PM	Bubbler valve opened
8/31/2011	5:57:26 PM	Helium MFC set to  0.000000
8/31/2011	5:57:26 PM	H2 MFC set to  500.000000
8/31/2011	5:57:26 PM	BCl3 MFC set to  0.000000
8/31/2011	5:57:26 PM	PHl3 MFC set to  0.000000
8/31/2011	5:57:26 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:57:26 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:57:26 PM	Tube furnace set to 0
8/31/2011	5:57:27 PM	Helium valve closed
8/31/2011	5:57:27 PM	BCl3 valve closed
8/31/2011	5:57:27 PM	PH3 valve closed
8/31/2011	5:57:27 PM	SiCl4 pre valve closed
8/31/2011	5:57:27 PM	SiCl4 post valve closed
8/31/2011	5:57:27 PM	Main Vac valve closed
8/31/2011	5:57:27 PM	Bypass valve closed
8/31/2011	5:57:27 PM	H2 valve opened
8/31/2011	5:57:27 PM	Bubbler valve opened
8/31/2011	5:57:27 PM	Helium MFC set to  0.000000
8/31/2011	5:57:27 PM	H2 MFC set to  500.000000
8/31/2011	5:57:27 PM	BCl3 MFC set to  0.000000
8/31/2011	5:57:27 PM	PHl3 MFC set to  0.000000
8/31/2011	5:57:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	5:57:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	5:57:27 PM	Tube furnace set to 1000
8/31/2011	6:17:27 PM	Helium valve closed
8/31/2011	6:17:27 PM	PH3 valve closed
8/31/2011	6:17:27 PM	Main Vac valve closed
8/31/2011	6:17:27 PM	Bypass valve closed
8/31/2011	6:17:27 PM	H2 valve opened
8/31/2011	6:17:27 PM	BCl3 valve opened
8/31/2011	6:17:27 PM	SiCl4 pre valve opened
8/31/2011	6:17:27 PM	SiCl4 post valve opened
8/31/2011	6:17:27 PM	Bubbler valve opened
8/31/2011	6:17:27 PM	Helium MFC set to  0.000000
8/31/2011	6:17:27 PM	H2 MFC set to  500.000000
8/31/2011	6:17:27 PM	BCl3 MFC set to  2.000000
8/31/2011	6:17:27 PM	PHl3 MFC set to  0.000000
8/31/2011	6:17:27 PM	SiCl4 MFC set to  50.000000
8/31/2011	6:17:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	6:17:27 PM	Tube furnace set to 1000
8/31/2011	6:47:27 PM	Helium valve closed
8/31/2011	6:47:27 PM	BCl3 valve closed
8/31/2011	6:47:27 PM	PH3 valve closed
8/31/2011	6:47:27 PM	SiCl4 pre valve closed
8/31/2011	6:47:27 PM	SiCl4 post valve closed
8/31/2011	6:47:27 PM	Main Vac valve closed
8/31/2011	6:47:27 PM	Bypass valve closed
8/31/2011	6:47:27 PM	H2 valve opened
8/31/2011	6:47:27 PM	Bubbler valve opened
8/31/2011	6:47:27 PM	Helium MFC set to  0.000000
8/31/2011	6:47:27 PM	H2 MFC set to  500.000000
8/31/2011	6:47:27 PM	BCl3 MFC set to  0.000000
8/31/2011	6:47:27 PM	PHl3 MFC set to  0.000000
8/31/2011	6:47:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	6:47:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	6:47:27 PM	Tube furnace set to 750
8/31/2011	6:52:27 PM	H2 valve closed
8/31/2011	6:52:27 PM	BCl3 valve closed
8/31/2011	6:52:27 PM	PH3 valve closed
8/31/2011	6:52:27 PM	SiCl4 pre valve closed
8/31/2011	6:52:27 PM	SiCl4 post valve closed
8/31/2011	6:52:27 PM	Main Vac valve closed
8/31/2011	6:52:27 PM	Bypass valve closed
8/31/2011	6:52:27 PM	Helium valve opened
8/31/2011	6:52:27 PM	Bubbler valve opened
8/31/2011	6:52:27 PM	Helium MFC set to  500.000000
8/31/2011	6:52:27 PM	H2 MFC set to  0.000000
8/31/2011	6:52:27 PM	BCl3 MFC set to  0.000000
8/31/2011	6:52:27 PM	PHl3 MFC set to  0.000000
8/31/2011	6:52:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	6:52:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	6:52:27 PM	Tube furnace set to 0
8/31/2011	7:12:27 PM	Helium valve closed
8/31/2011	7:12:27 PM	H2 valve closed
8/31/2011	7:12:27 PM	BCl3 valve closed
8/31/2011	7:12:27 PM	PH3 valve closed
8/31/2011	7:12:27 PM	SiCl4 pre valve closed
8/31/2011	7:12:27 PM	SiCl4 post valve closed
8/31/2011	7:12:27 PM	Main Vac valve closed
8/31/2011	7:12:27 PM	Bypass valve closed
8/31/2011	7:12:27 PM	Bubbler valve closed
8/31/2011	7:12:27 PM	Helium MFC set to  0.000000
8/31/2011	7:12:27 PM	H2 MFC set to  0.000000
8/31/2011	7:12:27 PM	BCl3 MFC set to  0.000000
8/31/2011	7:12:27 PM	PHl3 MFC set to  0.000000
8/31/2011	7:12:27 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:12:27 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:12:28 PM	Tube furnace set to 0
8/31/2011	7:12:29 PM	Run finished at 7:12 PM
8/31/2011	7:20:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	7:20:58 PM	Recipe started at 7:20 PM
8/31/2011	7:20:58 PM	Helium valve closed
8/31/2011	7:20:58 PM	H2 valve closed
8/31/2011	7:20:58 PM	BCl3 valve closed
8/31/2011	7:20:58 PM	PH3 valve closed
8/31/2011	7:20:58 PM	SiCl4 pre valve closed
8/31/2011	7:20:58 PM	SiCl4 post valve closed
8/31/2011	7:20:58 PM	Main Vac valve closed
8/31/2011	7:20:58 PM	Bubbler valve closed
8/31/2011	7:20:58 PM	Bypass valve opened
8/31/2011	7:20:58 PM	Helium MFC set to  0.000000
8/31/2011	7:20:58 PM	H2 MFC set to  0.000000
8/31/2011	7:20:58 PM	BCl3 MFC set to  0.000000
8/31/2011	7:20:58 PM	PHl3 MFC set to  0.000000
8/31/2011	7:20:58 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:20:58 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:20:58 PM	Tube furnace set to 0
8/31/2011	7:22:00 PM	Helium valve closed
8/31/2011	7:22:00 PM	H2 valve closed
8/31/2011	7:22:00 PM	BCl3 valve closed
8/31/2011	7:22:00 PM	PH3 valve closed
8/31/2011	7:22:00 PM	SiCl4 pre valve closed
8/31/2011	7:22:00 PM	SiCl4 post valve closed
8/31/2011	7:22:00 PM	Main Vac valve closed
8/31/2011	7:22:00 PM	Bubbler valve closed
8/31/2011	7:22:00 PM	Bypass valve opened
8/31/2011	7:22:00 PM	Helium MFC set to  0.000000
8/31/2011	7:22:00 PM	H2 MFC set to  0.000000
8/31/2011	7:22:00 PM	BCl3 MFC set to  0.000000
8/31/2011	7:22:00 PM	PHl3 MFC set to  0.000000
8/31/2011	7:22:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:22:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:22:00 PM	Tube furnace set to 0
8/31/2011	7:23:00 PM	Helium valve closed
8/31/2011	7:23:00 PM	H2 valve closed
8/31/2011	7:23:00 PM	BCl3 valve closed
8/31/2011	7:23:00 PM	PH3 valve closed
8/31/2011	7:23:00 PM	SiCl4 pre valve closed
8/31/2011	7:23:00 PM	SiCl4 post valve closed
8/31/2011	7:23:00 PM	Bypass valve closed
8/31/2011	7:23:00 PM	Bubbler valve closed
8/31/2011	7:23:00 PM	Main Vac valve opened
8/31/2011	7:23:00 PM	Helium MFC set to  0.000000
8/31/2011	7:23:00 PM	H2 MFC set to  0.000000
8/31/2011	7:23:00 PM	BCl3 MFC set to  0.000000
8/31/2011	7:23:00 PM	PHl3 MFC set to  0.000000
8/31/2011	7:23:00 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:23:00 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:23:00 PM	Tube furnace set to 0
8/31/2011	7:23:01 PM	Run finished at 7:23 PM
8/31/2011	7:23:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	7:23:37 PM	Recipe started at 7:23 PM
8/31/2011	7:23:37 PM	Helium valve closed
8/31/2011	7:23:37 PM	H2 valve closed
8/31/2011	7:23:37 PM	BCl3 valve closed
8/31/2011	7:23:37 PM	PH3 valve closed
8/31/2011	7:23:37 PM	SiCl4 pre valve closed
8/31/2011	7:23:37 PM	SiCl4 post valve closed
8/31/2011	7:23:37 PM	Bypass valve closed
8/31/2011	7:23:37 PM	Bubbler valve closed
8/31/2011	7:23:37 PM	Main Vac valve opened
8/31/2011	7:23:37 PM	Helium MFC set to  0.000000
8/31/2011	7:23:37 PM	H2 MFC set to  0.000000
8/31/2011	7:23:37 PM	BCl3 MFC set to  0.000000
8/31/2011	7:23:37 PM	PHl3 MFC set to  0.000000
8/31/2011	7:23:37 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:23:37 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:23:37 PM	Tube furnace set to 150
8/31/2011	7:24:07 PM	H2 valve closed
8/31/2011	7:24:07 PM	BCl3 valve closed
8/31/2011	7:24:07 PM	PH3 valve closed
8/31/2011	7:24:07 PM	SiCl4 pre valve closed
8/31/2011	7:24:07 PM	SiCl4 post valve closed
8/31/2011	7:24:07 PM	Bypass valve closed
8/31/2011	7:24:07 PM	Bubbler valve closed
8/31/2011	7:24:07 PM	Helium valve opened
8/31/2011	7:24:07 PM	Main Vac valve opened
8/31/2011	7:24:07 PM	Helium MFC set to  20.000000
8/31/2011	7:24:07 PM	H2 MFC set to  0.000000
8/31/2011	7:24:07 PM	BCl3 MFC set to  0.000000
8/31/2011	7:24:07 PM	PHl3 MFC set to  0.000000
8/31/2011	7:24:07 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:24:07 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:24:08 PM	Tube furnace set to 150
8/31/2011	7:24:38 PM	Helium valve closed
8/31/2011	7:24:38 PM	H2 valve closed
8/31/2011	7:24:38 PM	BCl3 valve closed
8/31/2011	7:24:38 PM	PH3 valve closed
8/31/2011	7:24:38 PM	SiCl4 pre valve closed
8/31/2011	7:24:38 PM	SiCl4 post valve closed
8/31/2011	7:24:38 PM	Bypass valve closed
8/31/2011	7:24:38 PM	Bubbler valve closed
8/31/2011	7:24:38 PM	Main Vac valve opened
8/31/2011	7:24:38 PM	Helium MFC set to  0.000000
8/31/2011	7:24:38 PM	H2 MFC set to  0.000000
8/31/2011	7:24:38 PM	BCl3 MFC set to  0.000000
8/31/2011	7:24:38 PM	PHl3 MFC set to  0.000000
8/31/2011	7:24:38 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:24:38 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:24:38 PM	Tube furnace set to 150
8/31/2011	7:25:08 PM	H2 valve closed
8/31/2011	7:25:08 PM	BCl3 valve closed
8/31/2011	7:25:08 PM	PH3 valve closed
8/31/2011	7:25:08 PM	SiCl4 pre valve closed
8/31/2011	7:25:08 PM	SiCl4 post valve closed
8/31/2011	7:25:08 PM	Bypass valve closed
8/31/2011	7:25:08 PM	Bubbler valve closed
8/31/2011	7:25:08 PM	Helium valve opened
8/31/2011	7:25:08 PM	Main Vac valve opened
8/31/2011	7:25:08 PM	Helium MFC set to  20.000000
8/31/2011	7:25:08 PM	H2 MFC set to  0.000000
8/31/2011	7:25:08 PM	BCl3 MFC set to  0.000000
8/31/2011	7:25:08 PM	PHl3 MFC set to  0.000000
8/31/2011	7:25:08 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:25:08 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:25:08 PM	Tube furnace set to 150
8/31/2011	7:25:38 PM	Helium valve closed
8/31/2011	7:25:38 PM	H2 valve closed
8/31/2011	7:25:38 PM	BCl3 valve closed
8/31/2011	7:25:38 PM	PH3 valve closed
8/31/2011	7:25:38 PM	SiCl4 pre valve closed
8/31/2011	7:25:38 PM	SiCl4 post valve closed
8/31/2011	7:25:38 PM	Bypass valve closed
8/31/2011	7:25:38 PM	Bubbler valve closed
8/31/2011	7:25:38 PM	Main Vac valve opened
8/31/2011	7:25:38 PM	Helium MFC set to  0.000000
8/31/2011	7:25:38 PM	H2 MFC set to  0.000000
8/31/2011	7:25:38 PM	BCl3 MFC set to  0.000000
8/31/2011	7:25:38 PM	PHl3 MFC set to  0.000000
8/31/2011	7:25:38 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:25:38 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:25:38 PM	Tube furnace set to 150
8/31/2011	7:26:08 PM	H2 valve closed
8/31/2011	7:26:08 PM	BCl3 valve closed
8/31/2011	7:26:08 PM	PH3 valve closed
8/31/2011	7:26:08 PM	SiCl4 pre valve closed
8/31/2011	7:26:08 PM	SiCl4 post valve closed
8/31/2011	7:26:08 PM	Bypass valve closed
8/31/2011	7:26:08 PM	Bubbler valve closed
8/31/2011	7:26:08 PM	Helium valve opened
8/31/2011	7:26:08 PM	Main Vac valve opened
8/31/2011	7:26:08 PM	Helium MFC set to  20.000000
8/31/2011	7:26:08 PM	H2 MFC set to  0.000000
8/31/2011	7:26:08 PM	BCl3 MFC set to  0.000000
8/31/2011	7:26:08 PM	PHl3 MFC set to  0.000000
8/31/2011	7:26:08 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:26:08 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:26:08 PM	Tube furnace set to 150
8/31/2011	7:26:38 PM	Helium valve closed
8/31/2011	7:26:38 PM	H2 valve closed
8/31/2011	7:26:38 PM	BCl3 valve closed
8/31/2011	7:26:38 PM	PH3 valve closed
8/31/2011	7:26:38 PM	SiCl4 pre valve closed
8/31/2011	7:26:38 PM	SiCl4 post valve closed
8/31/2011	7:26:38 PM	Bypass valve closed
8/31/2011	7:26:38 PM	Bubbler valve closed
8/31/2011	7:26:38 PM	Main Vac valve opened
8/31/2011	7:26:38 PM	Helium MFC set to  0.000000
8/31/2011	7:26:38 PM	H2 MFC set to  0.000000
8/31/2011	7:26:38 PM	BCl3 MFC set to  0.000000
8/31/2011	7:26:38 PM	PHl3 MFC set to  0.000000
8/31/2011	7:26:38 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:26:38 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:26:39 PM	Tube furnace set to 150
8/31/2011	7:27:09 PM	H2 valve closed
8/31/2011	7:27:09 PM	BCl3 valve closed
8/31/2011	7:27:09 PM	PH3 valve closed
8/31/2011	7:27:09 PM	SiCl4 pre valve closed
8/31/2011	7:27:09 PM	SiCl4 post valve closed
8/31/2011	7:27:09 PM	Bypass valve closed
8/31/2011	7:27:09 PM	Bubbler valve closed
8/31/2011	7:27:09 PM	Helium valve opened
8/31/2011	7:27:09 PM	Main Vac valve opened
8/31/2011	7:27:09 PM	Helium MFC set to  20.000000
8/31/2011	7:27:09 PM	H2 MFC set to  0.000000
8/31/2011	7:27:09 PM	BCl3 MFC set to  0.000000
8/31/2011	7:27:09 PM	PHl3 MFC set to  0.000000
8/31/2011	7:27:09 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:27:09 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:27:09 PM	Tube furnace set to 150
8/31/2011	7:27:39 PM	Helium valve closed
8/31/2011	7:27:39 PM	H2 valve closed
8/31/2011	7:27:39 PM	BCl3 valve closed
8/31/2011	7:27:39 PM	PH3 valve closed
8/31/2011	7:27:39 PM	SiCl4 pre valve closed
8/31/2011	7:27:39 PM	SiCl4 post valve closed
8/31/2011	7:27:39 PM	Bypass valve closed
8/31/2011	7:27:39 PM	Bubbler valve closed
8/31/2011	7:27:39 PM	Main Vac valve opened
8/31/2011	7:27:39 PM	Helium MFC set to  0.000000
8/31/2011	7:27:39 PM	H2 MFC set to  0.000000
8/31/2011	7:27:39 PM	BCl3 MFC set to  0.000000
8/31/2011	7:27:39 PM	PHl3 MFC set to  0.000000
8/31/2011	7:27:39 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:27:39 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:27:39 PM	Tube furnace set to 150
8/31/2011	7:28:09 PM	H2 valve closed
8/31/2011	7:28:09 PM	BCl3 valve closed
8/31/2011	7:28:09 PM	PH3 valve closed
8/31/2011	7:28:09 PM	SiCl4 pre valve closed
8/31/2011	7:28:09 PM	SiCl4 post valve closed
8/31/2011	7:28:09 PM	Bypass valve closed
8/31/2011	7:28:09 PM	Bubbler valve closed
8/31/2011	7:28:09 PM	Helium valve opened
8/31/2011	7:28:09 PM	Main Vac valve opened
8/31/2011	7:28:09 PM	Helium MFC set to  20.000000
8/31/2011	7:28:09 PM	H2 MFC set to  0.000000
8/31/2011	7:28:09 PM	BCl3 MFC set to  0.000000
8/31/2011	7:28:09 PM	PHl3 MFC set to  0.000000
8/31/2011	7:28:09 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:28:09 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:28:09 PM	Tube furnace set to 150
8/31/2011	7:28:39 PM	Helium valve closed
8/31/2011	7:28:39 PM	H2 valve closed
8/31/2011	7:28:39 PM	BCl3 valve closed
8/31/2011	7:28:39 PM	PH3 valve closed
8/31/2011	7:28:39 PM	SiCl4 pre valve closed
8/31/2011	7:28:39 PM	SiCl4 post valve closed
8/31/2011	7:28:39 PM	Bypass valve closed
8/31/2011	7:28:39 PM	Bubbler valve closed
8/31/2011	7:28:39 PM	Main Vac valve opened
8/31/2011	7:28:39 PM	Helium MFC set to  0.000000
8/31/2011	7:28:39 PM	H2 MFC set to  0.000000
8/31/2011	7:28:39 PM	BCl3 MFC set to  0.000000
8/31/2011	7:28:39 PM	PHl3 MFC set to  0.000000
8/31/2011	7:28:39 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:28:39 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:28:39 PM	Tube furnace set to 150
8/31/2011	7:29:09 PM	H2 valve closed
8/31/2011	7:29:09 PM	BCl3 valve closed
8/31/2011	7:29:09 PM	PH3 valve closed
8/31/2011	7:29:09 PM	SiCl4 pre valve closed
8/31/2011	7:29:09 PM	SiCl4 post valve closed
8/31/2011	7:29:09 PM	Bypass valve closed
8/31/2011	7:29:09 PM	Bubbler valve closed
8/31/2011	7:29:09 PM	Helium valve opened
8/31/2011	7:29:09 PM	Main Vac valve opened
8/31/2011	7:29:09 PM	Helium MFC set to  20.000000
8/31/2011	7:29:09 PM	H2 MFC set to  0.000000
8/31/2011	7:29:09 PM	BCl3 MFC set to  0.000000
8/31/2011	7:29:09 PM	PHl3 MFC set to  0.000000
8/31/2011	7:29:09 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:29:09 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:29:09 PM	Tube furnace set to 150
8/31/2011	7:29:40 PM	Helium valve closed
8/31/2011	7:29:40 PM	H2 valve closed
8/31/2011	7:29:40 PM	BCl3 valve closed
8/31/2011	7:29:40 PM	PH3 valve closed
8/31/2011	7:29:40 PM	SiCl4 pre valve closed
8/31/2011	7:29:40 PM	SiCl4 post valve closed
8/31/2011	7:29:40 PM	Bypass valve closed
8/31/2011	7:29:40 PM	Bubbler valve closed
8/31/2011	7:29:40 PM	Main Vac valve opened
8/31/2011	7:29:40 PM	Helium MFC set to  0.000000
8/31/2011	7:29:40 PM	H2 MFC set to  0.000000
8/31/2011	7:29:40 PM	BCl3 MFC set to  0.000000
8/31/2011	7:29:40 PM	PHl3 MFC set to  0.000000
8/31/2011	7:29:40 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:29:40 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:29:40 PM	Tube furnace set to 150
8/31/2011	7:30:10 PM	H2 valve closed
8/31/2011	7:30:10 PM	BCl3 valve closed
8/31/2011	7:30:10 PM	PH3 valve closed
8/31/2011	7:30:10 PM	SiCl4 pre valve closed
8/31/2011	7:30:10 PM	SiCl4 post valve closed
8/31/2011	7:30:10 PM	Bypass valve closed
8/31/2011	7:30:10 PM	Bubbler valve closed
8/31/2011	7:30:10 PM	Helium valve opened
8/31/2011	7:30:10 PM	Main Vac valve opened
8/31/2011	7:30:10 PM	Helium MFC set to  20.000000
8/31/2011	7:30:10 PM	H2 MFC set to  0.000000
8/31/2011	7:30:10 PM	BCl3 MFC set to  0.000000
8/31/2011	7:30:10 PM	PHl3 MFC set to  0.000000
8/31/2011	7:30:10 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:30:10 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:30:10 PM	Tube furnace set to 150
8/31/2011	7:30:40 PM	Helium valve closed
8/31/2011	7:30:40 PM	H2 valve closed
8/31/2011	7:30:40 PM	BCl3 valve closed
8/31/2011	7:30:40 PM	PH3 valve closed
8/31/2011	7:30:40 PM	SiCl4 pre valve closed
8/31/2011	7:30:40 PM	SiCl4 post valve closed
8/31/2011	7:30:40 PM	Bypass valve closed
8/31/2011	7:30:40 PM	Bubbler valve closed
8/31/2011	7:30:40 PM	Main Vac valve opened
8/31/2011	7:30:40 PM	Helium MFC set to  0.000000
8/31/2011	7:30:40 PM	H2 MFC set to  0.000000
8/31/2011	7:30:40 PM	BCl3 MFC set to  0.000000
8/31/2011	7:30:40 PM	PHl3 MFC set to  0.000000
8/31/2011	7:30:40 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:30:40 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:30:40 PM	Tube furnace set to 150
8/31/2011	7:31:10 PM	H2 valve closed
8/31/2011	7:31:10 PM	BCl3 valve closed
8/31/2011	7:31:10 PM	PH3 valve closed
8/31/2011	7:31:10 PM	SiCl4 pre valve closed
8/31/2011	7:31:10 PM	SiCl4 post valve closed
8/31/2011	7:31:10 PM	Bypass valve closed
8/31/2011	7:31:10 PM	Bubbler valve closed
8/31/2011	7:31:10 PM	Helium valve opened
8/31/2011	7:31:10 PM	Main Vac valve opened
8/31/2011	7:31:10 PM	Helium MFC set to  20.000000
8/31/2011	7:31:10 PM	H2 MFC set to  0.000000
8/31/2011	7:31:10 PM	BCl3 MFC set to  0.000000
8/31/2011	7:31:10 PM	PHl3 MFC set to  0.000000
8/31/2011	7:31:10 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:31:10 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:31:10 PM	Tube furnace set to 150
8/31/2011	7:31:40 PM	Helium valve closed
8/31/2011	7:31:40 PM	H2 valve closed
8/31/2011	7:31:40 PM	BCl3 valve closed
8/31/2011	7:31:40 PM	PH3 valve closed
8/31/2011	7:31:40 PM	SiCl4 pre valve closed
8/31/2011	7:31:40 PM	SiCl4 post valve closed
8/31/2011	7:31:40 PM	Bypass valve closed
8/31/2011	7:31:40 PM	Bubbler valve closed
8/31/2011	7:31:40 PM	Main Vac valve opened
8/31/2011	7:31:40 PM	Helium MFC set to  0.000000
8/31/2011	7:31:40 PM	H2 MFC set to  0.000000
8/31/2011	7:31:40 PM	BCl3 MFC set to  0.000000
8/31/2011	7:31:40 PM	PHl3 MFC set to  0.000000
8/31/2011	7:31:40 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:31:40 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:31:40 PM	Tube furnace set to 150
8/31/2011	7:32:10 PM	H2 valve closed
8/31/2011	7:32:11 PM	BCl3 valve closed
8/31/2011	7:32:11 PM	PH3 valve closed
8/31/2011	7:32:11 PM	SiCl4 pre valve closed
8/31/2011	7:32:11 PM	SiCl4 post valve closed
8/31/2011	7:32:11 PM	Bypass valve closed
8/31/2011	7:32:11 PM	Bubbler valve closed
8/31/2011	7:32:11 PM	Helium valve opened
8/31/2011	7:32:11 PM	Main Vac valve opened
8/31/2011	7:32:11 PM	Helium MFC set to  20.000000
8/31/2011	7:32:11 PM	H2 MFC set to  0.000000
8/31/2011	7:32:11 PM	BCl3 MFC set to  0.000000
8/31/2011	7:32:11 PM	PHl3 MFC set to  0.000000
8/31/2011	7:32:11 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:32:11 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:32:11 PM	Tube furnace set to 150
8/31/2011	7:32:41 PM	Helium valve closed
8/31/2011	7:32:41 PM	H2 valve closed
8/31/2011	7:32:41 PM	BCl3 valve closed
8/31/2011	7:32:41 PM	PH3 valve closed
8/31/2011	7:32:41 PM	SiCl4 pre valve closed
8/31/2011	7:32:41 PM	SiCl4 post valve closed
8/31/2011	7:32:41 PM	Bypass valve closed
8/31/2011	7:32:41 PM	Bubbler valve closed
8/31/2011	7:32:41 PM	Main Vac valve opened
8/31/2011	7:32:41 PM	Helium MFC set to  0.000000
8/31/2011	7:32:41 PM	H2 MFC set to  0.000000
8/31/2011	7:32:41 PM	BCl3 MFC set to  0.000000
8/31/2011	7:32:41 PM	PHl3 MFC set to  0.000000
8/31/2011	7:32:41 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:32:41 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:32:41 PM	Tube furnace set to 150
8/31/2011	7:33:11 PM	H2 valve closed
8/31/2011	7:33:11 PM	BCl3 valve closed
8/31/2011	7:33:11 PM	PH3 valve closed
8/31/2011	7:33:11 PM	SiCl4 pre valve closed
8/31/2011	7:33:11 PM	SiCl4 post valve closed
8/31/2011	7:33:11 PM	Bypass valve closed
8/31/2011	7:33:11 PM	Bubbler valve closed
8/31/2011	7:33:11 PM	Helium valve opened
8/31/2011	7:33:11 PM	Main Vac valve opened
8/31/2011	7:33:11 PM	Helium MFC set to  20.000000
8/31/2011	7:33:11 PM	H2 MFC set to  0.000000
8/31/2011	7:33:11 PM	BCl3 MFC set to  0.000000
8/31/2011	7:33:11 PM	PHl3 MFC set to  0.000000
8/31/2011	7:33:11 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:33:11 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:33:11 PM	Tube furnace set to 150
8/31/2011	7:33:41 PM	Helium valve closed
8/31/2011	7:33:41 PM	H2 valve closed
8/31/2011	7:33:41 PM	BCl3 valve closed
8/31/2011	7:33:41 PM	PH3 valve closed
8/31/2011	7:33:41 PM	SiCl4 pre valve closed
8/31/2011	7:33:41 PM	SiCl4 post valve closed
8/31/2011	7:33:41 PM	Bypass valve closed
8/31/2011	7:33:41 PM	Bubbler valve closed
8/31/2011	7:33:41 PM	Main Vac valve opened
8/31/2011	7:33:41 PM	Helium MFC set to  0.000000
8/31/2011	7:33:41 PM	H2 MFC set to  0.000000
8/31/2011	7:33:41 PM	BCl3 MFC set to  0.000000
8/31/2011	7:33:41 PM	PHl3 MFC set to  0.000000
8/31/2011	7:33:41 PM	SiCl4 MFC set to  0.000000
8/31/2011	7:33:41 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	7:33:41 PM	Tube furnace set to 150
8/31/2011	7:33:42 PM	Run finished at 7:33 PM
8/31/2011	8:48:23 PM	Recipe started at 8:48 PM
8/31/2011	8:48:23 PM	Helium valve closed
8/31/2011	8:48:23 PM	H2 valve closed
8/31/2011	8:48:23 PM	BCl3 valve closed
8/31/2011	8:48:23 PM	PH3 valve closed
8/31/2011	8:48:23 PM	SiCl4 pre valve closed
8/31/2011	8:48:23 PM	SiCl4 post valve closed
8/31/2011	8:48:23 PM	Main Vac valve closed
8/31/2011	8:48:23 PM	Bypass valve closed
8/31/2011	8:48:23 PM	Bubbler valve closed
8/31/2011	8:48:23 PM	Helium MFC set to  0.000000
8/31/2011	8:48:23 PM	H2 MFC set to  0.000000
8/31/2011	8:48:23 PM	BCl3 MFC set to  0.000000
8/31/2011	8:48:23 PM	PHl3 MFC set to  0.000000
8/31/2011	8:48:23 PM	SiCl4 MFC set to  0.000000
8/31/2011	8:48:23 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	8:48:23 PM	Tube furnace set to 0
8/31/2011	8:48:26 PM	Helium valve closed
8/31/2011	8:48:26 PM	BCl3 valve closed
8/31/2011	8:48:26 PM	PH3 valve closed
8/31/2011	8:48:26 PM	SiCl4 pre valve closed
8/31/2011	8:48:26 PM	SiCl4 post valve closed
8/31/2011	8:48:26 PM	Main Vac valve closed
8/31/2011	8:48:26 PM	Bypass valve closed
8/31/2011	8:48:26 PM	Bubbler valve closed
8/31/2011	8:48:26 PM	H2 valve opened
8/31/2011	8:48:26 PM	Helium MFC set to  0.000000
8/31/2011	8:48:26 PM	H2 MFC set to  500.000000
8/31/2011	8:48:26 PM	BCl3 MFC set to  0.000000
8/31/2011	8:48:26 PM	PHl3 MFC set to  0.000000
8/31/2011	8:48:26 PM	SiCl4 MFC set to  0.000000
8/31/2011	8:48:26 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	8:48:27 PM	Tube furnace set to 0
8/31/2011	8:49:30 PM	Helium valve closed
8/31/2011	8:49:30 PM	BCl3 valve closed
8/31/2011	8:49:30 PM	PH3 valve closed
8/31/2011	8:49:30 PM	SiCl4 pre valve closed
8/31/2011	8:49:30 PM	SiCl4 post valve closed
8/31/2011	8:49:30 PM	Main Vac valve closed
8/31/2011	8:49:30 PM	Bypass valve closed
8/31/2011	8:49:30 PM	H2 valve opened
8/31/2011	8:49:30 PM	Bubbler valve opened
8/31/2011	8:49:30 PM	Helium MFC set to  0.000000
8/31/2011	8:49:30 PM	H2 MFC set to  500.000000
8/31/2011	8:49:30 PM	BCl3 MFC set to  0.000000
8/31/2011	8:49:30 PM	PHl3 MFC set to  0.000000
8/31/2011	8:49:30 PM	SiCl4 MFC set to  0.000000
8/31/2011	8:49:30 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	8:49:30 PM	Tube furnace set to 0
8/31/2011	8:49:31 PM	Helium valve closed
8/31/2011	8:49:31 PM	BCl3 valve closed
8/31/2011	8:49:31 PM	PH3 valve closed
8/31/2011	8:49:31 PM	SiCl4 pre valve closed
8/31/2011	8:49:31 PM	SiCl4 post valve closed
8/31/2011	8:49:31 PM	Main Vac valve closed
8/31/2011	8:49:31 PM	Bypass valve closed
8/31/2011	8:49:31 PM	H2 valve opened
8/31/2011	8:49:31 PM	Bubbler valve opened
8/31/2011	8:49:31 PM	Helium MFC set to  0.000000
8/31/2011	8:49:31 PM	H2 MFC set to  500.000000
8/31/2011	8:49:31 PM	BCl3 MFC set to  0.000000
8/31/2011	8:49:31 PM	PHl3 MFC set to  0.000000
8/31/2011	8:49:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	8:49:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	8:49:31 PM	Tube furnace set to 1000
8/31/2011	9:09:31 PM	Helium valve closed
8/31/2011	9:09:31 PM	PH3 valve closed
8/31/2011	9:09:31 PM	Main Vac valve closed
8/31/2011	9:09:31 PM	Bypass valve closed
8/31/2011	9:09:31 PM	H2 valve opened
8/31/2011	9:09:31 PM	BCl3 valve opened
8/31/2011	9:09:31 PM	SiCl4 pre valve opened
8/31/2011	9:09:31 PM	SiCl4 post valve opened
8/31/2011	9:09:31 PM	Bubbler valve opened
8/31/2011	9:09:31 PM	Helium MFC set to  0.000000
8/31/2011	9:09:31 PM	H2 MFC set to  500.000000
8/31/2011	9:09:31 PM	BCl3 MFC set to  2.000000
8/31/2011	9:09:31 PM	PHl3 MFC set to  0.000000
8/31/2011	9:09:31 PM	SiCl4 MFC set to  50.000000
8/31/2011	9:09:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	9:09:31 PM	Tube furnace set to 1000
8/31/2011	9:39:31 PM	Helium valve closed
8/31/2011	9:39:31 PM	BCl3 valve closed
8/31/2011	9:39:31 PM	PH3 valve closed
8/31/2011	9:39:31 PM	SiCl4 pre valve closed
8/31/2011	9:39:31 PM	SiCl4 post valve closed
8/31/2011	9:39:31 PM	Main Vac valve closed
8/31/2011	9:39:31 PM	Bypass valve closed
8/31/2011	9:39:31 PM	H2 valve opened
8/31/2011	9:39:31 PM	Bubbler valve opened
8/31/2011	9:39:31 PM	Helium MFC set to  0.000000
8/31/2011	9:39:31 PM	H2 MFC set to  500.000000
8/31/2011	9:39:31 PM	BCl3 MFC set to  0.000000
8/31/2011	9:39:31 PM	PHl3 MFC set to  0.000000
8/31/2011	9:39:31 PM	SiCl4 MFC set to  0.000000
8/31/2011	9:39:31 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	9:39:31 PM	Tube furnace set to 750
8/31/2011	9:44:32 PM	H2 valve closed
8/31/2011	9:44:32 PM	BCl3 valve closed
8/31/2011	9:44:32 PM	PH3 valve closed
8/31/2011	9:44:32 PM	SiCl4 pre valve closed
8/31/2011	9:44:32 PM	SiCl4 post valve closed
8/31/2011	9:44:32 PM	Main Vac valve closed
8/31/2011	9:44:32 PM	Bypass valve closed
8/31/2011	9:44:32 PM	Helium valve opened
8/31/2011	9:44:32 PM	Bubbler valve opened
8/31/2011	9:44:32 PM	Helium MFC set to  500.000000
8/31/2011	9:44:32 PM	H2 MFC set to  0.000000
8/31/2011	9:44:32 PM	BCl3 MFC set to  0.000000
8/31/2011	9:44:32 PM	PHl3 MFC set to  0.000000
8/31/2011	9:44:32 PM	SiCl4 MFC set to  0.000000
8/31/2011	9:44:32 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	9:44:32 PM	Tube furnace set to 0
8/31/2011	10:04:32 PM	Helium valve closed
8/31/2011	10:04:32 PM	H2 valve closed
8/31/2011	10:04:32 PM	BCl3 valve closed
8/31/2011	10:04:32 PM	PH3 valve closed
8/31/2011	10:04:32 PM	SiCl4 pre valve closed
8/31/2011	10:04:32 PM	SiCl4 post valve closed
8/31/2011	10:04:32 PM	Main Vac valve closed
8/31/2011	10:04:32 PM	Bypass valve closed
8/31/2011	10:04:32 PM	Bubbler valve closed
8/31/2011	10:04:32 PM	Helium MFC set to  0.000000
8/31/2011	10:04:32 PM	H2 MFC set to  0.000000
8/31/2011	10:04:32 PM	BCl3 MFC set to  0.000000
8/31/2011	10:04:32 PM	PHl3 MFC set to  0.000000
8/31/2011	10:04:32 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:04:32 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:04:32 PM	Tube furnace set to 0
8/31/2011	10:04:33 PM	Run finished at 10:04 PM
8/31/2011	10:13:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	10:13:08 PM	Recipe started at 10:13 PM
8/31/2011	10:13:08 PM	Helium valve closed
8/31/2011	10:13:08 PM	H2 valve closed
8/31/2011	10:13:08 PM	BCl3 valve closed
8/31/2011	10:13:08 PM	PH3 valve closed
8/31/2011	10:13:08 PM	SiCl4 pre valve closed
8/31/2011	10:13:08 PM	SiCl4 post valve closed
8/31/2011	10:13:08 PM	Main Vac valve closed
8/31/2011	10:13:08 PM	Bubbler valve closed
8/31/2011	10:13:08 PM	Bypass valve opened
8/31/2011	10:13:08 PM	Helium MFC set to  0.000000
8/31/2011	10:13:08 PM	H2 MFC set to  0.000000
8/31/2011	10:13:08 PM	BCl3 MFC set to  0.000000
8/31/2011	10:13:08 PM	PHl3 MFC set to  0.000000
8/31/2011	10:13:08 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:13:08 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:13:08 PM	Tube furnace set to 0
8/31/2011	10:14:12 PM	Helium valve closed
8/31/2011	10:14:12 PM	H2 valve closed
8/31/2011	10:14:12 PM	BCl3 valve closed
8/31/2011	10:14:12 PM	PH3 valve closed
8/31/2011	10:14:12 PM	SiCl4 pre valve closed
8/31/2011	10:14:12 PM	SiCl4 post valve closed
8/31/2011	10:14:12 PM	Main Vac valve closed
8/31/2011	10:14:12 PM	Bubbler valve closed
8/31/2011	10:14:12 PM	Bypass valve opened
8/31/2011	10:14:12 PM	Helium MFC set to  0.000000
8/31/2011	10:14:12 PM	H2 MFC set to  0.000000
8/31/2011	10:14:12 PM	BCl3 MFC set to  0.000000
8/31/2011	10:14:12 PM	PHl3 MFC set to  0.000000
8/31/2011	10:14:12 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:14:12 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:14:12 PM	Tube furnace set to 0
8/31/2011	10:15:12 PM	Helium valve closed
8/31/2011	10:15:12 PM	H2 valve closed
8/31/2011	10:15:12 PM	BCl3 valve closed
8/31/2011	10:15:12 PM	PH3 valve closed
8/31/2011	10:15:12 PM	SiCl4 pre valve closed
8/31/2011	10:15:12 PM	SiCl4 post valve closed
8/31/2011	10:15:12 PM	Bypass valve closed
8/31/2011	10:15:12 PM	Bubbler valve closed
8/31/2011	10:15:12 PM	Main Vac valve opened
8/31/2011	10:15:12 PM	Helium MFC set to  0.000000
8/31/2011	10:15:12 PM	H2 MFC set to  0.000000
8/31/2011	10:15:12 PM	BCl3 MFC set to  0.000000
8/31/2011	10:15:12 PM	PHl3 MFC set to  0.000000
8/31/2011	10:15:12 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:15:12 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:15:12 PM	Tube furnace set to 0
8/31/2011	10:15:13 PM	Run finished at 10:15 PM
8/31/2011	10:15:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	10:15:33 PM	Recipe started at 10:15 PM
8/31/2011	10:15:33 PM	Helium valve closed
8/31/2011	10:15:33 PM	H2 valve closed
8/31/2011	10:15:33 PM	BCl3 valve closed
8/31/2011	10:15:33 PM	PH3 valve closed
8/31/2011	10:15:33 PM	SiCl4 pre valve closed
8/31/2011	10:15:33 PM	SiCl4 post valve closed
8/31/2011	10:15:33 PM	Bypass valve closed
8/31/2011	10:15:33 PM	Bubbler valve closed
8/31/2011	10:15:33 PM	Main Vac valve opened
8/31/2011	10:15:33 PM	Helium MFC set to  0.000000
8/31/2011	10:15:33 PM	H2 MFC set to  0.000000
8/31/2011	10:15:33 PM	BCl3 MFC set to  0.000000
8/31/2011	10:15:33 PM	PHl3 MFC set to  0.000000
8/31/2011	10:15:33 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:15:33 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:15:33 PM	Tube furnace set to 150
8/31/2011	10:16:03 PM	H2 valve closed
8/31/2011	10:16:03 PM	BCl3 valve closed
8/31/2011	10:16:03 PM	PH3 valve closed
8/31/2011	10:16:03 PM	SiCl4 pre valve closed
8/31/2011	10:16:03 PM	SiCl4 post valve closed
8/31/2011	10:16:03 PM	Bypass valve closed
8/31/2011	10:16:03 PM	Bubbler valve closed
8/31/2011	10:16:03 PM	Helium valve opened
8/31/2011	10:16:03 PM	Main Vac valve opened
8/31/2011	10:16:03 PM	Helium MFC set to  20.000000
8/31/2011	10:16:03 PM	H2 MFC set to  0.000000
8/31/2011	10:16:03 PM	BCl3 MFC set to  0.000000
8/31/2011	10:16:03 PM	PHl3 MFC set to  0.000000
8/31/2011	10:16:03 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:16:03 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:16:03 PM	Tube furnace set to 150
8/31/2011	10:16:33 PM	Helium valve closed
8/31/2011	10:16:33 PM	H2 valve closed
8/31/2011	10:16:33 PM	BCl3 valve closed
8/31/2011	10:16:33 PM	PH3 valve closed
8/31/2011	10:16:33 PM	SiCl4 pre valve closed
8/31/2011	10:16:33 PM	SiCl4 post valve closed
8/31/2011	10:16:33 PM	Bypass valve closed
8/31/2011	10:16:33 PM	Bubbler valve closed
8/31/2011	10:16:33 PM	Main Vac valve opened
8/31/2011	10:16:33 PM	Helium MFC set to  0.000000
8/31/2011	10:16:33 PM	H2 MFC set to  0.000000
8/31/2011	10:16:33 PM	BCl3 MFC set to  0.000000
8/31/2011	10:16:33 PM	PHl3 MFC set to  0.000000
8/31/2011	10:16:33 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:16:33 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:16:34 PM	Tube furnace set to 150
8/31/2011	10:17:04 PM	H2 valve closed
8/31/2011	10:17:04 PM	BCl3 valve closed
8/31/2011	10:17:04 PM	PH3 valve closed
8/31/2011	10:17:04 PM	SiCl4 pre valve closed
8/31/2011	10:17:04 PM	SiCl4 post valve closed
8/31/2011	10:17:04 PM	Bypass valve closed
8/31/2011	10:17:04 PM	Bubbler valve closed
8/31/2011	10:17:04 PM	Helium valve opened
8/31/2011	10:17:04 PM	Main Vac valve opened
8/31/2011	10:17:04 PM	Helium MFC set to  20.000000
8/31/2011	10:17:04 PM	H2 MFC set to  0.000000
8/31/2011	10:17:04 PM	BCl3 MFC set to  0.000000
8/31/2011	10:17:04 PM	PHl3 MFC set to  0.000000
8/31/2011	10:17:04 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:17:04 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:17:04 PM	Tube furnace set to 150
8/31/2011	10:17:34 PM	Helium valve closed
8/31/2011	10:17:34 PM	H2 valve closed
8/31/2011	10:17:34 PM	BCl3 valve closed
8/31/2011	10:17:34 PM	PH3 valve closed
8/31/2011	10:17:34 PM	SiCl4 pre valve closed
8/31/2011	10:17:34 PM	SiCl4 post valve closed
8/31/2011	10:17:34 PM	Bypass valve closed
8/31/2011	10:17:34 PM	Bubbler valve closed
8/31/2011	10:17:34 PM	Main Vac valve opened
8/31/2011	10:17:34 PM	Helium MFC set to  0.000000
8/31/2011	10:17:34 PM	H2 MFC set to  0.000000
8/31/2011	10:17:34 PM	BCl3 MFC set to  0.000000
8/31/2011	10:17:34 PM	PHl3 MFC set to  0.000000
8/31/2011	10:17:34 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:17:34 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:17:34 PM	Tube furnace set to 150
8/31/2011	10:18:04 PM	H2 valve closed
8/31/2011	10:18:04 PM	BCl3 valve closed
8/31/2011	10:18:04 PM	PH3 valve closed
8/31/2011	10:18:04 PM	SiCl4 pre valve closed
8/31/2011	10:18:04 PM	SiCl4 post valve closed
8/31/2011	10:18:04 PM	Bypass valve closed
8/31/2011	10:18:04 PM	Bubbler valve closed
8/31/2011	10:18:04 PM	Helium valve opened
8/31/2011	10:18:04 PM	Main Vac valve opened
8/31/2011	10:18:04 PM	Helium MFC set to  20.000000
8/31/2011	10:18:04 PM	H2 MFC set to  0.000000
8/31/2011	10:18:04 PM	BCl3 MFC set to  0.000000
8/31/2011	10:18:04 PM	PHl3 MFC set to  0.000000
8/31/2011	10:18:04 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:18:04 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:18:04 PM	Tube furnace set to 150
8/31/2011	10:18:34 PM	Helium valve closed
8/31/2011	10:18:34 PM	H2 valve closed
8/31/2011	10:18:34 PM	BCl3 valve closed
8/31/2011	10:18:34 PM	PH3 valve closed
8/31/2011	10:18:34 PM	SiCl4 pre valve closed
8/31/2011	10:18:34 PM	SiCl4 post valve closed
8/31/2011	10:18:34 PM	Bypass valve closed
8/31/2011	10:18:34 PM	Bubbler valve closed
8/31/2011	10:18:34 PM	Main Vac valve opened
8/31/2011	10:18:34 PM	Helium MFC set to  0.000000
8/31/2011	10:18:34 PM	H2 MFC set to  0.000000
8/31/2011	10:18:34 PM	BCl3 MFC set to  0.000000
8/31/2011	10:18:34 PM	PHl3 MFC set to  0.000000
8/31/2011	10:18:34 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:18:34 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:18:34 PM	Tube furnace set to 150
8/31/2011	10:19:04 PM	H2 valve closed
8/31/2011	10:19:04 PM	BCl3 valve closed
8/31/2011	10:19:04 PM	PH3 valve closed
8/31/2011	10:19:04 PM	SiCl4 pre valve closed
8/31/2011	10:19:04 PM	SiCl4 post valve closed
8/31/2011	10:19:04 PM	Bypass valve closed
8/31/2011	10:19:04 PM	Bubbler valve closed
8/31/2011	10:19:04 PM	Helium valve opened
8/31/2011	10:19:04 PM	Main Vac valve opened
8/31/2011	10:19:04 PM	Helium MFC set to  20.000000
8/31/2011	10:19:04 PM	H2 MFC set to  0.000000
8/31/2011	10:19:04 PM	BCl3 MFC set to  0.000000
8/31/2011	10:19:04 PM	PHl3 MFC set to  0.000000
8/31/2011	10:19:04 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:19:04 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:19:05 PM	Tube furnace set to 150
8/31/2011	10:19:35 PM	Helium valve closed
8/31/2011	10:19:35 PM	H2 valve closed
8/31/2011	10:19:35 PM	BCl3 valve closed
8/31/2011	10:19:35 PM	PH3 valve closed
8/31/2011	10:19:35 PM	SiCl4 pre valve closed
8/31/2011	10:19:35 PM	SiCl4 post valve closed
8/31/2011	10:19:35 PM	Bypass valve closed
8/31/2011	10:19:35 PM	Bubbler valve closed
8/31/2011	10:19:35 PM	Main Vac valve opened
8/31/2011	10:19:35 PM	Helium MFC set to  0.000000
8/31/2011	10:19:35 PM	H2 MFC set to  0.000000
8/31/2011	10:19:35 PM	BCl3 MFC set to  0.000000
8/31/2011	10:19:35 PM	PHl3 MFC set to  0.000000
8/31/2011	10:19:35 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:19:35 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:19:35 PM	Tube furnace set to 150
8/31/2011	10:20:05 PM	H2 valve closed
8/31/2011	10:20:05 PM	BCl3 valve closed
8/31/2011	10:20:05 PM	PH3 valve closed
8/31/2011	10:20:05 PM	SiCl4 pre valve closed
8/31/2011	10:20:05 PM	SiCl4 post valve closed
8/31/2011	10:20:05 PM	Bypass valve closed
8/31/2011	10:20:05 PM	Bubbler valve closed
8/31/2011	10:20:05 PM	Helium valve opened
8/31/2011	10:20:05 PM	Main Vac valve opened
8/31/2011	10:20:05 PM	Helium MFC set to  20.000000
8/31/2011	10:20:05 PM	H2 MFC set to  0.000000
8/31/2011	10:20:05 PM	BCl3 MFC set to  0.000000
8/31/2011	10:20:05 PM	PHl3 MFC set to  0.000000
8/31/2011	10:20:05 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:20:05 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:20:05 PM	Tube furnace set to 150
8/31/2011	10:20:35 PM	Helium valve closed
8/31/2011	10:20:35 PM	H2 valve closed
8/31/2011	10:20:35 PM	BCl3 valve closed
8/31/2011	10:20:35 PM	PH3 valve closed
8/31/2011	10:20:35 PM	SiCl4 pre valve closed
8/31/2011	10:20:35 PM	SiCl4 post valve closed
8/31/2011	10:20:35 PM	Bypass valve closed
8/31/2011	10:20:35 PM	Bubbler valve closed
8/31/2011	10:20:35 PM	Main Vac valve opened
8/31/2011	10:20:35 PM	Helium MFC set to  0.000000
8/31/2011	10:20:35 PM	H2 MFC set to  0.000000
8/31/2011	10:20:35 PM	BCl3 MFC set to  0.000000
8/31/2011	10:20:35 PM	PHl3 MFC set to  0.000000
8/31/2011	10:20:35 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:20:35 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:20:35 PM	Tube furnace set to 150
8/31/2011	10:21:05 PM	H2 valve closed
8/31/2011	10:21:05 PM	BCl3 valve closed
8/31/2011	10:21:05 PM	PH3 valve closed
8/31/2011	10:21:05 PM	SiCl4 pre valve closed
8/31/2011	10:21:05 PM	SiCl4 post valve closed
8/31/2011	10:21:05 PM	Bypass valve closed
8/31/2011	10:21:05 PM	Bubbler valve closed
8/31/2011	10:21:05 PM	Helium valve opened
8/31/2011	10:21:05 PM	Main Vac valve opened
8/31/2011	10:21:05 PM	Helium MFC set to  20.000000
8/31/2011	10:21:05 PM	H2 MFC set to  0.000000
8/31/2011	10:21:05 PM	BCl3 MFC set to  0.000000
8/31/2011	10:21:05 PM	PHl3 MFC set to  0.000000
8/31/2011	10:21:05 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:21:05 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:21:05 PM	Tube furnace set to 150
8/31/2011	10:21:35 PM	Helium valve closed
8/31/2011	10:21:35 PM	H2 valve closed
8/31/2011	10:21:35 PM	BCl3 valve closed
8/31/2011	10:21:35 PM	PH3 valve closed
8/31/2011	10:21:35 PM	SiCl4 pre valve closed
8/31/2011	10:21:35 PM	SiCl4 post valve closed
8/31/2011	10:21:35 PM	Bypass valve closed
8/31/2011	10:21:35 PM	Bubbler valve closed
8/31/2011	10:21:35 PM	Main Vac valve opened
8/31/2011	10:21:35 PM	Helium MFC set to  0.000000
8/31/2011	10:21:35 PM	H2 MFC set to  0.000000
8/31/2011	10:21:35 PM	BCl3 MFC set to  0.000000
8/31/2011	10:21:35 PM	PHl3 MFC set to  0.000000
8/31/2011	10:21:35 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:21:35 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:21:36 PM	Tube furnace set to 150
8/31/2011	10:22:06 PM	H2 valve closed
8/31/2011	10:22:06 PM	BCl3 valve closed
8/31/2011	10:22:06 PM	PH3 valve closed
8/31/2011	10:22:06 PM	SiCl4 pre valve closed
8/31/2011	10:22:06 PM	SiCl4 post valve closed
8/31/2011	10:22:06 PM	Bypass valve closed
8/31/2011	10:22:06 PM	Bubbler valve closed
8/31/2011	10:22:06 PM	Helium valve opened
8/31/2011	10:22:06 PM	Main Vac valve opened
8/31/2011	10:22:06 PM	Helium MFC set to  20.000000
8/31/2011	10:22:06 PM	H2 MFC set to  0.000000
8/31/2011	10:22:06 PM	BCl3 MFC set to  0.000000
8/31/2011	10:22:06 PM	PHl3 MFC set to  0.000000
8/31/2011	10:22:06 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:22:06 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:22:06 PM	Tube furnace set to 150
8/31/2011	10:22:36 PM	Helium valve closed
8/31/2011	10:22:36 PM	H2 valve closed
8/31/2011	10:22:36 PM	BCl3 valve closed
8/31/2011	10:22:36 PM	PH3 valve closed
8/31/2011	10:22:36 PM	SiCl4 pre valve closed
8/31/2011	10:22:36 PM	SiCl4 post valve closed
8/31/2011	10:22:36 PM	Bypass valve closed
8/31/2011	10:22:36 PM	Bubbler valve closed
8/31/2011	10:22:36 PM	Main Vac valve opened
8/31/2011	10:22:36 PM	Helium MFC set to  0.000000
8/31/2011	10:22:36 PM	H2 MFC set to  0.000000
8/31/2011	10:22:36 PM	BCl3 MFC set to  0.000000
8/31/2011	10:22:36 PM	PHl3 MFC set to  0.000000
8/31/2011	10:22:36 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:22:36 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:22:36 PM	Tube furnace set to 150
8/31/2011	10:23:06 PM	H2 valve closed
8/31/2011	10:23:06 PM	BCl3 valve closed
8/31/2011	10:23:06 PM	PH3 valve closed
8/31/2011	10:23:06 PM	SiCl4 pre valve closed
8/31/2011	10:23:06 PM	SiCl4 post valve closed
8/31/2011	10:23:06 PM	Bypass valve closed
8/31/2011	10:23:06 PM	Bubbler valve closed
8/31/2011	10:23:06 PM	Helium valve opened
8/31/2011	10:23:06 PM	Main Vac valve opened
8/31/2011	10:23:06 PM	Helium MFC set to  20.000000
8/31/2011	10:23:06 PM	H2 MFC set to  0.000000
8/31/2011	10:23:06 PM	BCl3 MFC set to  0.000000
8/31/2011	10:23:06 PM	PHl3 MFC set to  0.000000
8/31/2011	10:23:06 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:23:06 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:23:06 PM	Tube furnace set to 150
8/31/2011	10:23:36 PM	Helium valve closed
8/31/2011	10:23:36 PM	H2 valve closed
8/31/2011	10:23:36 PM	BCl3 valve closed
8/31/2011	10:23:36 PM	PH3 valve closed
8/31/2011	10:23:36 PM	SiCl4 pre valve closed
8/31/2011	10:23:36 PM	SiCl4 post valve closed
8/31/2011	10:23:36 PM	Bypass valve closed
8/31/2011	10:23:36 PM	Bubbler valve closed
8/31/2011	10:23:36 PM	Main Vac valve opened
8/31/2011	10:23:36 PM	Helium MFC set to  0.000000
8/31/2011	10:23:36 PM	H2 MFC set to  0.000000
8/31/2011	10:23:36 PM	BCl3 MFC set to  0.000000
8/31/2011	10:23:36 PM	PHl3 MFC set to  0.000000
8/31/2011	10:23:36 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:23:36 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:23:36 PM	Tube furnace set to 150
8/31/2011	10:24:06 PM	H2 valve closed
8/31/2011	10:24:06 PM	BCl3 valve closed
8/31/2011	10:24:06 PM	PH3 valve closed
8/31/2011	10:24:06 PM	SiCl4 pre valve closed
8/31/2011	10:24:06 PM	SiCl4 post valve closed
8/31/2011	10:24:06 PM	Bypass valve closed
8/31/2011	10:24:06 PM	Bubbler valve closed
8/31/2011	10:24:06 PM	Helium valve opened
8/31/2011	10:24:06 PM	Main Vac valve opened
8/31/2011	10:24:06 PM	Helium MFC set to  20.000000
8/31/2011	10:24:06 PM	H2 MFC set to  0.000000
8/31/2011	10:24:06 PM	BCl3 MFC set to  0.000000
8/31/2011	10:24:06 PM	PHl3 MFC set to  0.000000
8/31/2011	10:24:06 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:24:06 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:24:07 PM	Tube furnace set to 150
8/31/2011	10:24:37 PM	Helium valve closed
8/31/2011	10:24:37 PM	H2 valve closed
8/31/2011	10:24:37 PM	BCl3 valve closed
8/31/2011	10:24:37 PM	PH3 valve closed
8/31/2011	10:24:37 PM	SiCl4 pre valve closed
8/31/2011	10:24:37 PM	SiCl4 post valve closed
8/31/2011	10:24:37 PM	Bypass valve closed
8/31/2011	10:24:37 PM	Bubbler valve closed
8/31/2011	10:24:37 PM	Main Vac valve opened
8/31/2011	10:24:37 PM	Helium MFC set to  0.000000
8/31/2011	10:24:37 PM	H2 MFC set to  0.000000
8/31/2011	10:24:37 PM	BCl3 MFC set to  0.000000
8/31/2011	10:24:37 PM	PHl3 MFC set to  0.000000
8/31/2011	10:24:37 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:24:37 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:24:37 PM	Tube furnace set to 150
8/31/2011	10:25:07 PM	H2 valve closed
8/31/2011	10:25:07 PM	BCl3 valve closed
8/31/2011	10:25:07 PM	PH3 valve closed
8/31/2011	10:25:07 PM	SiCl4 pre valve closed
8/31/2011	10:25:07 PM	SiCl4 post valve closed
8/31/2011	10:25:07 PM	Bypass valve closed
8/31/2011	10:25:07 PM	Bubbler valve closed
8/31/2011	10:25:07 PM	Helium valve opened
8/31/2011	10:25:07 PM	Main Vac valve opened
8/31/2011	10:25:07 PM	Helium MFC set to  20.000000
8/31/2011	10:25:07 PM	H2 MFC set to  0.000000
8/31/2011	10:25:07 PM	BCl3 MFC set to  0.000000
8/31/2011	10:25:07 PM	PHl3 MFC set to  0.000000
8/31/2011	10:25:07 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:25:07 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:25:07 PM	Tube furnace set to 150
8/31/2011	10:25:37 PM	Helium valve closed
8/31/2011	10:25:37 PM	H2 valve closed
8/31/2011	10:25:37 PM	BCl3 valve closed
8/31/2011	10:25:37 PM	PH3 valve closed
8/31/2011	10:25:37 PM	SiCl4 pre valve closed
8/31/2011	10:25:37 PM	SiCl4 post valve closed
8/31/2011	10:25:37 PM	Bypass valve closed
8/31/2011	10:25:37 PM	Bubbler valve closed
8/31/2011	10:25:37 PM	Main Vac valve opened
8/31/2011	10:25:37 PM	Helium MFC set to  0.000000
8/31/2011	10:25:37 PM	H2 MFC set to  0.000000
8/31/2011	10:25:37 PM	BCl3 MFC set to  0.000000
8/31/2011	10:25:37 PM	PHl3 MFC set to  0.000000
8/31/2011	10:25:37 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:25:37 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:25:37 PM	Tube furnace set to 150
8/31/2011	10:25:38 PM	Run finished at 10:25 PM
8/31/2011	10:28:47 PM	Recipe started at 10:28 PM
8/31/2011	10:28:47 PM	Helium valve closed
8/31/2011	10:28:47 PM	H2 valve closed
8/31/2011	10:28:47 PM	BCl3 valve closed
8/31/2011	10:28:47 PM	PH3 valve closed
8/31/2011	10:28:47 PM	SiCl4 pre valve closed
8/31/2011	10:28:47 PM	SiCl4 post valve closed
8/31/2011	10:28:47 PM	Main Vac valve closed
8/31/2011	10:28:47 PM	Bypass valve closed
8/31/2011	10:28:47 PM	Bubbler valve closed
8/31/2011	10:28:47 PM	Helium MFC set to  0.000000
8/31/2011	10:28:47 PM	H2 MFC set to  0.000000
8/31/2011	10:28:47 PM	BCl3 MFC set to  0.000000
8/31/2011	10:28:47 PM	PHl3 MFC set to  0.000000
8/31/2011	10:28:47 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:28:47 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:28:47 PM	Tube furnace set to 0
8/31/2011	10:28:50 PM	Helium valve closed
8/31/2011	10:28:50 PM	BCl3 valve closed
8/31/2011	10:28:50 PM	PH3 valve closed
8/31/2011	10:28:50 PM	SiCl4 pre valve closed
8/31/2011	10:28:50 PM	SiCl4 post valve closed
8/31/2011	10:28:50 PM	Main Vac valve closed
8/31/2011	10:28:50 PM	Bypass valve closed
8/31/2011	10:28:50 PM	Bubbler valve closed
8/31/2011	10:28:50 PM	H2 valve opened
8/31/2011	10:28:50 PM	Helium MFC set to  0.000000
8/31/2011	10:28:50 PM	H2 MFC set to  500.000000
8/31/2011	10:28:50 PM	BCl3 MFC set to  0.000000
8/31/2011	10:28:50 PM	PHl3 MFC set to  0.000000
8/31/2011	10:28:50 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:28:50 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:28:50 PM	Tube furnace set to 0
8/31/2011	10:29:53 PM	Helium valve closed
8/31/2011	10:29:53 PM	BCl3 valve closed
8/31/2011	10:29:53 PM	PH3 valve closed
8/31/2011	10:29:53 PM	SiCl4 pre valve closed
8/31/2011	10:29:53 PM	SiCl4 post valve closed
8/31/2011	10:29:53 PM	Main Vac valve closed
8/31/2011	10:29:53 PM	Bypass valve closed
8/31/2011	10:29:53 PM	H2 valve opened
8/31/2011	10:29:53 PM	Bubbler valve opened
8/31/2011	10:29:53 PM	Helium MFC set to  0.000000
8/31/2011	10:29:53 PM	H2 MFC set to  500.000000
8/31/2011	10:29:53 PM	BCl3 MFC set to  0.000000
8/31/2011	10:29:53 PM	PHl3 MFC set to  0.000000
8/31/2011	10:29:53 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:29:53 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:29:53 PM	Tube furnace set to 0
8/31/2011	10:29:54 PM	Helium valve closed
8/31/2011	10:29:54 PM	BCl3 valve closed
8/31/2011	10:29:54 PM	PH3 valve closed
8/31/2011	10:29:54 PM	SiCl4 pre valve closed
8/31/2011	10:29:54 PM	SiCl4 post valve closed
8/31/2011	10:29:54 PM	Main Vac valve closed
8/31/2011	10:29:54 PM	Bypass valve closed
8/31/2011	10:29:54 PM	H2 valve opened
8/31/2011	10:29:54 PM	Bubbler valve opened
8/31/2011	10:29:54 PM	Helium MFC set to  0.000000
8/31/2011	10:29:54 PM	H2 MFC set to  500.000000
8/31/2011	10:29:54 PM	BCl3 MFC set to  0.000000
8/31/2011	10:29:54 PM	PHl3 MFC set to  0.000000
8/31/2011	10:29:54 PM	SiCl4 MFC set to  0.000000
8/31/2011	10:29:54 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:29:54 PM	Tube furnace set to 1000
8/31/2011	10:49:54 PM	Helium valve closed
8/31/2011	10:49:54 PM	PH3 valve closed
8/31/2011	10:49:54 PM	Main Vac valve closed
8/31/2011	10:49:54 PM	Bypass valve closed
8/31/2011	10:49:54 PM	H2 valve opened
8/31/2011	10:49:54 PM	BCl3 valve opened
8/31/2011	10:49:54 PM	SiCl4 pre valve opened
8/31/2011	10:49:54 PM	SiCl4 post valve opened
8/31/2011	10:49:54 PM	Bubbler valve opened
8/31/2011	10:49:54 PM	Helium MFC set to  0.000000
8/31/2011	10:49:54 PM	H2 MFC set to  500.000000
8/31/2011	10:49:54 PM	BCl3 MFC set to  2.500000
8/31/2011	10:49:54 PM	PHl3 MFC set to  0.000000
8/31/2011	10:49:54 PM	SiCl4 MFC set to  50.000000
8/31/2011	10:49:54 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	10:49:54 PM	Tube furnace set to 1000
8/31/2011	11:19:54 PM	Helium valve closed
8/31/2011	11:19:54 PM	BCl3 valve closed
8/31/2011	11:19:54 PM	PH3 valve closed
8/31/2011	11:19:54 PM	SiCl4 pre valve closed
8/31/2011	11:19:54 PM	SiCl4 post valve closed
8/31/2011	11:19:54 PM	Main Vac valve closed
8/31/2011	11:19:54 PM	Bypass valve closed
8/31/2011	11:19:54 PM	H2 valve opened
8/31/2011	11:19:54 PM	Bubbler valve opened
8/31/2011	11:19:54 PM	Helium MFC set to  0.000000
8/31/2011	11:19:54 PM	H2 MFC set to  500.000000
8/31/2011	11:19:54 PM	BCl3 MFC set to  0.000000
8/31/2011	11:19:54 PM	PHl3 MFC set to  0.000000
8/31/2011	11:19:54 PM	SiCl4 MFC set to  0.000000
8/31/2011	11:19:54 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:19:54 PM	Tube furnace set to 750
8/31/2011	11:24:54 PM	H2 valve closed
8/31/2011	11:24:54 PM	BCl3 valve closed
8/31/2011	11:24:54 PM	PH3 valve closed
8/31/2011	11:24:54 PM	SiCl4 pre valve closed
8/31/2011	11:24:54 PM	SiCl4 post valve closed
8/31/2011	11:24:55 PM	Main Vac valve closed
8/31/2011	11:24:55 PM	Bypass valve closed
8/31/2011	11:24:55 PM	Helium valve opened
8/31/2011	11:24:55 PM	Bubbler valve opened
8/31/2011	11:24:55 PM	Helium MFC set to  500.000000
8/31/2011	11:24:55 PM	H2 MFC set to  0.000000
8/31/2011	11:24:55 PM	BCl3 MFC set to  0.000000
8/31/2011	11:24:55 PM	PHl3 MFC set to  0.000000
8/31/2011	11:24:55 PM	SiCl4 MFC set to  0.000000
8/31/2011	11:24:55 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:24:55 PM	Tube furnace set to 0
8/31/2011	11:44:55 PM	Helium valve closed
8/31/2011	11:44:55 PM	H2 valve closed
8/31/2011	11:44:55 PM	BCl3 valve closed
8/31/2011	11:44:55 PM	PH3 valve closed
8/31/2011	11:44:55 PM	SiCl4 pre valve closed
8/31/2011	11:44:55 PM	SiCl4 post valve closed
8/31/2011	11:44:55 PM	Main Vac valve closed
8/31/2011	11:44:55 PM	Bypass valve closed
8/31/2011	11:44:55 PM	Bubbler valve closed
8/31/2011	11:44:55 PM	Helium MFC set to  0.000000
8/31/2011	11:44:55 PM	H2 MFC set to  0.000000
8/31/2011	11:44:55 PM	BCl3 MFC set to  0.000000
8/31/2011	11:44:55 PM	PHl3 MFC set to  0.000000
8/31/2011	11:44:55 PM	SiCl4 MFC set to  0.000000
8/31/2011	11:44:55 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:44:55 PM	Tube furnace set to 0
8/31/2011	11:44:56 PM	Run finished at 11:44 PM
8/31/2011	11:54:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/31/2011	11:54:14 PM	Recipe started at 11:54 PM
8/31/2011	11:54:14 PM	Helium valve closed
8/31/2011	11:54:14 PM	H2 valve closed
8/31/2011	11:54:14 PM	BCl3 valve closed
8/31/2011	11:54:14 PM	PH3 valve closed
8/31/2011	11:54:14 PM	SiCl4 pre valve closed
8/31/2011	11:54:14 PM	SiCl4 post valve closed
8/31/2011	11:54:14 PM	Main Vac valve closed
8/31/2011	11:54:14 PM	Bubbler valve closed
8/31/2011	11:54:14 PM	Bypass valve opened
8/31/2011	11:54:14 PM	Helium MFC set to  0.000000
8/31/2011	11:54:14 PM	H2 MFC set to  0.000000
8/31/2011	11:54:14 PM	BCl3 MFC set to  0.000000
8/31/2011	11:54:14 PM	PHl3 MFC set to  0.000000
8/31/2011	11:54:14 PM	SiCl4 MFC set to  0.000000
8/31/2011	11:54:14 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:54:14 PM	Tube furnace set to 0
8/31/2011	11:55:15 PM	Helium valve closed
8/31/2011	11:55:15 PM	H2 valve closed
8/31/2011	11:55:15 PM	BCl3 valve closed
8/31/2011	11:55:15 PM	PH3 valve closed
8/31/2011	11:55:15 PM	SiCl4 pre valve closed
8/31/2011	11:55:15 PM	SiCl4 post valve closed
8/31/2011	11:55:15 PM	Main Vac valve closed
8/31/2011	11:55:15 PM	Bubbler valve closed
8/31/2011	11:55:15 PM	Bypass valve opened
8/31/2011	11:55:15 PM	Helium MFC set to  0.000000
8/31/2011	11:55:15 PM	H2 MFC set to  0.000000
8/31/2011	11:55:15 PM	BCl3 MFC set to  0.000000
8/31/2011	11:55:15 PM	PHl3 MFC set to  0.000000
8/31/2011	11:55:15 PM	SiCl4 MFC set to  0.000000
8/31/2011	11:55:15 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:55:15 PM	Tube furnace set to 0
8/31/2011	11:56:15 PM	Helium valve closed
8/31/2011	11:56:15 PM	H2 valve closed
8/31/2011	11:56:15 PM	BCl3 valve closed
8/31/2011	11:56:15 PM	PH3 valve closed
8/31/2011	11:56:15 PM	SiCl4 pre valve closed
8/31/2011	11:56:15 PM	SiCl4 post valve closed
8/31/2011	11:56:15 PM	Bypass valve closed
8/31/2011	11:56:15 PM	Bubbler valve closed
8/31/2011	11:56:15 PM	Main Vac valve opened
8/31/2011	11:56:15 PM	Helium MFC set to  0.000000
8/31/2011	11:56:15 PM	H2 MFC set to  0.000000
8/31/2011	11:56:15 PM	BCl3 MFC set to  0.000000
8/31/2011	11:56:15 PM	PHl3 MFC set to  0.000000
8/31/2011	11:56:15 PM	SiCl4 MFC set to  0.000000
8/31/2011	11:56:15 PM	Bypass solenoid MFC set to  0.000000
8/31/2011	11:56:15 PM	Tube furnace set to 0
8/31/2011	11:56:16 PM	Run finished at 11:56 PM
8/31/2011	11:56:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
